GB2372146B - Cathode - Google Patents

Cathode

Info

Publication number
GB2372146B
GB2372146B GB0103252A GB0103252A GB2372146B GB 2372146 B GB2372146 B GB 2372146B GB 0103252 A GB0103252 A GB 0103252A GB 0103252 A GB0103252 A GB 0103252A GB 2372146 B GB2372146 B GB 2372146B
Authority
GB
United Kingdom
Prior art keywords
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0103252A
Other versions
GB0103252D0 (en
GB2372146A (en
Inventor
Tao Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vistec Lithography Ltd
Original Assignee
Vistec Lithography Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vistec Lithography Ltd filed Critical Vistec Lithography Ltd
Priority to GB0103252A priority Critical patent/GB2372146B/en
Publication of GB0103252D0 publication Critical patent/GB0103252D0/en
Publication of GB2372146A publication Critical patent/GB2372146A/en
Application granted granted Critical
Publication of GB2372146B publication Critical patent/GB2372146B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
GB0103252A 2001-02-09 2001-02-09 Cathode Expired - Fee Related GB2372146B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0103252A GB2372146B (en) 2001-02-09 2001-02-09 Cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0103252A GB2372146B (en) 2001-02-09 2001-02-09 Cathode

Publications (3)

Publication Number Publication Date
GB0103252D0 GB0103252D0 (en) 2001-03-28
GB2372146A GB2372146A (en) 2002-08-14
GB2372146B true GB2372146B (en) 2003-03-26

Family

ID=9908439

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0103252A Expired - Fee Related GB2372146B (en) 2001-02-09 2001-02-09 Cathode

Country Status (1)

Country Link
GB (1) GB2372146B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7176610B2 (en) 2004-02-10 2007-02-13 Toshiba Machine America, Inc. High brightness thermionic cathode
JP2011514637A (en) 2008-03-03 2011-05-06 カール ツァイス エヌティーエス エルエルシー Gas field ion source with a coated tip

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4168213A (en) * 1976-04-29 1979-09-18 U.S. Philips Corporation Field emission device and method of forming same
WO1996004674A2 (en) * 1994-08-05 1996-02-15 Central Research Laboratories Limited A self-aligned gate field emitter device and methods for producing the same
US5527200A (en) * 1992-12-11 1996-06-18 Samsung Display Devices Co., Ltd. Method for making a silicon field emission emitter
JPH09237567A (en) * 1996-02-29 1997-09-09 Mitsubishi Electric Corp Cold cathode element and its manufacture
JPH11339713A (en) * 1998-05-28 1999-12-10 Hamamatsu Photonics Kk Electrode for discharge tube

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4168213A (en) * 1976-04-29 1979-09-18 U.S. Philips Corporation Field emission device and method of forming same
US5527200A (en) * 1992-12-11 1996-06-18 Samsung Display Devices Co., Ltd. Method for making a silicon field emission emitter
WO1996004674A2 (en) * 1994-08-05 1996-02-15 Central Research Laboratories Limited A self-aligned gate field emitter device and methods for producing the same
JPH09237567A (en) * 1996-02-29 1997-09-09 Mitsubishi Electric Corp Cold cathode element and its manufacture
JPH11339713A (en) * 1998-05-28 1999-12-10 Hamamatsu Photonics Kk Electrode for discharge tube

Also Published As

Publication number Publication date
GB0103252D0 (en) 2001-03-28
GB2372146A (en) 2002-08-14

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20120209