GB960549A - Deposition of thin film networks without the use of masks - Google Patents

Deposition of thin film networks without the use of masks

Info

Publication number
GB960549A
GB960549A GB40006/62A GB4000662A GB960549A GB 960549 A GB960549 A GB 960549A GB 40006/62 A GB40006/62 A GB 40006/62A GB 4000662 A GB4000662 A GB 4000662A GB 960549 A GB960549 A GB 960549A
Authority
GB
United Kingdom
Prior art keywords
substrate
deposition
silver
tin
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB40006/62A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB960549A publication Critical patent/GB960549A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/048Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00Superconducting devices
    • H10N60/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
GB40006/62A 1961-10-27 1962-10-23 Deposition of thin film networks without the use of masks Expired GB960549A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14814861A 1961-10-27 1961-10-27

Publications (1)

Publication Number Publication Date
GB960549A true GB960549A (en) 1964-06-10

Family

ID=22524505

Family Applications (1)

Application Number Title Priority Date Filing Date
GB40006/62A Expired GB960549A (en) 1961-10-27 1962-10-23 Deposition of thin film networks without the use of masks

Country Status (5)

Country Link
CH (1) CH423405A (da)
DK (1) DK112888B (da)
ES (2) ES281797A1 (da)
GB (1) GB960549A (da)
NL (1) NL284499A (da)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2196993A (en) * 1986-10-29 1988-05-11 Electricity Council Method and apparatus for thermochemical treatment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8728399D0 (en) * 1987-12-04 1988-01-13 Secretary Trade Ind Brit Deposition of materials to substrates

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2196993A (en) * 1986-10-29 1988-05-11 Electricity Council Method and apparatus for thermochemical treatment
US4900371A (en) * 1986-10-29 1990-02-13 The Electricity Council Method and apparatus for thermochemical treatment
GB2196993B (en) * 1986-10-29 1991-04-03 Electricity Council Method and apparatus for thermochemical treatment

Also Published As

Publication number Publication date
NL284499A (da)
ES285146A1 (es) 1963-07-01
CH423405A (de) 1966-10-31
DK112888B (da) 1969-01-27
ES281797A1 (es) 1963-04-16

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