HK1033690A1 - Membrane for a capacitive vacuum measuring cell - Google Patents

Membrane for a capacitive vacuum measuring cell

Info

Publication number
HK1033690A1
HK1033690A1 HK01102263A HK01102263A HK1033690A1 HK 1033690 A1 HK1033690 A1 HK 1033690A1 HK 01102263 A HK01102263 A HK 01102263A HK 01102263 A HK01102263 A HK 01102263A HK 1033690 A1 HK1033690 A1 HK 1033690A1
Authority
HK
Hong Kong
Prior art keywords
membrane
measuring cell
vacuum measuring
capacitive vacuum
capacitive
Prior art date
Application number
HK01102263A
Other languages
English (en)
Inventor
Per Bjorkman
Original Assignee
Unaxis Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers Ag filed Critical Unaxis Balzers Ag
Publication of HK1033690A1 publication Critical patent/HK1033690A1/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
HK01102263A 1997-12-23 2001-03-28 Membrane for a capacitive vacuum measuring cell HK1033690A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH295497 1997-12-23
PCT/CH1998/000516 WO1999034185A1 (de) 1997-12-23 1998-12-04 Membrane für eine kapazitive vakuummesszelle

Publications (1)

Publication Number Publication Date
HK1033690A1 true HK1033690A1 (en) 2001-09-14

Family

ID=4245386

Family Applications (1)

Application Number Title Priority Date Filing Date
HK01102263A HK1033690A1 (en) 1997-12-23 2001-03-28 Membrane for a capacitive vacuum measuring cell

Country Status (6)

Country Link
US (2) US6528008B1 (xx)
EP (1) EP1040333B1 (xx)
JP (1) JP4334139B2 (xx)
DE (1) DE59804701D1 (xx)
HK (1) HK1033690A1 (xx)
WO (1) WO1999034185A1 (xx)

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* Cited by examiner, † Cited by third party
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US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
JP4334139B2 (ja) * 1997-12-23 2009-09-30 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 容量式の真空測定セルのためのダイヤフラム
DE59911611D1 (de) 1999-12-10 2005-03-17 Endress & Hauser Gmbh & Co Kg Druckmessgerät
DE10031135A1 (de) * 2000-06-30 2002-01-17 Grieshaber Vega Kg Druckmeßvorrichtung
US6886410B1 (en) * 2003-12-30 2005-05-03 Honeywell International Inc. Modified dual diaphragm pressure sensor
US6901807B1 (en) * 2003-12-30 2005-06-07 Honeywell International Inc. Positive and negative pressure sensor
JP4678752B2 (ja) * 2004-05-27 2011-04-27 東京エレクトロン株式会社 圧力計の製造方法及びガス処理装置の製造方法
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7159467B2 (en) * 2004-10-18 2007-01-09 Silverbrook Research Pty Ltd Pressure sensor with conductive ceramic membrane
WO2007019714A1 (de) * 2005-08-12 2007-02-22 Inficon Gmbh Optischer interferometrische drucksensor
WO2007082395A1 (de) * 2006-01-18 2007-07-26 Inficon Gmbh Vakuummesszelle mit membran
DE102006018049B4 (de) * 2006-04-10 2008-10-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Keramische Drucksensoren und Verfahren zu ihrer Herstellung
WO2008058406A1 (de) * 2006-11-13 2008-05-22 Inficon Gmbh Vakuummembranmesszelle und verfahren zur herstellung einer derartigen messzelle
US7845546B2 (en) * 2007-04-07 2010-12-07 Inficon Gmbh Method for producing a vacuum measuring cell of the membrane type
US7946178B2 (en) * 2007-06-19 2011-05-24 Inficon Gmbh Vacuum measuring cell device having a heater
JP5546460B2 (ja) * 2007-12-20 2014-07-09 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 隔膜圧力測定セルの構造
DE102008064654A1 (de) * 2008-08-05 2010-04-15 Endress + Hauser Gmbh + Co. Kg Verfahren zur Herstellung eines elastischen Körpers aus Al2O3- Keramik
US8485042B2 (en) * 2008-08-05 2013-07-16 Endress + Hauser Gmbh + Co. Kg Method for manufacturing an elastic body of Al2O3 ceramic, measuring membrane for a pressure sensor and pressure sensor with such a membrane
US8552311B2 (en) * 2010-07-15 2013-10-08 Advanced Bionics Electrical feedthrough assembly
DE102011004722A1 (de) * 2011-02-25 2012-08-30 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle
DE102011004729A1 (de) * 2011-02-25 2012-08-30 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle und Drucksensor mit keramischer Druckmesszelle
GB2543984B (en) 2011-08-18 2017-07-19 Oxsensis Ltd Pressure sensor element with cap
DE102011081887A1 (de) * 2011-08-31 2013-02-28 Robert Bosch Gmbh Polymerschichtsystem-Drucksensorvorrichtung und Polymerschichtsystem-Drucksensorverfahren
US8640546B2 (en) * 2011-09-12 2014-02-04 Del Monte Corporation Sensor for high pressure processing of articles
JP7444628B2 (ja) 2020-02-19 2024-03-06 アズビル株式会社 圧力センサ

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JPS54141587A (en) 1978-04-26 1979-11-02 Toshiba Corp Production of semiconductor absolute pressure transducer
US4380041A (en) 1978-09-25 1983-04-12 Motorola Inc. Capacitor pressure transducer with housing
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US4329732A (en) 1980-03-17 1982-05-11 Kavlico Corporation Precision capacitance transducer
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US5315877A (en) 1993-02-19 1994-05-31 Kavlico Corporation Low cost versatile pressure transducer
US5275054A (en) 1993-04-07 1994-01-04 Kavlico Corporation Rubber free fluid pressure transducer
JP3280799B2 (ja) * 1993-10-14 2002-05-13 日本碍子株式会社 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電／電歪膜型素子
FR2714205A1 (fr) * 1993-12-17 1995-06-23 Atg Sa Matériau composite pour l'enregistrement magnéto-optique, sa préparation et son utilisation.
US5436795A (en) * 1994-03-28 1995-07-25 Texas Instruments Incorporated Pressure transducer apparatus and method for making same
SE506558C2 (sv) 1994-04-14 1998-01-12 Cecap Ab Givarelement för tryckgivare
US5634999A (en) 1994-09-06 1997-06-03 Ngk Insulators, Ltd. Method of producing ceramic diaphragm structure having convex diaphragm portion
JP3471447B2 (ja) 1994-11-16 2003-12-02 日本碍子株式会社 セラミックダイヤフラム構造体およびその製造方法
US5553502A (en) 1994-12-22 1996-09-10 Kavlico Corporation Capacitive pressure sensor with extruded indium vacuum seal
DE19509250C1 (de) 1995-03-15 1996-09-12 Bosch Gmbh Robert Verfahren zur Herstellung eines Drucksensors
JP3429126B2 (ja) * 1996-01-09 2003-07-22 日本碍子株式会社 微細貫通孔を有するセラミック部材の製造方法
US5874162A (en) * 1996-10-10 1999-02-23 International Business Machines Corporation Weighted sintering process and conformable load tile
US5932043A (en) * 1997-03-18 1999-08-03 International Business Machines Corporation Method for flat firing aluminum nitride/tungsten electronic modules
CN1182378C (zh) * 1997-12-23 2004-12-29 尤纳克西斯巴尔策斯有限公司 电容式真空度测量元件及其制造方法
JP4334139B2 (ja) * 1997-12-23 2009-09-30 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング 容量式の真空測定セルのためのダイヤフラム

Also Published As

Publication number Publication date
US6528008B1 (en) 2003-03-04
US20030118802A1 (en) 2003-06-26
EP1040333A1 (de) 2000-10-04
WO1999034185A1 (de) 1999-07-08
DE59804701D1 (de) 2002-08-08
JP2002500352A (ja) 2002-01-08
EP1040333B1 (de) 2002-07-03
JP4334139B2 (ja) 2009-09-30
US7107855B2 (en) 2006-09-19

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Legal Events

Date Code Title Description
PF Patent in force
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20141204