IL147986A0 - Inverted pressure vessel with horizontal throug loading - Google Patents

Inverted pressure vessel with horizontal throug loading

Info

Publication number
IL147986A0
IL147986A0 IL14798600A IL14798600A IL147986A0 IL 147986 A0 IL147986 A0 IL 147986A0 IL 14798600 A IL14798600 A IL 14798600A IL 14798600 A IL14798600 A IL 14798600A IL 147986 A0 IL147986 A0 IL 147986A0
Authority
IL
Israel
Prior art keywords
throug
loading
horizontal
pressure vessel
inverted pressure
Prior art date
Application number
IL14798600A
Other languages
English (en)
Original Assignee
S C Fluids Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S C Fluids Inc filed Critical S C Fluids Inc
Publication of IL147986A0 publication Critical patent/IL147986A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/008—Processes carried out under supercritical conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/06—Processes using ultra-high pressure, e.g. for the formation of diamonds; Apparatus therefor, e.g. moulds or dies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Closures For Containers (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
IL14798600A 1999-08-05 2000-08-04 Inverted pressure vessel with horizontal throug loading IL147986A0 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14725199P 1999-08-05 1999-08-05
US15545499P 1999-09-20 1999-09-20
PCT/US2000/021338 WO2001010733A1 (en) 1999-08-05 2000-08-04 Inverted pressure vessel with horizontal through loading

Publications (1)

Publication Number Publication Date
IL147986A0 true IL147986A0 (en) 2002-09-12

Family

ID=26844748

Family Applications (1)

Application Number Title Priority Date Filing Date
IL14798600A IL147986A0 (en) 1999-08-05 2000-08-04 Inverted pressure vessel with horizontal throug loading

Country Status (7)

Country Link
EP (1) EP1208047A4 (ja)
JP (1) JP2003506646A (ja)
KR (1) KR20020061589A (ja)
CN (1) CN1204024C (ja)
AU (1) AU6893600A (ja)
IL (1) IL147986A0 (ja)
WO (1) WO2001010733A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
KR100750018B1 (ko) * 2000-07-26 2007-08-16 동경 엘렉트론 주식회사 반도체 기판의 처리를 위한 고압 챔버 및 반도체 기판의고압 처리를 위한 장치
KR20030026333A (ko) * 2000-08-04 2003-03-31 에스.씨. 플루이즈, 아이엔씨. 보호 밀폐장치를 구비한 역방식의 압력용기
US6722642B1 (en) * 2002-11-06 2004-04-20 Tokyo Electron Limited High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
CN110410498A (zh) * 2018-04-28 2019-11-05 重庆海扶医疗科技股份有限公司 卡箍组件和压力容器
US20210260636A1 (en) * 2018-07-25 2021-08-26 Graftech International Holdings Inc. Extrusion press and method of using

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3744660A (en) * 1970-12-30 1973-07-10 Combustion Eng Shield for nuclear reactor vessel
US4789077A (en) * 1988-02-24 1988-12-06 Public Service Electric & Gas Company Closure apparatus for a high pressure vessel
US4823976A (en) * 1988-05-04 1989-04-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Quick actuating closure
US5236669A (en) * 1990-09-12 1993-08-17 E. I. Du Pont De Nemours And Company Pressure vessel
US5221019A (en) * 1991-11-07 1993-06-22 Hahn & Clay Remotely operable vessel cover positioner
JP2548062B2 (ja) * 1992-11-13 1996-10-30 日本エー・エス・エム株式会社 縦型熱処理装置用ロードロックチャンバー
US5556497A (en) * 1995-01-09 1996-09-17 Essef Corporation Fitting installation process
JP2969087B2 (ja) * 1996-11-06 1999-11-02 日本エー・エス・エム株式会社 半導体基板の処理方法

Also Published As

Publication number Publication date
WO2001010733A1 (en) 2001-02-15
AU6893600A (en) 2001-03-05
JP2003506646A (ja) 2003-02-18
CN1204024C (zh) 2005-06-01
EP1208047A1 (en) 2002-05-29
CN1368928A (zh) 2002-09-11
EP1208047A4 (en) 2004-03-31
KR20020061589A (ko) 2002-07-24

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