GB984141A - Improvements in or relating to methods of alloying to semiconductor bodies - Google Patents

Improvements in or relating to methods of alloying to semiconductor bodies

Info

Publication number
GB984141A
GB984141A GB3664/62A GB366462A GB984141A GB 984141 A GB984141 A GB 984141A GB 3664/62 A GB3664/62 A GB 3664/62A GB 366462 A GB366462 A GB 366462A GB 984141 A GB984141 A GB 984141A
Authority
GB
United Kingdom
Prior art keywords
alloying
heated
relating
methods
semiconductor bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3664/62A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB984141A publication Critical patent/GB984141A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/04Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/24Alloying of impurity materials, e.g. doping materials, electrode materials, with a semiconductor body
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S228/00Metal fusion bonding
    • Y10S228/903Metal to nonmetal

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Die Bonding (AREA)

Abstract

<PICT:0984141/C6-C7/1> In a process for forming an alloy junction on a semi-conductor such as silicon or germanium, a metal or alloy in the solid state, e.g. aluminium or tin-aluminium, is applied to the surface of the semi-conductor and heated above 500 DEG C. in the presence of an alkali metal halide flux which is also heated and is separated from the alloying material. As shown in Fig. 1 an n-type silicon body is placed in a recess of a graphite body 2 and a eutectic mixture of NaF and NaCl is placed in recess 6. A pellet 8 is placed on the silicon body 5, a graphite cover plate 3 is placed in position and the assembly is heated to 750 DEG C. in hydrogen to form a p-n type junction. Lead or bismuth may also be used as the alloying material.
GB3664/62A 1961-02-03 1962-01-31 Improvements in or relating to methods of alloying to semiconductor bodies Expired GB984141A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL260812 1961-02-03

Publications (1)

Publication Number Publication Date
GB984141A true GB984141A (en) 1965-02-24

Family

ID=19752857

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3664/62A Expired GB984141A (en) 1961-02-03 1962-01-31 Improvements in or relating to methods of alloying to semiconductor bodies

Country Status (4)

Country Link
US (1) US3230609A (en)
DE (1) DE1154576B (en)
GB (1) GB984141A (en)
NL (1) NL260812A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4183126A (en) * 1976-09-09 1980-01-15 Kabushiki Kaisha Seikosha Process for preparing quartz oscillator
US4298154A (en) * 1980-01-14 1981-11-03 B. B. Greenberg Company Automatic soldering machine
US20040144999A1 (en) * 1995-06-07 2004-07-29 Li Chou H. Integrated circuit device
US7118942B1 (en) 2000-09-27 2006-10-10 Li Chou H Method of making atomic integrated circuit device
US20100276733A1 (en) * 2000-09-27 2010-11-04 Li Choa H Solid-state circuit device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2299166A (en) * 1940-07-30 1942-10-20 Aluminum Co Of America Brazing light metals
US2561565A (en) * 1946-06-22 1951-07-24 United Aircraft Corp Process of fluxing and joining metal parts
US2674790A (en) * 1950-04-15 1954-04-13 United Aircraft Corp Method of soldering aluminous metal parts by treating with chloride fluxes
NL92060C (en) * 1953-10-26
US2800711A (en) * 1954-08-18 1957-07-30 Wall Colmonoy Corp Brazing method
US2996800A (en) * 1956-11-28 1961-08-22 Texas Instruments Inc Method of making ohmic connections to silicon semiconductors
NL106425C (en) * 1958-01-14
US3015591A (en) * 1958-07-18 1962-01-02 Itt Semi-conductor rectifiers and method of manufacture
NL108505C (en) * 1958-09-05

Also Published As

Publication number Publication date
DE1154576B (en) 1963-09-19
US3230609A (en) 1966-01-25
NL260812A (en)

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