GB985371A - Improvements in or relating to processes for the production of monocrystalline layers of semiconductor materials - Google Patents
Improvements in or relating to processes for the production of monocrystalline layers of semiconductor materialsInfo
- Publication number
- GB985371A GB985371A GB38913/63A GB3891363A GB985371A GB 985371 A GB985371 A GB 985371A GB 38913/63 A GB38913/63 A GB 38913/63A GB 3891363 A GB3891363 A GB 3891363A GB 985371 A GB985371 A GB 985371A
- Authority
- GB
- United Kingdom
- Prior art keywords
- semi
- conductor material
- partition
- heating
- heating chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 title abstract 13
- 239000004065 semiconductor Substances 0.000 title abstract 11
- 238000000034 method Methods 0.000 title abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 10
- 238000005192 partition Methods 0.000 abstract 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 4
- 229910002804 graphite Inorganic materials 0.000 abstract 4
- 239000010439 graphite Substances 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 4
- 239000002912 waste gas Substances 0.000 abstract 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- 239000007792 gaseous phase Substances 0.000 abstract 2
- 150000004820 halides Chemical class 0.000 abstract 2
- 229910003465 moissanite Inorganic materials 0.000 abstract 2
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/12—Substrate holders or susceptors
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES81907A DE1216851B (de) | 1962-10-05 | 1962-10-05 | Vorrichtung und Verfahren zum Betrieb der Vorrichtung zur Herstellung epitaktischer Aufwachsschichten auf gleichzeitig mehreren einkristallinen Scheiben aus Halbleitermaterial |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB985371A true GB985371A (en) | 1965-03-10 |
Family
ID=7509991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB38913/63A Expired GB985371A (en) | 1962-10-05 | 1963-10-03 | Improvements in or relating to processes for the production of monocrystalline layers of semiconductor materials |
Country Status (5)
| Country | Link |
|---|---|
| CH (1) | CH442249A (enrdf_load_stackoverflow) |
| DE (1) | DE1216851B (enrdf_load_stackoverflow) |
| FR (1) | FR1372155A (enrdf_load_stackoverflow) |
| GB (1) | GB985371A (enrdf_load_stackoverflow) |
| NL (1) | NL298449A (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE509317A (enrdf_load_stackoverflow) * | 1951-03-07 | 1900-01-01 |
-
0
- NL NL298449D patent/NL298449A/xx unknown
-
1962
- 1962-10-05 DE DES81907A patent/DE1216851B/de active Granted
-
1963
- 1963-08-13 CH CH998463A patent/CH442249A/de unknown
- 1963-10-03 GB GB38913/63A patent/GB985371A/en not_active Expired
- 1963-10-03 FR FR949461A patent/FR1372155A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR1372155A (fr) | 1964-09-11 |
| DE1216851C2 (enrdf_load_stackoverflow) | 1966-12-01 |
| NL298449A (enrdf_load_stackoverflow) | |
| CH442249A (de) | 1967-08-31 |
| DE1216851B (de) | 1966-05-18 |
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