HK1243772A1 - Pattern drawing device and pattern drawing method - Google Patents

Pattern drawing device and pattern drawing method

Info

Publication number
HK1243772A1
HK1243772A1 HK18103077.0A HK18103077A HK1243772A1 HK 1243772 A1 HK1243772 A1 HK 1243772A1 HK 18103077 A HK18103077 A HK 18103077A HK 1243772 A1 HK1243772 A1 HK 1243772A1
Authority
HK
Hong Kong
Prior art keywords
pattern drawing
drawing device
drawing method
pattern
Prior art date
Application number
HK18103077.0A
Other languages
Chinese (zh)
Inventor
小宮山弘樹
Original Assignee
株式會社尼康
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式會社尼康 filed Critical 株式會社尼康
Publication of HK1243772A1 publication Critical patent/HK1243772A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
HK18103077.0A 2015-06-17 2018-03-02 Pattern drawing device and pattern drawing method HK1243772A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015121839 2015-06-17
PCT/JP2016/068075 WO2016204267A1 (en) 2015-06-17 2016-06-17 Pattern drawing device and pattern drawing method

Publications (1)

Publication Number Publication Date
HK1243772A1 true HK1243772A1 (en) 2018-07-20

Family

ID=57546184

Family Applications (1)

Application Number Title Priority Date Filing Date
HK18103077.0A HK1243772A1 (en) 2015-06-17 2018-03-02 Pattern drawing device and pattern drawing method

Country Status (6)

Country Link
JP (3) JP6627875B2 (en)
KR (2) KR20230173214A (en)
CN (3) CN107735715B (en)
HK (1) HK1243772A1 (en)
TW (2) TWI689788B (en)
WO (1) WO2016204267A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7136601B2 (en) * 2018-06-25 2022-09-13 川崎重工業株式会社 Light guide device and laser processing device
TWI693482B (en) * 2018-12-22 2020-05-11 財團法人工業技術研究院 Exposure apparatus
EP4148500A4 (en) * 2020-05-09 2023-10-25 Inspec Inc. Drawing method, drawing device, and program
JP7443176B2 (en) 2020-07-15 2024-03-05 シャープ株式会社 Optical scanning device and image forming device

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58105117A (en) * 1981-12-18 1983-06-22 Fujitsu Ltd Photoscanner
JPS6016058A (en) * 1983-07-08 1985-01-26 Hitachi Ltd Optical beam scanning device
JPH1048558A (en) * 1996-07-29 1998-02-20 Nec Niigata Ltd Laser scanning optical unit
US5969347A (en) * 1996-12-26 1999-10-19 Asahi Kogaku Kogyo Kabushiki Kaisha Synchronizing apparatus of a cascade scanning optical system having tilting measurement of reflecting surfaces
CN1189040A (en) * 1997-01-06 1998-07-29 旭光学工业株式会社 Scanning apparatus having cascade scanning optical system
US6288817B2 (en) * 1998-01-21 2001-09-11 Avanex Corporation High duty cycle synchronized multi-line scanner
JP4141056B2 (en) * 1999-06-25 2008-08-27 株式会社リコー Multi-beam image forming apparatus
FR2800968B1 (en) * 1999-11-05 2002-09-13 Automa Tech Sa LASER RADIATION PANEL EXPOSURE MACHINE
JP2001162863A (en) * 1999-12-13 2001-06-19 Asahi Optical Co Ltd Resolution variable light scanning device
JP4315573B2 (en) * 2000-05-08 2009-08-19 富士フイルム株式会社 Optical recording method and optical recording apparatus using the same
JP2002023089A (en) * 2000-07-04 2002-01-23 Asahi Optical Co Ltd Scanning-type plotting device
JP4731761B2 (en) * 2001-08-24 2011-07-27 株式会社リコー Optical writing apparatus and image forming apparatus
JP2003140069A (en) * 2001-10-30 2003-05-14 Panasonic Communications Co Ltd Optical scanner and its adjusting method
JP2006058795A (en) * 2004-08-23 2006-03-02 Ricoh Co Ltd Light beam scanner and image forming apparatus
JP2006251688A (en) * 2005-03-14 2006-09-21 Ricoh Co Ltd Optical scanner/image forming apparatus
JP2007118329A (en) * 2005-10-27 2007-05-17 Noritsu Koki Co Ltd Exposure method, exposure device, and photograph processor using the same
JP5223211B2 (en) * 2006-03-15 2013-06-26 株式会社リコー Image processing method and image processing apparatus
JP5034632B2 (en) * 2007-04-12 2012-09-26 株式会社ニコン Pattern generator, pattern forming apparatus, and pattern generation method
JP2011090188A (en) * 2009-10-23 2011-05-06 Sharp Corp Optical scanner and image forming apparatus using the same
JP2012163868A (en) * 2011-02-09 2012-08-30 Ricoh Co Ltd Optical scanner, and image forming apparatus
JP5772165B2 (en) * 2011-04-08 2015-09-02 株式会社リコー Optical scanning apparatus and image forming apparatus
TWI638241B (en) * 2012-03-26 2018-10-11 日商尼康股份有限公司 Substrate processing apparatus, processing apparatus and device manufacturing method
JP5906115B2 (en) * 2012-03-29 2016-04-20 川崎重工業株式会社 Optical scanning apparatus and laser processing apparatus
WO2014041941A1 (en) * 2012-09-14 2014-03-20 株式会社ニコン Substrate processing device and device manufacturing method
JP6349924B2 (en) * 2014-04-28 2018-07-04 株式会社ニコン Pattern drawing device
CN109343214B (en) * 2014-04-28 2021-05-18 株式会社尼康 Pattern drawing device

Also Published As

Publication number Publication date
TWI689788B (en) 2020-04-01
WO2016204267A1 (en) 2016-12-22
CN111665687B (en) 2023-06-16
JP2020064306A (en) 2020-04-23
CN111665687A (en) 2020-09-15
TWI736147B (en) 2021-08-11
KR102680203B1 (en) 2024-07-02
TW201702762A (en) 2017-01-16
TW202022506A (en) 2020-06-16
JP6911907B2 (en) 2021-07-28
JP2019074748A (en) 2019-05-16
JPWO2016204267A1 (en) 2018-04-12
CN107735715B (en) 2020-07-17
KR20180018568A (en) 2018-02-21
KR20230173214A (en) 2023-12-26
CN111665686B (en) 2024-01-05
CN111665686A (en) 2020-09-15
JP6627875B2 (en) 2020-01-08
JP6614319B2 (en) 2019-12-04
CN107735715A (en) 2018-02-23

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