HK34088A - Tetramethyltin dopant source for mocvd grown epitaxial semiconductor layers - Google Patents

Tetramethyltin dopant source for mocvd grown epitaxial semiconductor layers

Info

Publication number
HK34088A
HK34088A HK34088A HK34088A HK34088A HK 34088 A HK34088 A HK 34088A HK 34088 A HK34088 A HK 34088A HK 34088 A HK34088 A HK 34088A HK 34088 A HK34088 A HK 34088A
Authority
HK
Hong Kong
Prior art keywords
tetramethyltin
semiconductor layers
epitaxial semiconductor
dopant source
grown epitaxial
Prior art date
Application number
HK34088A
Inventor
James D Parsons
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1984/000403 external-priority patent/WO1984003905A1/en
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of HK34088A publication Critical patent/HK34088A/en

Links

HK34088A 1983-04-04 1988-05-02 Tetramethyltin dopant source for mocvd grown epitaxial semiconductor layers HK34088A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48209283A 1983-04-04 1983-04-04
PCT/US1984/000403 WO1984003905A1 (en) 1983-04-04 1984-03-15 Tetramethyltin dopant source for mocvd grown epitaxial semiconductor layers

Publications (1)

Publication Number Publication Date
HK34088A true HK34088A (en) 1988-05-13

Family

ID=26770169

Family Applications (1)

Application Number Title Priority Date Filing Date
HK34088A HK34088A (en) 1983-04-04 1988-05-02 Tetramethyltin dopant source for mocvd grown epitaxial semiconductor layers

Country Status (2)

Country Link
HK (1) HK34088A (en)
NO (1) NO161813C (en)

Also Published As

Publication number Publication date
NO161813C (en) 1989-09-27
NO844812L (en) 1984-12-03
NO161813B (en) 1989-06-19

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