HK1207419A1 - 外觀檢查裝置 - Google Patents
外觀檢查裝置Info
- Publication number
- HK1207419A1 HK1207419A1 HK15107992.6A HK15107992A HK1207419A1 HK 1207419 A1 HK1207419 A1 HK 1207419A1 HK 15107992 A HK15107992 A HK 15107992A HK 1207419 A1 HK1207419 A1 HK 1207419A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- inspection apparatus
- visual inspection
- visual
- inspection
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8841—Illumination and detection on two sides of object
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013181288A JP5555839B1 (ja) | 2013-09-02 | 2013-09-02 | 外観検査装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1207419A1 true HK1207419A1 (zh) | 2016-01-29 |
Family
ID=51416903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK15107992.6A HK1207419A1 (zh) | 2013-09-02 | 2015-08-18 | 外觀檢查裝置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US9261463B2 (zh) |
JP (1) | JP5555839B1 (zh) |
KR (1) | KR101454823B1 (zh) |
CN (1) | CN104422699B (zh) |
HK (1) | HK1207419A1 (zh) |
MY (1) | MY168515A (zh) |
SG (1) | SG10201404636PA (zh) |
TW (1) | TWI495866B (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5828180B1 (ja) * | 2014-11-05 | 2015-12-02 | アキム株式会社 | 外観検査付搬送装置、外観検査付搬送方法 |
JP5803034B1 (ja) * | 2014-11-05 | 2015-11-04 | アキム株式会社 | 搬送装置、搬送方法 |
JP5835758B1 (ja) * | 2014-11-21 | 2015-12-24 | 上野精機株式会社 | 外観検査装置 |
KR20210099172A (ko) * | 2015-06-05 | 2021-08-11 | 케이엘에이 코포레이션 | 반도체 디바이스들의 적어도 측면들의 검사를 위한 장치, 방법 및 컴퓨터 프로그램 제품 |
TWI611179B (zh) * | 2016-04-06 | 2018-01-11 | 旺矽科技股份有限公司 | 外觀檢測裝置 |
JP6832650B2 (ja) * | 2016-08-18 | 2021-02-24 | 株式会社Screenホールディングス | 検査装置および検査方法 |
DE102019125127A1 (de) * | 2019-09-18 | 2021-03-18 | Mühlbauer Gmbh & Co. Kg | Bauteilhandhabung, Bauteilinspektion |
DE102019125134A1 (de) | 2019-09-18 | 2021-03-18 | Mühlbauer Gmbh & Co. Kg | Bauteilhandhabung, Bauteilinspektion |
CN114518727B (zh) * | 2020-11-18 | 2023-09-12 | 台达电子工业股份有限公司 | 出料控制系统及其出料控制方法 |
TWI755935B (zh) * | 2020-11-18 | 2022-02-21 | 台達電子工業股份有限公司 | 出料控制系統及其出料控制方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06103170B2 (ja) * | 1987-07-30 | 1994-12-14 | 株式会社マキ製作所 | 物品の外観検査方法と装置 |
JPH0533765Y2 (zh) * | 1987-08-27 | 1993-08-27 | ||
JP3600010B2 (ja) * | 1998-05-06 | 2004-12-08 | エヌ・ティ・ティ・ファネット・システムズ株式会社 | 検査対象物の外観検査方法とその装置 |
JP3726532B2 (ja) * | 1999-02-12 | 2005-12-14 | 松下電器産業株式会社 | 外観検査装置 |
JP4251307B2 (ja) | 1999-05-31 | 2009-04-08 | オカノ電機株式会社 | 外観検査装置 |
JP2002277502A (ja) * | 2001-01-12 | 2002-09-25 | Nidec-Read Corp | 基板検査装置及び基板検査方法 |
JP3629244B2 (ja) * | 2002-02-19 | 2005-03-16 | 本多エレクトロン株式会社 | ウエーハ用検査装置 |
JP2003254726A (ja) | 2002-02-28 | 2003-09-10 | Shibuya Kogyo Co Ltd | 半導体素子の外観検査装置 |
JP4214137B2 (ja) * | 2005-07-20 | 2009-01-28 | 日本山村硝子株式会社 | 容器の外形検査装置 |
JP4466669B2 (ja) * | 2007-03-26 | 2010-05-26 | Tdk株式会社 | 外観検査装置 |
KR20110067775A (ko) * | 2009-12-15 | 2011-06-22 | 세크론 주식회사 | 전자 부품 검사 장치 및 방법 |
CN102116745A (zh) * | 2009-12-30 | 2011-07-06 | 上海允科自动化有限公司 | 一种ic元件检测系统 |
JP5252516B2 (ja) * | 2010-11-30 | 2013-07-31 | 上野精機株式会社 | 電子部品保持装置、及びこれを備える電子部品検査装置、電子部品分類装置 |
CN102359758B (zh) * | 2011-07-21 | 2013-03-20 | 华中科技大学 | 一种半导体芯片的外观检测装置 |
-
2013
- 2013-09-02 JP JP2013181288A patent/JP5555839B1/ja active Active
-
2014
- 2014-05-27 TW TW103118429A patent/TWI495866B/zh active
- 2014-06-23 CN CN201410283324.0A patent/CN104422699B/zh active Active
- 2014-08-05 KR KR20140100501A patent/KR101454823B1/ko active IP Right Grant
- 2014-08-05 SG SG10201404636PA patent/SG10201404636PA/en unknown
- 2014-08-06 US US14/453,321 patent/US9261463B2/en active Active
- 2014-08-14 MY MYPI2014702255A patent/MY168515A/en unknown
-
2015
- 2015-08-18 HK HK15107992.6A patent/HK1207419A1/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
SG10201404636PA (en) | 2015-04-29 |
JP2015049153A (ja) | 2015-03-16 |
CN104422699A (zh) | 2015-03-18 |
JP5555839B1 (ja) | 2014-07-23 |
US9261463B2 (en) | 2016-02-16 |
TW201508265A (zh) | 2015-03-01 |
CN104422699B (zh) | 2016-04-06 |
KR101454823B1 (ko) | 2014-10-28 |
MY168515A (en) | 2018-11-12 |
US20150062329A1 (en) | 2015-03-05 |
TWI495866B (zh) | 2015-08-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20200622 |