KR0109516Y1 - Chemical vapor deposition - Google Patents

Chemical vapor deposition Download PDF

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Publication number
KR0109516Y1
KR0109516Y1 KR94008301U KR19940008301U KR0109516Y1 KR 0109516 Y1 KR0109516 Y1 KR 0109516Y1 KR 94008301 U KR94008301 U KR 94008301U KR 19940008301 U KR19940008301 U KR 19940008301U KR 0109516 Y1 KR0109516 Y1 KR 0109516Y1
Authority
KR
South Korea
Prior art keywords
vapor deposition
chemical vapor
chemical
deposition
vapor
Prior art date
Application number
KR94008301U
Other languages
Korean (ko)
Inventor
Inn-San Yu
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Priority to KR94008301U priority Critical patent/KR0109516Y1/en
Application granted granted Critical
Publication of KR0109516Y1 publication Critical patent/KR0109516Y1/en

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KR94008301U 1994-04-20 1994-04-20 Chemical vapor deposition KR0109516Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR94008301U KR0109516Y1 (en) 1994-04-20 1994-04-20 Chemical vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR94008301U KR0109516Y1 (en) 1994-04-20 1994-04-20 Chemical vapor deposition

Publications (1)

Publication Number Publication Date
KR0109516Y1 true KR0109516Y1 (en) 1998-04-06

Family

ID=19381356

Family Applications (1)

Application Number Title Priority Date Filing Date
KR94008301U KR0109516Y1 (en) 1994-04-20 1994-04-20 Chemical vapor deposition

Country Status (1)

Country Link
KR (1) KR0109516Y1 (en)

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