IL116194A - Densification of porous articles by plasma enhanced chemical vapor infiltration - Google Patents

Densification of porous articles by plasma enhanced chemical vapor infiltration

Info

Publication number
IL116194A
IL116194A IL11619495A IL11619495A IL116194A IL 116194 A IL116194 A IL 116194A IL 11619495 A IL11619495 A IL 11619495A IL 11619495 A IL11619495 A IL 11619495A IL 116194 A IL116194 A IL 116194A
Authority
IL
Israel
Prior art keywords
densification
chemical vapor
plasma enhanced
enhanced chemical
vapor infiltration
Prior art date
Application number
IL11619495A
Other languages
English (en)
Other versions
IL116194A0 (en
Original Assignee
Hughes Missile Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Missile Systems filed Critical Hughes Missile Systems
Publication of IL116194A0 publication Critical patent/IL116194A0/xx
Publication of IL116194A publication Critical patent/IL116194A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/71—Ceramic products containing macroscopic reinforcing agents
    • C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
    • C04B35/80—Fibres, filaments, whiskers, platelets, or the like
    • C04B35/83—Carbon fibres in a carbon matrix
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Ceramic Products (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Powder Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
IL11619495A 1994-12-27 1995-11-29 Densification of porous articles by plasma enhanced chemical vapor infiltration IL116194A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/364,157 US5468357A (en) 1994-12-27 1994-12-27 Densification of porous articles by plasma enhanced chemical vapor infiltration

Publications (2)

Publication Number Publication Date
IL116194A0 IL116194A0 (en) 1996-01-31
IL116194A true IL116194A (en) 1999-10-28

Family

ID=23433284

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11619495A IL116194A (en) 1994-12-27 1995-11-29 Densification of porous articles by plasma enhanced chemical vapor infiltration

Country Status (5)

Country Link
US (1) US5468357A (de)
EP (1) EP0719746B1 (de)
JP (1) JP2825783B2 (de)
DE (1) DE69512880T2 (de)
IL (1) IL116194A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0852223A1 (de) * 1996-12-04 1998-07-08 European Atomic Energy Community (Euratom) Verfahren zum Versiegeln von offenporigen keramischen Beschichtungen, insbesondere von wärmedämmenden Schichten
US6955745B1 (en) * 2002-08-01 2005-10-18 University Of Florida Research Foundation, Inc. Method of spark-processing silicon and resulting materials
US6787453B2 (en) * 2002-12-23 2004-09-07 Intel Corporation Barrier film integrity on porous low k dielectrics by application of a hydrocarbon plasma treatment
US7438839B2 (en) * 2004-10-01 2008-10-21 Honeywell International Inc. Formulation for the manufacture of carbon-carbon composite materials
DE102005042950A1 (de) * 2005-09-07 2007-03-08 Universität Dortmund Verfahren zur Herstellung von Kohlenstoff-Verbundwerkstoffen durch Plasmapyrolyse und thermisches Spritzen
US20100297360A1 (en) * 2006-08-07 2010-11-25 Messier-Bugatti Method for densification of porous articles
DE102015215483A1 (de) * 2015-08-13 2017-02-16 Siemens Aktiengesellschaft Plasmabeschichtungsverfahren für Kohlenstofffasern, Vorrichtung dazu und plasmabeschichtete Kohlenstofffasern

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3411949A (en) * 1965-08-13 1968-11-19 Air Force Usa Method and apparatus for the manufacture of pyrolytic fibers
US3745104A (en) * 1970-12-17 1973-07-10 Celanese Corp Surface modification of carbon fibers
US4707231A (en) * 1984-09-26 1987-11-17 Pradom Limited Process for preparing composite materials and products obtained with said process
JPH02501996A (ja) * 1987-01-23 1990-07-05 プラドム・リミテッド タイヤ、セラミックス、電極等の加硫製品を含む複合材の製造方法及びその方法によって製造された製品
US4956858A (en) * 1989-02-21 1990-09-11 General Electric Company Method of producing lubricated bearings
JP2712698B2 (ja) * 1990-01-26 1998-02-16 三菱電機株式会社 複合型気相含浸法によるｃ／ｃ複合材の製造方法
US5348774A (en) * 1993-08-11 1994-09-20 Alliedsignal Inc. Method of rapidly densifying a porous structure

Also Published As

Publication number Publication date
EP0719746A3 (de) 1996-09-04
JPH08225383A (ja) 1996-09-03
DE69512880D1 (de) 1999-11-25
DE69512880T2 (de) 2000-03-16
JP2825783B2 (ja) 1998-11-18
IL116194A0 (en) 1996-01-31
US5468357A (en) 1995-11-21
EP0719746A2 (de) 1996-07-03
EP0719746B1 (de) 1999-10-20

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Legal Events

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MM9K Patent not in force due to non-payment of renewal fees