IL118891A - Fluid controller - Google Patents

Fluid controller

Info

Publication number
IL118891A
IL118891A IL11889196A IL11889196A IL118891A IL 118891 A IL118891 A IL 118891A IL 11889196 A IL11889196 A IL 11889196A IL 11889196 A IL11889196 A IL 11889196A IL 118891 A IL118891 A IL 118891A
Authority
IL
Israel
Prior art keywords
fluid controller
fluid
controller
Prior art date
Application number
IL11889196A
Other languages
English (en)
Other versions
IL118891A0 (en
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of IL118891A0 publication Critical patent/IL118891A0/xx
Publication of IL118891A publication Critical patent/IL118891A/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7504—Removable valve head and seat unit
    • Y10T137/7668—Retained by bonnet or closure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
IL11889196A 1995-07-19 1996-07-18 Fluid controller IL118891A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18235095A JP3605705B2 (ja) 1995-07-19 1995-07-19 流体制御器

Publications (2)

Publication Number Publication Date
IL118891A0 IL118891A0 (en) 1996-10-31
IL118891A true IL118891A (en) 1999-07-14

Family

ID=16116782

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11889196A IL118891A (en) 1995-07-19 1996-07-18 Fluid controller

Country Status (8)

Country Link
US (1) US5771919A (xx)
EP (1) EP0754896B1 (xx)
JP (1) JP3605705B2 (xx)
KR (1) KR100473038B1 (xx)
CA (1) CA2181527A1 (xx)
DE (1) DE69621192T2 (xx)
IL (1) IL118891A (xx)
TW (1) TW405018B (xx)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5810031A (en) * 1996-02-21 1998-09-22 Aeroquip Corporation Ultra high purity gas distribution component with integral valved coupling and methods for its use
JP3650859B2 (ja) * 1996-06-25 2005-05-25 忠弘 大見 遮断開放器およびこれを備えた流体制御装置
US6293310B1 (en) 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
US6394138B1 (en) 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
JP4378553B2 (ja) * 1997-10-13 2009-12-09 忠弘 大見 流体制御装置
EP1571381B1 (en) * 1998-03-05 2009-12-02 The Swagelok Company Modular surface mount manifold
KR100538130B1 (ko) * 1998-03-05 2005-12-22 더 스와겔로크 컴퍼니 모듈형 표면 실장 매니폴드
US7048007B2 (en) 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
US6629546B2 (en) 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
DE69942568D1 (de) * 1998-05-18 2010-08-19 Swagelok Co Oberflächenmontierbarer Verteiler und Verbindungsstück dafür
EP1471296B1 (en) * 1998-05-18 2006-11-02 Swagelok Company Modular surface mount manifold assemblies
AU4002699A (en) * 1998-05-18 1999-12-06 Swagelok Company, The Modular surface mount manifold assemblies
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
US6729353B2 (en) * 1999-09-01 2004-05-04 Asml Us, Inc. Modular fluid delivery apparatus
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
TW524944B (en) 2001-05-16 2003-03-21 Unit Instr Inc Fluid flow system
CA2507589A1 (en) 2002-11-26 2004-06-10 Swagelok Company Modular surface mount fluid system
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
NL1025631C2 (nl) * 2004-03-03 2005-09-08 Berkin Bv Afdichtingsamenstel.
US7048008B2 (en) 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
US7299825B2 (en) 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
US7320339B2 (en) 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2007046697A (ja) * 2005-08-10 2007-02-22 Fujikin Inc 継手付き流体制御器
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
TWI534922B (zh) 2009-06-10 2016-05-21 威士塔戴爾泰克有限責任公司 極端流量和／或高溫流體輸送基板
JP5802532B2 (ja) * 2011-12-05 2015-10-28 株式会社フジキン ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット
US9869409B2 (en) * 2013-01-15 2018-01-16 Vistadeltek, Llc Gasket retainer for surface mount fluid component
US9696727B2 (en) * 2013-03-08 2017-07-04 Fujikin Incorporated Fluid control apparatus and thermal sensor installation structure with respect to fluid control apparatus
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
WO2018079288A1 (ja) * 2016-10-24 2018-05-03 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7308542B2 (ja) * 2018-10-26 2023-07-14 株式会社フジキン バルブ装置およびガス供給システム
JP7299630B2 (ja) * 2018-10-26 2023-06-28 株式会社フジキン バルブ装置およびガス供給システム

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1851940A (en) * 1929-11-13 1932-03-29 Orr H Williams Closure for conduits and the like
CH453908A (de) * 1967-12-29 1968-03-31 Hydrel Ag Instrumententafel mit auswechselbaren Ventilen für hydraulische oder pneumatische Steuerungen
GB1404992A (en) * 1971-05-12 1975-09-03 Process Systems Fluidic control system
DE3003377C2 (de) * 1980-01-31 1983-10-06 Gewerkschaft Eisenhuette Westfalia, 4670 Luenen Steckkupplung für Schlauchleitungsbündel
US4650227B1 (en) * 1982-08-23 2000-11-28 Cajon Co Fluid coupling
US4515184A (en) * 1983-07-18 1985-05-07 Abex Corporation Modular directional valve
JPS6060370A (ja) * 1983-08-27 1985-04-06 ツア−ンラトフアブリク　フリ−トリツヒシヤフエン　アクチエンゲゼルシヤフト パツキング装置
US4695034A (en) * 1984-11-27 1987-09-22 Stec Inc. Fluid control device
US4687020A (en) * 1985-05-17 1987-08-18 Doyle James H Fluid mass flow controller
US4796896A (en) * 1988-02-16 1989-01-10 General Motors Corporation Multi-stage elastomeric seal with retainer
JP2731080B2 (ja) * 1991-05-31 1998-03-25 株式会社本山製作所 ガス制御装置
US5236227B1 (en) * 1991-11-12 1996-12-03 Opti Com Manufacturing Network Assembly for connecting multi-duct conduits having tapered alignment walls
AT397724B (de) * 1992-11-12 1994-06-27 Avl Verbrennungskraft Messtech Dichtungselement
US5354101A (en) * 1993-09-13 1994-10-11 General Motors Corporation Sealing washer block connection
JP3311493B2 (ja) * 1994-06-01 2002-08-05 株式会社不二工機 レシーバドライヤ

Also Published As

Publication number Publication date
EP0754896B1 (en) 2002-05-15
KR970006936A (ko) 1997-02-21
TW405018B (en) 2000-09-11
US5771919A (en) 1998-06-30
IL118891A0 (en) 1996-10-31
DE69621192D1 (de) 2002-06-20
KR100473038B1 (ko) 2005-05-27
DE69621192T2 (de) 2002-11-14
JPH0932954A (ja) 1997-02-07
EP0754896A2 (en) 1997-01-22
EP0754896A3 (en) 1997-12-03
JP3605705B2 (ja) 2004-12-22
CA2181527A1 (en) 1997-01-20

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Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed
KB Patent renewed
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees