DE1923075U - Elektronenbuendelvorrichtung mit einem lonengenerator und ionengenerator fuer solche vorrichtungen. - Google Patents

Elektronenbuendelvorrichtung mit einem lonengenerator und ionengenerator fuer solche vorrichtungen.

Info

Publication number
DE1923075U
DE1923075U DE1963P0021835 DEP0021835U DE1923075U DE 1923075 U DE1923075 U DE 1923075U DE 1963P0021835 DE1963P0021835 DE 1963P0021835 DE P0021835 U DEP0021835 U DE P0021835U DE 1923075 U DE1923075 U DE 1923075U
Authority
DE
Germany
Prior art keywords
electron
mentioned
electrons
film
ion generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE1963P0021835
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics and Pharmaceutical Industries Corp
Original Assignee
Philips Electronics and Pharmaceutical Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics and Pharmaceutical Industries Corp filed Critical Philips Electronics and Pharmaceutical Industries Corp
Publication of DE1923075U publication Critical patent/DE1923075U/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Conversion Of X-Rays Into Visible Images (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
DE1963P0021835 1962-07-05 1963-07-02 Elektronenbuendelvorrichtung mit einem lonengenerator und ionengenerator fuer solche vorrichtungen. Expired DE1923075U (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20767962A 1962-07-05 1962-07-05

Publications (1)

Publication Number Publication Date
DE1923075U true DE1923075U (de) 1965-09-09

Family

ID=22771555

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1963P0021835 Expired DE1923075U (de) 1962-07-05 1963-07-02 Elektronenbuendelvorrichtung mit einem lonengenerator und ionengenerator fuer solche vorrichtungen.

Country Status (4)

Country Link
BE (1) BE634471A (xx)
DE (1) DE1923075U (xx)
GB (1) GB999380A (xx)
NL (1) NL294724A (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005063142A1 (de) * 2005-12-31 2007-07-12 Olympus Soft Imaging Solutions Gmbh Elektronenmikroskop, insbesondere Transmissions-Elektronenmikroskop

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005063142A1 (de) * 2005-12-31 2007-07-12 Olympus Soft Imaging Solutions Gmbh Elektronenmikroskop, insbesondere Transmissions-Elektronenmikroskop
DE102005063142B4 (de) * 2005-12-31 2008-03-06 Olympus Soft Imaging Solutions Gmbh Elektronenmikroskop, insbesondere Transmissions-Elektronenmikroskop

Also Published As

Publication number Publication date
NL294724A (xx)
BE634471A (xx)
GB999380A (en) 1965-07-21

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