AU2002221597A1 - Pressure measuring cell - Google Patents

Pressure measuring cell

Info

Publication number
AU2002221597A1
AU2002221597A1 AU2002221597A AU2159702A AU2002221597A1 AU 2002221597 A1 AU2002221597 A1 AU 2002221597A1 AU 2002221597 A AU2002221597 A AU 2002221597A AU 2159702 A AU2159702 A AU 2159702A AU 2002221597 A1 AU2002221597 A1 AU 2002221597A1
Authority
AU
Australia
Prior art keywords
pressure measuring
measuring cell
cell
pressure
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002221597A
Inventor
Angelika Andres
Karlheinz Banholzer
Karl Flogel
Frank Hegner
Bernd Rosskopf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of AU2002221597A1 publication Critical patent/AU2002221597A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
AU2002221597A 2000-10-19 2001-09-15 Pressure measuring cell Abandoned AU2002221597A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10052053A DE10052053A1 (en) 2000-10-19 2000-10-19 Pressure measurement cell has contact pin fed through base body to electrode for capacitance measurement; contact pin, jointing solder and membrane bed form smooth surface
DE10052053 2000-10-19
PCT/EP2001/010684 WO2002033372A1 (en) 2000-10-19 2001-09-15 Pressure measuring cell

Publications (1)

Publication Number Publication Date
AU2002221597A1 true AU2002221597A1 (en) 2002-04-29

Family

ID=7660459

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002221597A Abandoned AU2002221597A1 (en) 2000-10-19 2001-09-15 Pressure measuring cell

Country Status (8)

Country Link
US (1) US7360428B2 (en)
EP (1) EP1336086B1 (en)
JP (1) JP3756150B2 (en)
CN (1) CN1223836C (en)
AU (1) AU2002221597A1 (en)
DE (1) DE10052053A1 (en)
EA (1) EA004582B1 (en)
WO (1) WO2002033372A1 (en)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10320478B3 (en) * 2003-05-08 2004-08-19 Vega Grieshaber Kg Membrane electrode contacting method for pressure measuring device using ion penetration by heating contact material for conduction of through contact in electrically-insulating coupling element
DE10334284B4 (en) * 2003-07-25 2013-04-18 Endress + Hauser Gmbh + Co. Kg Differential pressure sensor with overload diaphragm
WO2005027998A2 (en) 2003-09-16 2005-03-31 Cardiomems, Inc. Implantable wireless sensor
US8026729B2 (en) 2003-09-16 2011-09-27 Cardiomems, Inc. System and apparatus for in-vivo assessment of relative position of an implant
DE102004024920B4 (en) * 2004-05-19 2009-06-10 Trafag Ag pressure sensor
US7240560B2 (en) 2004-10-18 2007-07-10 Silverbrook Research Pty Ltd Pressure sensor with remote power source
US6968744B1 (en) 2004-10-18 2005-11-29 Silverbrook Research Pty Ltd Capacitative pressure sensor with close electrodes
US7089790B2 (en) 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with laminated membrane
US7143652B2 (en) 2004-10-18 2006-12-05 Silverbrook Research Pty Ltd Pressure sensor for high acceleration environment
US7194901B2 (en) 2004-10-18 2007-03-27 Silverbrook Research Pty Ltd Pressure sensor with apertured membrane guard
WO2006042357A1 (en) * 2004-10-18 2006-04-27 Silverbrook Research Pty Ltd Micro-electromechanical pressure sensor
US7093494B2 (en) 2004-10-18 2006-08-22 Silverbrook Research Pty Ltd Micro-electromechanical pressure sensor
US7647836B2 (en) 2005-02-10 2010-01-19 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs
US7662653B2 (en) 2005-02-10 2010-02-16 Cardiomems, Inc. Method of manufacturing a hermetic chamber with electrical feedthroughs
EP1893080A2 (en) 2005-06-21 2008-03-05 CardioMems, Inc. Method of manufacturing implantable wireless sensor for in vivo pressure measurement
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
CA2652060A1 (en) * 2006-05-17 2008-06-05 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs
DE102007030910A1 (en) * 2007-07-03 2009-01-08 Endress + Hauser Gmbh + Co. Kg pressure sensor
DE102008033337A1 (en) * 2008-07-16 2010-01-21 Endress + Hauser Gmbh + Co. Kg Diaphragm seal and pressure gauge with such a diaphragm seal
US8485042B2 (en) 2008-08-05 2013-07-16 Endress + Hauser Gmbh + Co. Kg Method for manufacturing an elastic body of Al2O3 ceramic, measuring membrane for a pressure sensor and pressure sensor with such a membrane
DE102008064654A1 (en) * 2008-08-05 2010-04-15 Endress + Hauser Gmbh + Co. Kg Process for producing an elastic body of Al 2 O 3 ceramic
DE102010003145A1 (en) * 2010-03-23 2011-09-29 Endress + Hauser Gmbh + Co. Kg pressure sensor
US9737657B2 (en) 2010-06-03 2017-08-22 Medtronic, Inc. Implantable medical pump with pressure sensor
US8397578B2 (en) 2010-06-03 2013-03-19 Medtronic, Inc. Capacitive pressure sensor assembly
DE102011006517A1 (en) 2011-03-31 2012-10-04 Endress + Hauser Gmbh + Co. Kg Flameproof encapsulated differential pressure sensor
US8479581B2 (en) 2011-05-03 2013-07-09 General Electric Company Device and method for measuring pressure on wind turbine components
DE102012111533A1 (en) * 2012-11-28 2014-05-28 Endress + Hauser Gmbh + Co. Kg Pressure measuring cell
DE102013105132A1 (en) * 2013-05-17 2014-11-20 Endress + Hauser Gmbh + Co. Kg Ceramic pressure measuring cell and method for its production
DE102013113843A1 (en) * 2013-12-11 2015-06-11 Endress + Hauser Gmbh + Co. Kg pressure sensor
JP5970018B2 (en) * 2014-03-31 2016-08-17 アズビル株式会社 Pressure sensor chip
CZ305390B6 (en) * 2014-05-12 2015-08-26 Bd Sensors S.R.O. Pressure capacitance ceramic sensor with shaped base
CN104236787B (en) * 2014-09-05 2017-03-15 龙微科技无锡有限公司 MEMS differential pressure pick-ups chip and preparation method
US9857259B2 (en) * 2014-09-30 2018-01-02 Rosemount Inc. Differential pressure sensor with high pressure capabilities
DE102016112352A1 (en) * 2016-07-06 2018-01-11 Endress+Hauser Gmbh+Co. Kg Differential pressure sensor for determining a pressure measuring signal
ES2959445T3 (en) 2019-08-09 2024-02-26 Siko Gmbh Sensor unit for a fluidic cylinder and fluidic cylinder
CN110715757A (en) * 2019-11-05 2020-01-21 中国计量大学 Capacitive pressure sensor based on carbonized cotton fabric film electrode
DE102020205490A1 (en) 2020-04-30 2021-11-04 Robert Bosch Gesellschaft mit beschränkter Haftung Method for producing a pressure sensor device and pressure sensor device
DE102020205492A1 (en) 2020-04-30 2021-11-04 Robert Bosch Gesellschaft mit beschränkter Haftung Method for producing a pressure sensor device and pressure sensor device
CN114279622A (en) * 2021-11-30 2022-04-05 浙江中控技术股份有限公司 Differential pressure sensor

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US419219A (en) * 1890-01-14 Plumber s trap
US3993939A (en) * 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
GB2048488B (en) * 1979-04-26 1983-04-27 Rosemount Eng Co Ltd Differential pressure sensing apparatus
DE3128032A1 (en) * 1981-07-16 1983-02-03 Robert Bosch Gmbh, 7000 Stuttgart ARRANGEMENT FOR DETECTING A PRESSURE
US4581676A (en) * 1984-09-17 1986-04-08 General Signal Corporation Electrical contact coating for silicon pressure transducers
DE3621795A1 (en) * 1986-06-28 1988-01-07 Eckardt Ag DIFFERENTIAL PRESSURE
DE3933512A1 (en) * 1989-10-06 1991-04-18 Endress Hauser Gmbh Co DIFFERENTIAL PRESSURE MEASURING DEVICE
US5050034A (en) 1990-01-22 1991-09-17 Endress U. Hauser Gmbh U. Co. Pressure sensor and method of manufacturing same
JPH03287037A (en) * 1990-04-02 1991-12-17 Hitachi Constr Mach Co Ltd Differential pressure sensor
US5090246A (en) * 1990-09-19 1992-02-25 Johnson Service Corp. Elastomer type low pressure sensor
US5323643A (en) * 1991-04-09 1994-06-28 Ngk Spark Plug Co., Ltd. Device for detecting change in internal pressure of cylinder
EP0516579B1 (en) * 1991-05-26 1994-06-22 Endress + Hauser Gmbh + Co. Interface connection through an insulating part
DE4136995C2 (en) * 1991-11-11 1996-08-08 Sensycon Ind Sensorsyst Capacitive pressure sensor
EP0544934B1 (en) * 1991-11-30 1996-10-02 Endress U. Hauser Gmbh U. Co. Method of stabilizing the surface properties of objects to be thermally treated in a vacuum
US6311561B1 (en) * 1997-12-22 2001-11-06 Rosemount Aerospace Inc. Media compatible pressure sensor
EP0982576B1 (en) * 1998-03-12 2010-05-19 Yamatake Corporation Sensor and method of producing the same
ATE203326T1 (en) * 1998-12-14 2001-08-15 Endress Hauser Gmbh Co CAPACITIVE PRESSURE OR DIFFERENTIAL PRESSURE MEASUREMENT CELLS AND METHOD FOR THE PRODUCTION THEREOF
US6267009B1 (en) * 1998-12-14 2001-07-31 Endress + Hauser Gmbh + Co. Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same
US6374680B1 (en) * 1999-03-24 2002-04-23 Endress + Hauser Gmbh + Co. Capacitive pressure sensor or capacitive differential pressure sensor
DE10152681A1 (en) * 2001-10-19 2003-04-30 Endress & Hauser Gmbh & Co Kg Diaphragm seal with separating membrane and process for its manufacture

Also Published As

Publication number Publication date
EP1336086A1 (en) 2003-08-20
DE10052053A1 (en) 2002-04-25
CN1223836C (en) 2005-10-19
EA004582B1 (en) 2004-06-24
EA200300471A1 (en) 2003-10-30
WO2002033372A1 (en) 2002-04-25
JP3756150B2 (en) 2006-03-15
US20060243053A1 (en) 2006-11-02
US7360428B2 (en) 2008-04-22
CN1469995A (en) 2004-01-21
JP2004517305A (en) 2004-06-10
EP1336086B1 (en) 2013-03-06

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