HK1049143A1 - 多層合成電路作闊隙基底結合 - Google Patents
多層合成電路作闊隙基底結合Info
- Publication number
- HK1049143A1 HK1049143A1 HK03100965.8A HK03100965A HK1049143A1 HK 1049143 A1 HK1049143 A1 HK 1049143A1 HK 03100965 A HK03100965 A HK 03100965A HK 1049143 A1 HK1049143 A1 HK 1049143A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- wide
- integrated circuit
- substrate bonding
- gap substrate
- level integrated
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/00238—Joining a substrate with an electronic processing unit and a substrate with a micromechanical structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/0023—Packaging together an electronic processing unit die and a micromechanical structure die
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Micromachines (AREA)
- Wire Bonding (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/879,876 US6686642B2 (en) | 2001-06-11 | 2001-06-11 | Multi-level integrated circuit for wide-gap substrate bonding |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1049143A1 true HK1049143A1 (zh) | 2003-05-02 |
Family
ID=25375063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK03100965.8A HK1049143A1 (zh) | 2001-06-11 | 2003-02-10 | 多層合成電路作闊隙基底結合 |
Country Status (7)
Country | Link |
---|---|
US (2) | US6686642B2 (zh) |
EP (1) | EP1266863A3 (zh) |
JP (1) | JP2002373912A (zh) |
KR (1) | KR20020095107A (zh) |
CN (1) | CN1248312C (zh) |
HK (1) | HK1049143A1 (zh) |
SG (1) | SG96686A1 (zh) |
Families Citing this family (51)
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DE10144343A1 (de) * | 2001-09-10 | 2003-03-27 | Perkinelmer Optoelectronics | Sensor zum berührugslosen Messen einer Temperatur |
SI1515717T1 (sl) * | 2002-06-13 | 2009-02-28 | Novartis Ag | Kalcijeve soli statinov, izvedenih iz indola |
DE10231730B4 (de) * | 2002-07-13 | 2012-08-30 | Robert Bosch Gmbh | Mikrostrukturbauelement |
US6790748B2 (en) * | 2002-12-19 | 2004-09-14 | Intel Corporation | Thinning techniques for wafer-to-wafer vertical stacks |
ITTO20030269A1 (it) | 2003-04-08 | 2004-10-09 | St Microelectronics Srl | Procedimento per la fabbricazione di un dispositivo |
US20070073448A1 (en) * | 2003-08-19 | 2007-03-29 | Renesas Technology Corp. | Semiconductor device having a hole or a step of normal mesa shape as viewed from any cross-section and manufacturing method of the same |
US20050170609A1 (en) * | 2003-12-15 | 2005-08-04 | Alie Susan A. | Conductive bond for through-wafer interconnect |
US7034393B2 (en) * | 2003-12-15 | 2006-04-25 | Analog Devices, Inc. | Semiconductor assembly with conductive rim and method of producing the same |
US6946728B2 (en) * | 2004-02-19 | 2005-09-20 | Hewlett-Packard Development Company, L.P. | System and methods for hermetic sealing of post media-filled MEMS package |
JP2005302605A (ja) * | 2004-04-14 | 2005-10-27 | Canon Inc | 半導体装置 |
US7608534B2 (en) * | 2004-06-02 | 2009-10-27 | Analog Devices, Inc. | Interconnection of through-wafer vias using bridge structures |
DE102004043120A1 (de) * | 2004-09-07 | 2006-03-09 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit Hohlraum und Herstellungsverfahren für ein solches Bauelement |
US7198981B2 (en) * | 2004-10-21 | 2007-04-03 | Honeywell International Inc. | Vacuum sealed surface acoustic wave pressure sensor |
CA2592055A1 (en) | 2004-12-27 | 2006-07-06 | Quantum Paper, Inc. | Addressable and printable emissive display |
US7214324B2 (en) * | 2005-04-15 | 2007-05-08 | Delphi Technologies, Inc. | Technique for manufacturing micro-electro mechanical structures |
EP2275793A1 (en) * | 2006-05-23 | 2011-01-19 | Sensirion Holding AG | A pressure sensor having a chamber and a method for fabricating the same |
US20070121477A1 (en) * | 2006-06-15 | 2007-05-31 | Nanochip, Inc. | Cantilever with control of vertical and lateral position of contact probe tip |
US20070290282A1 (en) * | 2006-06-15 | 2007-12-20 | Nanochip, Inc. | Bonded chip assembly with a micro-mover for microelectromechanical systems |
US20070291623A1 (en) * | 2006-06-15 | 2007-12-20 | Nanochip, Inc. | Cantilever with control of vertical and lateral position of contact probe tip |
US20080074792A1 (en) * | 2006-09-21 | 2008-03-27 | Nanochip, Inc. | Control scheme for a memory device |
US20080074984A1 (en) * | 2006-09-21 | 2008-03-27 | Nanochip, Inc. | Architecture for a Memory Device |
DE102006046292B9 (de) * | 2006-09-29 | 2014-04-30 | Epcos Ag | Bauelement mit MEMS-Mikrofon und Verfahren zur Herstellung |
US20080087979A1 (en) * | 2006-10-13 | 2008-04-17 | Analog Devices, Inc. | Integrated Circuit with Back Side Conductive Paths |
US20080233672A1 (en) * | 2007-03-20 | 2008-09-25 | Nanochip, Inc. | Method of integrating mems structures and cmos structures using oxide fusion bonding |
US8133768B2 (en) * | 2007-05-31 | 2012-03-13 | Nthdegree Technologies Worldwide Inc | Method of manufacturing a light emitting, photovoltaic or other electronic apparatus and system |
US9425357B2 (en) | 2007-05-31 | 2016-08-23 | Nthdegree Technologies Worldwide Inc. | Diode for a printable composition |
US8877101B2 (en) | 2007-05-31 | 2014-11-04 | Nthdegree Technologies Worldwide Inc | Method of manufacturing a light emitting, power generating or other electronic apparatus |
US8852467B2 (en) | 2007-05-31 | 2014-10-07 | Nthdegree Technologies Worldwide Inc | Method of manufacturing a printable composition of a liquid or gel suspension of diodes |
US9419179B2 (en) | 2007-05-31 | 2016-08-16 | Nthdegree Technologies Worldwide Inc | Diode for a printable composition |
US9018833B2 (en) | 2007-05-31 | 2015-04-28 | Nthdegree Technologies Worldwide Inc | Apparatus with light emitting or absorbing diodes |
US8809126B2 (en) | 2007-05-31 | 2014-08-19 | Nthdegree Technologies Worldwide Inc | Printable composition of a liquid or gel suspension of diodes |
US9343593B2 (en) | 2007-05-31 | 2016-05-17 | Nthdegree Technologies Worldwide Inc | Printable composition of a liquid or gel suspension of diodes |
US8846457B2 (en) | 2007-05-31 | 2014-09-30 | Nthdegree Technologies Worldwide Inc | Printable composition of a liquid or gel suspension of diodes |
US8456393B2 (en) * | 2007-05-31 | 2013-06-04 | Nthdegree Technologies Worldwide Inc | Method of manufacturing a light emitting, photovoltaic or other electronic apparatus and system |
US8889216B2 (en) | 2007-05-31 | 2014-11-18 | Nthdegree Technologies Worldwide Inc | Method of manufacturing addressable and static electronic displays |
US9534772B2 (en) | 2007-05-31 | 2017-01-03 | Nthdegree Technologies Worldwide Inc | Apparatus with light emitting diodes |
US8415879B2 (en) | 2007-05-31 | 2013-04-09 | Nthdegree Technologies Worldwide Inc | Diode for a printable composition |
US8674593B2 (en) | 2007-05-31 | 2014-03-18 | Nthdegree Technologies Worldwide Inc | Diode for a printable composition |
US7992332B2 (en) | 2008-05-13 | 2011-08-09 | Nthdegree Technologies Worldwide Inc. | Apparatuses for providing power for illumination of a display object |
US8127477B2 (en) | 2008-05-13 | 2012-03-06 | Nthdegree Technologies Worldwide Inc | Illuminating display systems |
WO2010059433A2 (en) | 2008-11-07 | 2010-05-27 | The Charles Stark Draper Laboratory, Inc. | Mems dosimeter |
US20110073967A1 (en) * | 2009-08-28 | 2011-03-31 | Analog Devices, Inc. | Apparatus and method of forming a mems acoustic transducer with layer transfer processes |
CN102792715A (zh) * | 2009-08-28 | 2012-11-21 | 美国亚德诺半导体公司 | 双单晶背板麦克风系统及其制造方法 |
US9099381B2 (en) | 2012-11-15 | 2015-08-04 | International Business Machines Corporation | Selective gallium nitride regrowth on (100) silicon |
US9423578B2 (en) * | 2013-08-01 | 2016-08-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method of manufacturing |
EP2871456B1 (en) | 2013-11-06 | 2018-10-10 | Invensense, Inc. | Pressure sensor and method for manufacturing a pressure sensor |
EP2871455B1 (en) | 2013-11-06 | 2020-03-04 | Invensense, Inc. | Pressure sensor |
US9330929B1 (en) * | 2014-10-13 | 2016-05-03 | Infineon Technologies Dresden Gmbh | Systems and methods for horizontal integration of acceleration sensor structures |
EP3076146B1 (en) | 2015-04-02 | 2020-05-06 | Invensense, Inc. | Pressure sensor |
US11225409B2 (en) | 2018-09-17 | 2022-01-18 | Invensense, Inc. | Sensor with integrated heater |
WO2020236661A1 (en) | 2019-05-17 | 2020-11-26 | Invensense, Inc. | A pressure sensor with improve hermeticity |
Family Cites Families (19)
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US5216490A (en) * | 1988-01-13 | 1993-06-01 | Charles Stark Draper Laboratory, Inc. | Bridge electrodes for microelectromechanical devices |
US4989063A (en) * | 1988-12-09 | 1991-01-29 | The United States Of America As Represented By The Secretary Of The Air Force | Hybrid wafer scale microcircuit integration |
US5371431A (en) * | 1992-03-04 | 1994-12-06 | Mcnc | Vertical microelectronic field emission devices including elongate vertical pillars having resistive bottom portions |
US5545291A (en) * | 1993-12-17 | 1996-08-13 | The Regents Of The University Of California | Method for fabricating self-assembling microstructures |
US5581028A (en) * | 1994-06-23 | 1996-12-03 | Hewlett Packard Company | Fluid property sensors incorporating plated metal rings for improved packaging |
US5557596A (en) | 1995-03-20 | 1996-09-17 | Gibson; Gary | Ultra-high density storage device |
US5827102A (en) * | 1996-05-13 | 1998-10-27 | Micron Technology, Inc. | Low temperature method for evacuating and sealing field emission displays |
DE19720300B4 (de) | 1996-06-03 | 2006-05-04 | CiS Institut für Mikrosensorik gGmbH | Elektronisches Hybrid-Bauelement und Verfahren zu seiner Herstellung |
JP3171785B2 (ja) | 1996-06-20 | 2001-06-04 | 富士通株式会社 | 薄型表示装置、及びそれに用いる電界放出陰極の製造方法 |
US5919548A (en) * | 1996-10-11 | 1999-07-06 | Sandia Corporation | Chemical-mechanical polishing of recessed microelectromechanical devices |
US5903099A (en) * | 1997-05-23 | 1999-05-11 | Tini Alloy Company | Fabrication system, method and apparatus for microelectromechanical devices |
US6137212A (en) | 1998-05-26 | 2000-10-24 | The United States Of America As Represented By The Secretary Of The Army | Field emission flat panel display with improved spacer architecture |
US6062461A (en) * | 1998-06-03 | 2000-05-16 | Delphi Technologies, Inc. | Process for bonding micromachined wafers using solder |
US6100477A (en) * | 1998-07-17 | 2000-08-08 | Texas Instruments Incorporated | Recessed etch RF micro-electro-mechanical switch |
US6118181A (en) | 1998-07-29 | 2000-09-12 | Agilent Technologies, Inc. | System and method for bonding wafers |
EP1243025A2 (en) | 1999-09-30 | 2002-09-25 | Alpha Industries, Inc. | Semiconductor packaging |
US6291908B1 (en) * | 1999-10-06 | 2001-09-18 | Trw Inc. | Micro-miniature switch apparatus |
US6713828B1 (en) * | 1999-12-17 | 2004-03-30 | Delphi Technologies, Inc. | Monolithic fully-integrated vacuum sealed BiCMOS pressure sensor |
US6319745B1 (en) * | 2000-05-31 | 2001-11-20 | International Business Machines Corporation | Formation of charge-coupled-device with image pick-up array |
-
2001
- 2001-06-11 US US09/879,876 patent/US6686642B2/en not_active Expired - Lifetime
-
2002
- 2002-03-19 SG SG200201609A patent/SG96686A1/en unknown
- 2002-05-28 EP EP02253722A patent/EP1266863A3/en not_active Withdrawn
- 2002-05-30 JP JP2002157074A patent/JP2002373912A/ja not_active Withdrawn
- 2002-06-10 KR KR1020020032284A patent/KR20020095107A/ko not_active Application Discontinuation
- 2002-06-11 CN CNB021243085A patent/CN1248312C/zh not_active Expired - Lifetime
-
2003
- 2003-02-10 HK HK03100965.8A patent/HK1049143A1/zh unknown
- 2003-05-13 US US10/437,868 patent/US6878638B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20030201513A1 (en) | 2003-10-30 |
EP1266863A2 (en) | 2002-12-18 |
KR20020095107A (ko) | 2002-12-20 |
US6878638B2 (en) | 2005-04-12 |
JP2002373912A (ja) | 2002-12-26 |
US20020185737A1 (en) | 2002-12-12 |
US6686642B2 (en) | 2004-02-03 |
CN1248312C (zh) | 2006-03-29 |
CN1391281A (zh) | 2003-01-15 |
EP1266863A3 (en) | 2004-11-17 |
SG96686A1 (en) | 2003-06-16 |
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