GB9521644D0 - Chemical vapour deposition - Google Patents

Chemical vapour deposition

Info

Publication number
GB9521644D0
GB9521644D0 GBGB9521644.6A GB9521644A GB9521644D0 GB 9521644 D0 GB9521644 D0 GB 9521644D0 GB 9521644 A GB9521644 A GB 9521644A GB 9521644 D0 GB9521644 D0 GB 9521644D0
Authority
GB
United Kingdom
Prior art keywords
vapour deposition
chemical vapour
chemical
deposition
vapour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9521644.6A
Other versions
GB2294273A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Epichem Ltd
Original Assignee
Epichem Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB9421335A external-priority patent/GB9421335D0/en
Application filed by Epichem Ltd filed Critical Epichem Ltd
Priority to GB9521644A priority Critical patent/GB2294273A/en
Publication of GB9521644D0 publication Critical patent/GB9521644D0/en
Publication of GB2294273A publication Critical patent/GB2294273A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C03C17/2453—Coating containing SnO2
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/211—SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/24—Doped oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
GB9521644A 1994-10-22 1995-10-23 Depositing tin oxide from a tetraalkoxy compound Withdrawn GB2294273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9521644A GB2294273A (en) 1994-10-22 1995-10-23 Depositing tin oxide from a tetraalkoxy compound

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9421335A GB9421335D0 (en) 1994-10-22 1994-10-22 Chemical vapour deposition
GB9521644A GB2294273A (en) 1994-10-22 1995-10-23 Depositing tin oxide from a tetraalkoxy compound

Publications (2)

Publication Number Publication Date
GB9521644D0 true GB9521644D0 (en) 1996-01-03
GB2294273A GB2294273A (en) 1996-04-24

Family

ID=26305853

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9521644A Withdrawn GB2294273A (en) 1994-10-22 1995-10-23 Depositing tin oxide from a tetraalkoxy compound

Country Status (1)

Country Link
GB (1) GB2294273A (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2103592B (en) * 1981-08-07 1985-05-01 Solarex Corp Method of applying an antireflective and/or dielectric coating
US4504522A (en) * 1984-03-15 1985-03-12 Ford Motor Company Method of making a titanium dioxide oxygen sensor element by chemical vapor deposition
US4857095A (en) * 1987-08-10 1989-08-15 Ford Motor Company Method for forming a fluorine-doped tin oxide coating on a glass substrate
US5004490A (en) * 1987-08-10 1991-04-02 Ford Motor Company Method of making glass substrate coated with tin oxide
US5389401A (en) * 1994-02-23 1995-02-14 Gordon; Roy G. Chemical vapor deposition of metal oxides

Also Published As

Publication number Publication date
GB2294273A (en) 1996-04-24

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)