HK1245412A1 - 至少具有第一和第二光學組件的物鏡 - Google Patents

至少具有第一和第二光學組件的物鏡

Info

Publication number
HK1245412A1
HK1245412A1 HK18104973.3A HK18104973A HK1245412A1 HK 1245412 A1 HK1245412 A1 HK 1245412A1 HK 18104973 A HK18104973 A HK 18104973A HK 1245412 A1 HK1245412 A1 HK 1245412A1
Authority
HK
Hong Kong
Prior art keywords
deivce
objective
optical
optical deivce
Prior art date
Application number
HK18104973.3A
Other languages
English (en)
Inventor
蒂姆‧巴爾德希芬
本德‧塞赫
於爾根‧魏澤
喬治‧文德利希
Original Assignee
業納光學系統有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 業納光學系統有限公司 filed Critical 業納光學系統有限公司
Publication of HK1245412A1 publication Critical patent/HK1245412A1/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/021—Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Lenses (AREA)
  • Lens Barrels (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
HK18104973.3A 2016-06-30 2018-04-17 至少具有第一和第二光學組件的物鏡 HK1245412A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016008176 2016-06-30
DE102017209325.0A DE102017209325B4 (de) 2016-06-30 2017-06-01 F-Theta-Objektiv mit zumindest einer ersten und einer zweiten optischen Baugruppe und eine Anordnung zur Lasermaterialbearbeitung mit einem F-Theta-Objektiv

Publications (1)

Publication Number Publication Date
HK1245412A1 true HK1245412A1 (zh) 2018-08-24

Family

ID=60662707

Family Applications (1)

Application Number Title Priority Date Filing Date
HK18104973.3A HK1245412A1 (zh) 2016-06-30 2018-04-17 至少具有第一和第二光學組件的物鏡

Country Status (6)

Country Link
JP (1) JP2018005232A (zh)
KR (1) KR20180003463A (zh)
CN (2) CN207148395U (zh)
DE (1) DE102017209325B4 (zh)
HK (1) HK1245412A1 (zh)
SG (1) SG10201705423QA (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017209325B4 (de) * 2016-06-30 2021-11-04 Jenoptik Optical Systems Gmbh F-Theta-Objektiv mit zumindest einer ersten und einer zweiten optischen Baugruppe und eine Anordnung zur Lasermaterialbearbeitung mit einem F-Theta-Objektiv
DE102019109794A1 (de) * 2019-04-12 2020-10-15 Jenoptik Optical Systems Gmbh F-Theta-Objektiv mit einer ersten und zumindest einer zweiten optischen Baugruppe

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03155512A (ja) 1989-11-14 1991-07-03 Topcon Corp レンズの製造方法
JP3214262B2 (ja) 1994-11-15 2001-10-02 松下電器産業株式会社 投写レンズ装置
US6104554A (en) 1999-05-06 2000-08-15 U.S. Precision Lens Projection television lens assembly
JP4320184B2 (ja) * 2003-02-10 2009-08-26 Ｈｏｙａ株式会社 対物レンズユニット、該対物レンズユニットの組立方法
CN101520543B (zh) * 2005-02-07 2010-08-25 中国科学院光电技术研究所 深紫外投影光刻物镜
DE202005015719U1 (de) * 2005-10-07 2005-12-08 Trumpf Laser Gmbh + Co. Kg F/theta-Objektiv und Scannervorrichtung damit
JP5067863B2 (ja) * 2007-11-28 2012-11-07 キヤノン株式会社 光学系及びそれを有する光学機器
JP2010134376A (ja) * 2008-12-08 2010-06-17 Sumitomo Electric Ind Ltd レンズユニット
JP5829294B2 (ja) * 2014-02-20 2015-12-09 オリンパス株式会社 対物レンズ構造、対物レンズ構造の製造方法
CN204883025U (zh) * 2015-08-04 2015-12-16 江苏宜清光电科技有限公司 一种可360°投射的镜头
CN105527706B (zh) * 2016-02-03 2018-03-02 上海仪万光电科技有限公司 紫外激光远心F‑theta扫描场镜及基于该场镜的光学扫描系统
DE102017209325B4 (de) * 2016-06-30 2021-11-04 Jenoptik Optical Systems Gmbh F-Theta-Objektiv mit zumindest einer ersten und einer zweiten optischen Baugruppe und eine Anordnung zur Lasermaterialbearbeitung mit einem F-Theta-Objektiv

Also Published As

Publication number Publication date
CN107561668A (zh) 2018-01-09
KR20180003463A (ko) 2018-01-09
SG10201705423QA (en) 2018-01-30
CN207148395U (zh) 2018-03-27
JP2018005232A (ja) 2018-01-11
DE102017209325B4 (de) 2021-11-04
CN107561668B (zh) 2021-07-09
DE102017209325A1 (de) 2018-01-04

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