HK1111127A1 - Processing method of fine structure and processing equipment for fine structure - Google Patents

Processing method of fine structure and processing equipment for fine structure

Info

Publication number
HK1111127A1
HK1111127A1 HK08105897.5A HK08105897A HK1111127A1 HK 1111127 A1 HK1111127 A1 HK 1111127A1 HK 08105897 A HK08105897 A HK 08105897A HK 1111127 A1 HK1111127 A1 HK 1111127A1
Authority
HK
Hong Kong
Prior art keywords
fine structure
processing method
processing
processing equipment
equipment
Prior art date
Application number
HK08105897.5A
Other languages
English (en)
Original Assignee
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries
Publication of HK1111127A1 publication Critical patent/HK1111127A1/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/02—Moulds or cores; Details thereof or accessories therefor with incorporated heating or cooling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/52—Heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B29C2043/023—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
    • B29C2043/025—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/04—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds
    • B29C2043/046—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds travelling between different stations, e.g. feeding, moulding, curing stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Microembossing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/30—Mounting, exchanging or centering
    • B29C33/306—Exchangeable mould parts, e.g. cassette moulds, mould inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/16—Cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/04—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Thermal Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Micromachines (AREA)
HK08105897.5A 2005-02-25 2008-05-27 Processing method of fine structure and processing equipment for fine structure HK1111127A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005050829 2005-02-25
JP2005132561 2005-04-28
PCT/JP2006/303016 WO2006090682A1 (ja) 2005-02-25 2006-02-21 微細構造体の加工方法および微細構造体の加工装置

Publications (1)

Publication Number Publication Date
HK1111127A1 true HK1111127A1 (en) 2008-08-01

Family

ID=36927322

Family Applications (1)

Application Number Title Priority Date Filing Date
HK08105897.5A HK1111127A1 (en) 2005-02-25 2008-05-27 Processing method of fine structure and processing equipment for fine structure

Country Status (7)

Country Link
US (1) US7713052B2 (de)
EP (1) EP1854617A4 (de)
JP (1) JP4784601B2 (de)
KR (1) KR100892801B1 (de)
CN (1) CN101160203B (de)
HK (1) HK1111127A1 (de)
WO (1) WO2006090682A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101889241B (zh) * 2007-12-07 2012-03-21 塔工程有限公司 用于加热图案框架的设备
JP5376930B2 (ja) 2008-12-19 2013-12-25 キヤノン株式会社 液体吐出ヘッドの製造方法
CN102892569A (zh) * 2010-07-29 2013-01-23 赫斯基注塑系统有限公司 包括具有包封在氮化铝中的电阻元件的加热器的模具总成
JP5263440B1 (ja) * 2012-11-05 2013-08-14 オムロン株式会社 転写成形方法、及び、転写成形装置
JP6895038B2 (ja) * 2018-09-26 2021-06-30 福井県 複合シート材料の製造方法および製造装置
CN114919107B (zh) * 2022-05-17 2024-02-27 深圳技术大学 硅模具的高温模压成型装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2532501A (en) * 1944-01-27 1950-12-05 Combined Optical Ind Ltd Molding of plastics
JPS58171918A (ja) * 1982-04-01 1983-10-08 Asahi Chem Ind Co Ltd 強靭なるアクリルシ−ト
JPH01109400A (ja) 1987-10-23 1989-04-26 Seiko Epson Corp 音声録音再生装置
JPH01109400U (de) * 1988-01-13 1989-07-24
JPH02102009A (ja) 1988-10-12 1990-04-13 Canon Inc 加圧成型用金型および加圧成型方法
US5945137A (en) * 1995-06-28 1999-08-31 Fuji Photo Film Co., Ltd. Disk producing apparatus for manufacturing a photo film cassette
US5893994A (en) * 1996-04-17 1999-04-13 Irwin Research & Development, Inc. Adjustable length heat tunnel for varying shot lengths
JPH09323200A (ja) 1996-06-06 1997-12-16 Meiki Co Ltd プレス成形方法およびプレス成形装置
US6099771A (en) * 1998-07-08 2000-08-08 Lear Corporation Vacuum compression method for forming molded thermoplastic floor mat having a "Class A" finish
SE515607C2 (sv) * 1999-12-10 2001-09-10 Obducat Ab Anordning och metod vid tillverkning av strukturer
JP4266328B2 (ja) 2002-06-17 2009-05-20 株式会社ナガセインテグレックス 転写装置
DE10246942A1 (de) * 2002-10-08 2004-04-22 Battenfeld Gmbh Vorrichtung zum Erzeugen von Mikrostrukturen
JP2004136333A (ja) 2002-10-18 2004-05-13 Dainippon Printing Co Ltd 急速冷却機能を有する熱プレス装置
JP2004148398A (ja) * 2002-11-01 2004-05-27 Dainippon Printing Co Ltd 二度プレス機構を有する熱プレス装置
JP4220282B2 (ja) 2003-03-20 2009-02-04 株式会社日立製作所 ナノプリント装置、及び微細構造転写方法
US20040241049A1 (en) * 2003-04-04 2004-12-02 Carvalho Bruce L. Elastomeric tools for the fabrication of elastomeric devices and uses thereof
WO2004093171A1 (ja) * 2003-04-11 2004-10-28 Scivax Corporation パターン形成装置、パターン形成方法
EP1594001B1 (de) * 2004-05-07 2015-12-30 Obducat AB Gerät und Verfahren für die Imprint-Lithographie

Also Published As

Publication number Publication date
WO2006090682A1 (ja) 2006-08-31
EP1854617A1 (de) 2007-11-14
KR100892801B1 (ko) 2009-04-10
CN101160203A (zh) 2008-04-09
JPWO2006090682A1 (ja) 2008-07-24
KR20070102752A (ko) 2007-10-19
US7713052B2 (en) 2010-05-11
US20080169583A1 (en) 2008-07-17
JP4784601B2 (ja) 2011-10-05
CN101160203B (zh) 2012-09-19
EP1854617A4 (de) 2011-07-06

Similar Documents

Publication Publication Date Title
GB2433014B (en) Method of and apparatus for processing graphics
EP1898453A4 (de) Substratverarbeitungsverfahren und substratverarbeitungsvorrichtung
EP1936671A4 (de) Substratverarbeitungsvorrichtung und substratverarbeitungsverfahren
EP1909313A4 (de) Substratverarbeitungsvorrichtung und substratverarbeitungsverfahren
GB2441685B (en) Antenna apparatus and method of forming same
HK1123776A1 (en) Identity document processing equipment and method of use
GB0501688D0 (en) Method and apparatus
HK1105476A1 (en) Method and equipment for processing of encoded signals
GB0506186D0 (en) Apparatus and method
GB0526501D0 (en) Method and Apparatus
GB0522971D0 (en) Apparatus and method
EP1851525A4 (de) Verfahren und vorrichtung zur gewebebearbeitung
GB2444863B (en) Method of and apparatus for processing graphics
GB2426252B (en) Processing apparatus and method
HK1111127A1 (en) Processing method of fine structure and processing equipment for fine structure
TWI318089B (en) Apparatus and method for arranging devices for processing
GB0611868D0 (en) Method and apparatus
GB0605136D0 (en) Apparatus and method
EP1959480A4 (de) Plasmaverarbeitungsvorrichtung und plasmaverarbeitungsverfahren
GB0711483D0 (en) Apparatus and method
GB0513613D0 (en) Apparatus and method
GB0508695D0 (en) Apparatus and method
GB2442432B (en) Processing method and apparatus
GB0521948D0 (en) Apparatus and method of shot classification
EP1880571A4 (de) Computerlautsprechervorrichtung und verfahren damit

Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20180221