HK1049547A1 - Substrate processing method and apparatus - Google Patents

Substrate processing method and apparatus

Info

Publication number
HK1049547A1
HK1049547A1 HK03101589.2A HK03101589A HK1049547A1 HK 1049547 A1 HK1049547 A1 HK 1049547A1 HK 03101589 A HK03101589 A HK 03101589A HK 1049547 A1 HK1049547 A1 HK 1049547A1
Authority
HK
Hong Kong
Prior art keywords
processing method
substrate processing
substrate
processing
Prior art date
Application number
HK03101589.2A
Other languages
Chinese (zh)
Inventor
大橋敏雄
Original Assignee
雅馬哈株式會社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 雅馬哈株式會社 filed Critical 雅馬哈株式會社
Publication of HK1049547A1 publication Critical patent/HK1049547A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/18—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float
    • F16K31/20—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a lift valve
    • F16K31/22—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a lift valve with the float rigidly connected to the valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/53—Mechanical actuating means with toothed gearing
    • F16K31/54—Mechanical actuating means with toothed gearing with pinion and rack
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K33/00—Floats for actuation of valves or other apparatus
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
    • E03D1/00—Water flushing devices with cisterns ; Setting up a range of flushing devices or water-closets; Combinations of several flushing devices
    • E03D1/30—Valves for high or low level cisterns; Their arrangement ; Flushing mechanisms in the cistern, optionally with provisions for a pre-or a post- flushing and for cutting off the flushing mechanism in case of leakage
    • E03D1/33—Adaptations or arrangements of floats
HK03101589.2A 2001-05-30 2003-03-04 Substrate processing method and apparatus HK1049547A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001162153 2001-05-30

Publications (1)

Publication Number Publication Date
HK1049547A1 true HK1049547A1 (en) 2003-05-16

Family

ID=19005322

Family Applications (1)

Application Number Title Priority Date Filing Date
HK03101589.2A HK1049547A1 (en) 2001-05-30 2003-03-04 Substrate processing method and apparatus

Country Status (4)

Country Link
KR (1) KR100614187B1 (en)
CN (1) CN1267973C (en)
HK (1) HK1049547A1 (en)
TW (1) TW559927B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3560962B1 (en) * 2003-07-02 2004-09-02 エス・イー・エス株式会社 Substrate processing method and substrate processing apparatus
JP2007519216A (en) * 2003-07-04 2007-07-12 株式会社荏原製作所 Substrate processing equipment
KR100776281B1 (en) * 2006-06-20 2007-11-13 세메스 주식회사 Apparatus for treating substrates
TWI378502B (en) 2006-06-12 2012-12-01 Semes Co Ltd Method and apparatus for cleaning substrates
KR102359846B1 (en) * 2021-08-13 2022-02-09 (주)피앤테크 Gas furnishing device for homogeneous gas furnishing into the chamber of deposition equipment

Also Published As

Publication number Publication date
CN1388569A (en) 2003-01-01
KR100614187B1 (en) 2006-08-18
TW559927B (en) 2003-11-01
CN1267973C (en) 2006-08-02
KR20020091819A (en) 2002-12-06

Similar Documents

Publication Publication Date Title
SG106599A1 (en) Substrate processing apparatus and substrate processing method
SG94851A1 (en) Substrate processing apparatus and substrate processing method
GB2383220B (en) Data processing apparatus and method
SG123602A1 (en) Substrate processing apparatus and substrate processing method
HK1098849A1 (en) Data processing method and its apparatus
SG105487A1 (en) Substrate processing apparatus and substrate processing method
EP1330075A4 (en) Information processing apparatus and method
AU4351601A (en) Wafer processing apparatus and method
EP1443421A4 (en) Information processing apparatus and information processing method
EP1308992A4 (en) Device and method for processing substrate
AU2003249616A8 (en) Substrate processing apparatus and related systems and methods
EP1407114A4 (en) Rock-bolting apparatus and method
HK1061614A1 (en) Information processing apparatus and information processing method
EP1397828A4 (en) Electrolytic processing device and substrate processing apparatus
EP1443422A4 (en) Information processing apparatus and information processing method
GB0101259D0 (en) Apparatus and method
EP1536460A4 (en) Substrate processing device and substrate processing method
AU2002354143A1 (en) Substrate processing method and substrate processing apparatus
EP1255287A4 (en) Substrate processing method, and apparatus therefor
EP1532668A4 (en) Substrate processing apparatus and substrate processing method
SG91902A1 (en) Substrate processing method and substrate processing apparatus
SG104267A1 (en) Substrate processing apparatus and substrate processing method
GB0129841D0 (en) Data processing apparatus and method
EP1422597A4 (en) Information processing apparatus and method
AU2003286823A1 (en) Substrate processing apparatus and method