GB890075A - Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereof - Google Patents

Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereof

Info

Publication number
GB890075A
GB890075A GB2652957A GB2652957A GB890075A GB 890075 A GB890075 A GB 890075A GB 2652957 A GB2652957 A GB 2652957A GB 2652957 A GB2652957 A GB 2652957A GB 890075 A GB890075 A GB 890075A
Authority
GB
United Kingdom
Prior art keywords
boiler
refrigerant
silane
purified
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2652957A
Other languages
English (en)
Inventor
Thomas Fowler Chadwick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plessey Co Ltd
Original Assignee
Plessey Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to BE570575D priority Critical patent/BE570575A/xx
Priority to NL230691D priority patent/NL230691A/xx
Priority to NL108317D priority patent/NL108317C/xx
Application filed by Plessey Co Ltd filed Critical Plessey Co Ltd
Priority to GB2652957A priority patent/GB890075A/en
Priority to FR1201787D priority patent/FR1201787A/fr
Publication of GB890075A publication Critical patent/GB890075A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/046—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
GB2652957A 1957-08-22 1957-08-22 Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereof Expired GB890075A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
BE570575D BE570575A (ja) 1957-08-22
NL230691D NL230691A (ja) 1957-08-22
NL108317D NL108317C (ja) 1957-08-22
GB2652957A GB890075A (en) 1957-08-22 1957-08-22 Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereof
FR1201787D FR1201787A (fr) 1957-08-22 1958-08-21 Procédé de fabrication de matériaux très purs utilisables dans les dispositifs semiconducteurs

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2652957A GB890075A (en) 1957-08-22 1957-08-22 Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereof

Publications (1)

Publication Number Publication Date
GB890075A true GB890075A (en) 1962-02-28

Family

ID=10245065

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2652957A Expired GB890075A (en) 1957-08-22 1957-08-22 Improvements in and relating to the production of a semiconductor element, or of a gaseous compound thereof

Country Status (4)

Country Link
BE (1) BE570575A (ja)
FR (1) FR1201787A (ja)
GB (1) GB890075A (ja)
NL (2) NL108317C (ja)

Also Published As

Publication number Publication date
FR1201787A (fr) 1960-01-06
NL230691A (ja)
BE570575A (ja)
NL108317C (ja)

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