GB9625172D0 - Method of fabricating an aluminum plug using selective chemical vapour deposition - Google Patents
Method of fabricating an aluminum plug using selective chemical vapour depositionInfo
- Publication number
- GB9625172D0 GB9625172D0 GBGB9625172.3A GB9625172A GB9625172D0 GB 9625172 D0 GB9625172 D0 GB 9625172D0 GB 9625172 A GB9625172 A GB 9625172A GB 9625172 D0 GB9625172 D0 GB 9625172D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- fabricating
- vapour deposition
- chemical vapour
- selective chemical
- aluminum plug
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
- C23C16/20—Deposition of aluminium only
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9625172A GB2320129B (en) | 1996-06-24 | 1996-12-04 | Method of fabricating an aluminium plug for contact with a semiconductor device |
NL1004841A NL1004841C2 (en) | 1996-06-24 | 1996-12-19 | Process for the production of an aluminum plug using selective chemical vapor deposition. |
FR9700283A FR2750249B1 (en) | 1996-06-24 | 1997-01-14 | PROCESS FOR MANUFACTURING AN ALUMINUM PLUG BY SELECTIVE STEAM CHEMICAL DEPOSITION |
DE19702388A DE19702388C2 (en) | 1996-06-24 | 1997-01-23 | Method of manufacturing an aluminum lead contact using selective chemical vapor deposition |
JP9039376A JPH1012737A (en) | 1996-06-24 | 1997-02-24 | Aluminium plug formed by utizing selective chemical vapor-phase growth and its formation |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW85107555A TW302511B (en) | 1996-06-24 | 1996-06-24 | Method of forming aluminum plug by selective chemical vapor deposition |
GB9625172A GB2320129B (en) | 1996-06-24 | 1996-12-04 | Method of fabricating an aluminium plug for contact with a semiconductor device |
NL1004841A NL1004841C2 (en) | 1996-06-24 | 1996-12-19 | Process for the production of an aluminum plug using selective chemical vapor deposition. |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9625172D0 true GB9625172D0 (en) | 1997-01-22 |
GB2320129A GB2320129A (en) | 1998-06-10 |
GB2320129B GB2320129B (en) | 2001-09-26 |
Family
ID=27268618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9625172A Expired - Fee Related GB2320129B (en) | 1996-06-24 | 1996-12-04 | Method of fabricating an aluminium plug for contact with a semiconductor device |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPH1012737A (en) |
DE (1) | DE19702388C2 (en) |
FR (1) | FR2750249B1 (en) |
GB (1) | GB2320129B (en) |
NL (1) | NL1004841C2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100354436B1 (en) * | 1998-09-29 | 2002-09-28 | 삼성전자 주식회사 | METHOD OF MANUFACTURING Al-CVD METAL INTERCONNECTION |
DE60325555D1 (en) | 2002-02-12 | 2009-02-12 | Oc Oerlikon Balzers Ag | OPTICAL COMPONENT WITH SUBMICROMETTE CAVITIES |
KR100687876B1 (en) * | 2005-06-29 | 2007-02-27 | 주식회사 하이닉스반도체 | Forming process for metal contact of semiconductor device |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
PT95233B (en) * | 1989-09-09 | 1998-06-30 | Canon Kk | PRODUCTION PROCESS OF A DEPOSITED METAL FILM CONTAINING ALUMINUM |
US5191099A (en) * | 1991-09-05 | 1993-03-02 | Regents Of The University Of Minnesota | Chemical vapor deposition of aluminum films using dimethylethylamine alane |
US5652180A (en) * | 1993-06-28 | 1997-07-29 | Kawasaki Steel Corporation | Method of manufacturing semiconductor device with contact structure |
-
1996
- 1996-12-04 GB GB9625172A patent/GB2320129B/en not_active Expired - Fee Related
- 1996-12-19 NL NL1004841A patent/NL1004841C2/en not_active IP Right Cessation
-
1997
- 1997-01-14 FR FR9700283A patent/FR2750249B1/en not_active Expired - Fee Related
- 1997-01-23 DE DE19702388A patent/DE19702388C2/en not_active Expired - Fee Related
- 1997-02-24 JP JP9039376A patent/JPH1012737A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JPH1012737A (en) | 1998-01-16 |
NL1004841A1 (en) | 1998-06-22 |
DE19702388A1 (en) | 1998-01-08 |
FR2750249B1 (en) | 1999-10-01 |
FR2750249A1 (en) | 1997-12-26 |
DE19702388C2 (en) | 2001-12-13 |
NL1004841C2 (en) | 1999-01-26 |
GB2320129A (en) | 1998-06-10 |
GB2320129B (en) | 2001-09-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20081204 |