IL147627A0 - Cathode for vacuum arc evaporators
- Google Patents
Cathode for vacuum arc evaporators
Info
Publication number
IL147627A0
IL147627A0IL14762702AIL14762702AIL147627A0IL 147627 A0IL147627 A0IL 147627A0IL 14762702 AIL14762702 AIL 14762702AIL 14762702 AIL14762702 AIL 14762702AIL 147627 A0IL147627 A0IL 147627A0
Authority
IL
Israel
Prior art keywords
cathode
vacuum arc
arc evaporators
evaporators
vacuum
Prior art date
Application number
IL14762702A
Original Assignee
Varco Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varco LtdfiledCriticalVarco Ltd
Priority to IL14762702ApriorityCriticalpatent/IL147627A0/en
Publication of IL147627A0publicationCriticalpatent/IL147627A0/en
Priority to AU2003209606Aprioritypatent/AU2003209606A1/en
Priority to PCT/IL2003/000033prioritypatent/WO2003057939A2/en