HK1053999A1 - Control of laser machining - Google Patents

Control of laser machining

Info

Publication number
HK1053999A1
HK1053999A1 HK03105872A HK03105872A HK1053999A1 HK 1053999 A1 HK1053999 A1 HK 1053999A1 HK 03105872 A HK03105872 A HK 03105872A HK 03105872 A HK03105872 A HK 03105872A HK 1053999 A1 HK1053999 A1 HK 1053999A1
Authority
HK
Hong Kong
Prior art keywords
control
laser machining
increasing
trough
machined
Prior art date
Application number
HK03105872A
Inventor
Adrian Boyle
Kali Dunne
Maria Farsari
Original Assignee
Xsil Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xsil Technology Ltd filed Critical Xsil Technology Ltd
Publication of HK1053999A1 publication Critical patent/HK1053999A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Dicing (AREA)
  • Laser Surgery Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Micromachines (AREA)

Abstract

A UV laser beam is used to machine semiconductor. The beams intensity (IB) is chosen so that it lies in a range of such values for which there is an increasing (preferably linear) material removal rate for increasing IB An elongate formation such as a trough or a slot is machined in n scans laterally offset (O_centre), for each value of z-integer in the z direction.
HK03105872A 2000-10-26 2003-08-16 Control of laser machining HK1053999A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
IE20000865 2000-10-26
IE20001022 2000-12-15
IE20001015 2000-12-15
PCT/IE2001/000136 WO2002034455A1 (en) 2000-10-26 2001-10-26 Control of laser machining

Publications (1)

Publication Number Publication Date
HK1053999A1 true HK1053999A1 (en) 2003-11-14

Family

ID=27270594

Family Applications (1)

Application Number Title Priority Date Filing Date
HK03105872A HK1053999A1 (en) 2000-10-26 2003-08-16 Control of laser machining

Country Status (11)

Country Link
US (1) US6586707B2 (en)
EP (1) EP1328372B1 (en)
JP (1) JP2004512690A (en)
KR (1) KR100829876B1 (en)
CN (1) CN100400215C (en)
AT (1) ATE346715T1 (en)
AU (1) AU2002210859A1 (en)
DE (1) DE60124938T2 (en)
HK (1) HK1053999A1 (en)
IE (1) IES20010949A2 (en)
WO (1) WO2002034455A1 (en)

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Also Published As

Publication number Publication date
IE20010950A1 (en) 2002-07-10
IES20010949A2 (en) 2002-07-10
WO2002034455A1 (en) 2002-05-02
DE60124938T2 (en) 2007-09-20
US6586707B2 (en) 2003-07-01
US20020088780A1 (en) 2002-07-11
CN100400215C (en) 2008-07-09
KR100829876B1 (en) 2008-05-16
DE60124938D1 (en) 2007-01-11
AU2002210859A1 (en) 2002-05-06
CN1473088A (en) 2004-02-04
EP1328372B1 (en) 2006-11-29
KR20040005850A (en) 2004-01-16
EP1328372A1 (en) 2003-07-23
ATE346715T1 (en) 2006-12-15
JP2004512690A (en) 2004-04-22

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20161026