NO844812L - TETRAMETHYLTIN DOPER / SOURCE OF MOCVD-CULTIVATED EPITAXIAL SEMI-PART LAYER - Google Patents

TETRAMETHYLTIN DOPER / SOURCE OF MOCVD-CULTIVATED EPITAXIAL SEMI-PART LAYER

Info

Publication number
NO844812L
NO844812L NO844812A NO844812A NO844812L NO 844812 L NO844812 L NO 844812L NO 844812 A NO844812 A NO 844812A NO 844812 A NO844812 A NO 844812A NO 844812 L NO844812 L NO 844812L
Authority
NO
Norway
Prior art keywords
doper
tetramethyltin
mocvd
cultivated
source
Prior art date
Application number
NO844812A
Other languages
Norwegian (no)
Other versions
NO161813C (en
NO161813B (en
Inventor
James D Parsons
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1984/000403 external-priority patent/WO1984003905A1/en
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of NO844812L publication Critical patent/NO844812L/en
Publication of NO161813B publication Critical patent/NO161813B/en
Publication of NO161813C publication Critical patent/NO161813C/en

Links

NO844812A 1983-04-04 1984-12-03 PROCEDURE FOR, IN A METAL ORGANIC CHEMICAL VAPORATING SYSTEM INCLUDING A REACTOR ROOM, AA PROVIDES EPITAKSELY A TEAM OF SEMICONDUCTOR MATERIAL. NO161813C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48209283A 1983-04-04 1983-04-04
PCT/US1984/000403 WO1984003905A1 (en) 1983-04-04 1984-03-15 Tetramethyltin dopant source for mocvd grown epitaxial semiconductor layers

Publications (3)

Publication Number Publication Date
NO844812L true NO844812L (en) 1984-12-03
NO161813B NO161813B (en) 1989-06-19
NO161813C NO161813C (en) 1989-09-27

Family

ID=26770169

Family Applications (1)

Application Number Title Priority Date Filing Date
NO844812A NO161813C (en) 1983-04-04 1984-12-03 PROCEDURE FOR, IN A METAL ORGANIC CHEMICAL VAPORATING SYSTEM INCLUDING A REACTOR ROOM, AA PROVIDES EPITAKSELY A TEAM OF SEMICONDUCTOR MATERIAL.

Country Status (2)

Country Link
HK (1) HK34088A (en)
NO (1) NO161813C (en)

Also Published As

Publication number Publication date
NO161813C (en) 1989-09-27
HK34088A (en) 1988-05-13
NO161813B (en) 1989-06-19

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