SG81907A1 - Method of fabricating an aluminum plug using selective chemical vapor deposition - Google Patents

Method of fabricating an aluminum plug using selective chemical vapor deposition

Info

Publication number
SG81907A1
SG81907A1 SG9611585A SG1996011585A SG81907A1 SG 81907 A1 SG81907 A1 SG 81907A1 SG 9611585 A SG9611585 A SG 9611585A SG 1996011585 A SG1996011585 A SG 1996011585A SG 81907 A1 SG81907 A1 SG 81907A1
Authority
SG
Singapore
Prior art keywords
fabricating
vapor deposition
chemical vapor
selective chemical
aluminum plug
Prior art date
Application number
SG9611585A
Inventor
Sun Shi-Chung
Chiu Hien-Tien
Tsai Ming-Hsing
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to SG9611585A priority Critical patent/SG81907A1/en
Publication of SG81907A1 publication Critical patent/SG81907A1/en

Links

SG9611585A 1996-12-09 1996-12-09 Method of fabricating an aluminum plug using selective chemical vapor deposition SG81907A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG9611585A SG81907A1 (en) 1996-12-09 1996-12-09 Method of fabricating an aluminum plug using selective chemical vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG9611585A SG81907A1 (en) 1996-12-09 1996-12-09 Method of fabricating an aluminum plug using selective chemical vapor deposition

Publications (1)

Publication Number Publication Date
SG81907A1 true SG81907A1 (en) 2001-07-24

Family

ID=20429531

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9611585A SG81907A1 (en) 1996-12-09 1996-12-09 Method of fabricating an aluminum plug using selective chemical vapor deposition

Country Status (1)

Country Link
SG (1) SG81907A1 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5191099A (en) * 1991-09-05 1993-03-02 Regents Of The University Of Minnesota Chemical vapor deposition of aluminum films using dimethylethylamine alane

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5191099A (en) * 1991-09-05 1993-03-02 Regents Of The University Of Minnesota Chemical vapor deposition of aluminum films using dimethylethylamine alane

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