GB2142045B - Growth of semiconductors - Google Patents
Growth of semiconductorsInfo
- Publication number
- GB2142045B GB2142045B GB08414018A GB8414018A GB2142045B GB 2142045 B GB2142045 B GB 2142045B GB 08414018 A GB08414018 A GB 08414018A GB 8414018 A GB8414018 A GB 8414018A GB 2142045 B GB2142045 B GB 2142045B
- Authority
- GB
- United Kingdom
- Prior art keywords
- semiconductors
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
- C23C16/4588—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically the substrate being rotated
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB08414018A GB2142045B (en) | 1983-06-15 | 1984-06-01 | Growth of semiconductors |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB838316318A GB8316318D0 (en) | 1983-06-15 | 1983-06-15 | Semiconductors |
GB08414018A GB2142045B (en) | 1983-06-15 | 1984-06-01 | Growth of semiconductors |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8414018D0 GB8414018D0 (en) | 1984-07-04 |
GB2142045A GB2142045A (en) | 1985-01-09 |
GB2142045B true GB2142045B (en) | 1987-12-31 |
Family
ID=26286373
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08414018A Expired GB2142045B (en) | 1983-06-15 | 1984-06-01 | Growth of semiconductors |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2142045B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8421162D0 (en) * | 1984-08-21 | 1984-09-26 | British Telecomm | Growth of semi-conductors |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1110946A (en) * | 1963-12-12 | 1968-04-24 | Ass Elect Ind | Improvements in or relating to the deposition of epitaxial layers |
DE1260047B (en) * | 1965-03-24 | 1968-02-01 | Siemens Ag | Heavy current cryotron |
GB1077320A (en) * | 1965-04-21 | 1967-07-26 | Murray Bloom | Improvements in and relating to semiconductors |
US4022939A (en) * | 1975-12-18 | 1977-05-10 | Western Electric Company, Inc. | Synchronous shielding in vacuum deposition system |
DE2847620C2 (en) * | 1978-11-02 | 1984-10-18 | Siemens AG, 1000 Berlin und 8000 München | Device for the production of electrical components, in particular film capacitors |
-
1984
- 1984-06-01 GB GB08414018A patent/GB2142045B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB8414018D0 (en) | 1984-07-04 |
GB2142045A (en) | 1985-01-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB8718943D0 (en) | Semiconductor crystal growth | |
GB8411094D0 (en) | Semiconductor | |
GB8416424D0 (en) | Epitaxial growth | |
EP0130591A3 (en) | Semiconductor device of resin-seal type | |
IL68523A0 (en) | Method of growing trichoderma | |
GB8408944D0 (en) | Growing plants | |
GB2146427B (en) | Semiconductor manufacture | |
GB8501876D0 (en) | Single-crystal semi-conductor devices | |
IL73844A0 (en) | Manufacture of semiconductor devices | |
GB2125705B (en) | Growing semiconductor single crystals | |
GB8421162D0 (en) | Growth of semi-conductors | |
DE3474613D1 (en) | Trench-defined semiconductor structure | |
GB2170043B (en) | Apparatus for the growth of semiconductor crystals | |
GB8411027D0 (en) | Growing preformed crystals | |
GB8409150D0 (en) | Plant growth | |
GR80695B (en) | Transformation of seed | |
GB8318321D0 (en) | Semiconductor structure | |
GB8430771D0 (en) | Cultivation of vegetables &c | |
EP0146388A3 (en) | Crystalline silicophosphoaluminate | |
GB2142045B (en) | Growth of semiconductors | |
GB8301350D0 (en) | Growth of semiconductors | |
GB2141945B (en) | Growing monocrystalline hg1-xcdxte | |
GB8426270D0 (en) | Semiconductor | |
GB8403755D0 (en) | Growth of semiconductors | |
GB2143745B (en) | Growing semi conductor crystals |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
732 | Registration of transactions, instruments or events in the register (sect. 32/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19950601 |