HK1049547A1 - 基板處理方法及裝置 - Google Patents
基板處理方法及裝置Info
- Publication number
- HK1049547A1 HK1049547A1 HK03101589.2A HK03101589A HK1049547A1 HK 1049547 A1 HK1049547 A1 HK 1049547A1 HK 03101589 A HK03101589 A HK 03101589A HK 1049547 A1 HK1049547 A1 HK 1049547A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- processing method
- substrate processing
- substrate
- processing
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/18—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float
- F16K31/20—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a lift valve
- F16K31/22—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a lift valve with the float rigidly connected to the valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
- F16K31/53—Mechanical actuating means with toothed gearing
- F16K31/54—Mechanical actuating means with toothed gearing with pinion and rack
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K33/00—Floats for actuation of valves or other apparatus
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
- E03D1/00—Water flushing devices with cisterns ; Setting up a range of flushing devices or water-closets; Combinations of several flushing devices
- E03D1/30—Valves for high or low level cisterns; Their arrangement ; Flushing mechanisms in the cistern, optionally with provisions for a pre-or a post- flushing and for cutting off the flushing mechanism in case of leakage
- E03D1/33—Adaptations or arrangements of floats
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001162153 | 2001-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1049547A1 true HK1049547A1 (zh) | 2003-05-16 |
Family
ID=19005322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK03101589.2A HK1049547A1 (zh) | 2001-05-30 | 2003-03-04 | 基板處理方法及裝置 |
Country Status (4)
Country | Link |
---|---|
KR (1) | KR100614187B1 (zh) |
CN (1) | CN1267973C (zh) |
HK (1) | HK1049547A1 (zh) |
TW (1) | TW559927B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3560962B1 (ja) * | 2003-07-02 | 2004-09-02 | エス・イー・エス株式会社 | 基板処理法及び基板処理装置 |
US20070026150A1 (en) * | 2003-07-04 | 2007-02-01 | Takao Horiuchi | Substrate processing system |
KR100776281B1 (ko) * | 2006-06-20 | 2007-11-13 | 세메스 주식회사 | 기판 처리 장치 |
TWI378502B (en) | 2006-06-12 | 2012-12-01 | Semes Co Ltd | Method and apparatus for cleaning substrates |
KR102359846B1 (ko) * | 2021-08-13 | 2022-02-09 | (주)피앤테크 | 증착 장비 내 균일한 가스 공급을 위한 가스 공급 장치 |
-
2002
- 2002-05-28 TW TW091111312A patent/TW559927B/zh not_active IP Right Cessation
- 2002-05-29 KR KR1020020029942A patent/KR100614187B1/ko not_active IP Right Cessation
- 2002-05-30 CN CNB02121655XA patent/CN1267973C/zh not_active Expired - Fee Related
-
2003
- 2003-03-04 HK HK03101589.2A patent/HK1049547A1/zh unknown
Also Published As
Publication number | Publication date |
---|---|
CN1388569A (zh) | 2003-01-01 |
CN1267973C (zh) | 2006-08-02 |
KR20020091819A (ko) | 2002-12-06 |
KR100614187B1 (ko) | 2006-08-18 |
TW559927B (en) | 2003-11-01 |
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