GB999380A - Improvements in ion generators for electron beam devices such as microscopes - Google Patents

Improvements in ion generators for electron beam devices such as microscopes

Info

Publication number
GB999380A
GB999380A GB2675563A GB2675563A GB999380A GB 999380 A GB999380 A GB 999380A GB 2675563 A GB2675563 A GB 2675563A GB 2675563 A GB2675563 A GB 2675563A GB 999380 A GB999380 A GB 999380A
Authority
GB
United Kingdom
Prior art keywords
electron
film
electron beam
source
microscopes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2675563A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics and Pharmaceutical Industries Corp
Original Assignee
Philips Electronics and Pharmaceutical Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics and Pharmaceutical Industries Corp filed Critical Philips Electronics and Pharmaceutical Industries Corp
Publication of GB999380A publication Critical patent/GB999380A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
GB2675563A 1962-07-05 1963-07-05 Improvements in ion generators for electron beam devices such as microscopes Expired GB999380A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20767962A 1962-07-05 1962-07-05

Publications (1)

Publication Number Publication Date
GB999380A true GB999380A (en) 1965-07-21

Family

ID=22771555

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2675563A Expired GB999380A (en) 1962-07-05 1963-07-05 Improvements in ion generators for electron beam devices such as microscopes

Country Status (4)

Country Link
BE (1) BE634471A (xx)
DE (1) DE1923075U (xx)
GB (1) GB999380A (xx)
NL (1) NL294724A (xx)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005063142B4 (de) * 2005-12-31 2008-03-06 Olympus Soft Imaging Solutions Gmbh Elektronenmikroskop, insbesondere Transmissions-Elektronenmikroskop

Also Published As

Publication number Publication date
NL294724A (xx)
DE1923075U (de) 1965-09-09
BE634471A (xx)

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