GB846720A - Transistor crystals - Google Patents

Transistor crystals

Info

Publication number
GB846720A
GB846720A GB3975/57A GB397557A GB846720A GB 846720 A GB846720 A GB 846720A GB 3975/57 A GB3975/57 A GB 3975/57A GB 397557 A GB397557 A GB 397557A GB 846720 A GB846720 A GB 846720A
Authority
GB
United Kingdom
Prior art keywords
melt
alloy
germanium
crystal
seed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3975/57A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of GB846720A publication Critical patent/GB846720A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C30B15/04Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt adding doping materials, e.g. for n-p-junction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

A method of growing a PNP germanium or NPN silicon body for transistors (see Group XXXVI) comprises the steps of preparing a melt of the semiconductor containing an excess of donor (or acceptor) impurity, growing part of the melt on to a seed crystal by the pulling technique, adding donor and acceptor impurities simultaneously to the remaining melt, and continuing growth on to the seed. The relative amounts, segregation coefficients, and diffusion constants of the added impurities are so chosen that the material crystallized from the melt is of the same conductivity type throughout but so that during the second stage of growth the acceptor (donor) impurity diffuses into the material grown in the first stage to produce a region of opposite conductivity type at the interface. In one example a seed crystal is drawn at 940 DEG C. from a melt of germanium doped with gallium. When half the melt has grown into a P type crystal withdrawal is stopped and a germanium-arsenic-gallium alloy added to the melt. The temperature is raised to 980 DEG C. for 10 seconds to dissolve the alloy, and the crystal allowed to melt back partially to remove material into which uncontrolled diffusion may have taken place. The remainder of the melt is then pulled at 940 DEG C. In another example a seed is drawn at 1420 DEG C. from antimony doped silicon. When half the melt has been pulled arsenicaluminium alloy is added and after a period in which the temperature is raised to 1440 DEG C. to dissolve the alloy and partially melt back the crystal, pulling is resumed at 1390 DEG C. Reference has been directed by the Comptroller to Specification 779,660.ALSO:An alloy used in the preparation of junction transistors (see Group XXXVI) is made by fusing together 50 grams of germanium, 400 milligrams of arsenic and 600 milligrams of gallium, pulverizing the resulting product and then re-fusing it to form a pellet. A silicon-antimony alloy containing 2% by weight of antimony is also used. Reference has been directed by the Comptroller to Specification 779,660.
GB3975/57A 1956-03-02 1957-02-05 Transistor crystals Expired GB846720A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US358866XA 1956-03-02 1956-03-02

Publications (1)

Publication Number Publication Date
GB846720A true GB846720A (en) 1960-08-31

Family

ID=21885372

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3975/57A Expired GB846720A (en) 1956-03-02 1957-02-05 Transistor crystals

Country Status (4)

Country Link
BE (1) BE555459A (en)
CH (1) CH358866A (en)
FR (1) FR1172813A (en)
GB (1) GB846720A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3154450A (en) * 1960-01-27 1964-10-27 Bendix Corp Method of making mesas for diodes by etching
US3210225A (en) * 1961-08-18 1965-10-05 Texas Instruments Inc Method of making transistor
US3533862A (en) * 1967-08-21 1970-10-13 Texas Instruments Inc Method of forming semiconductor regions in an epitaxial layer
EP1063706A2 (en) * 1999-06-24 2000-12-27 Shin-Etsu Chemical Co., Ltd. Ga-doped multicrystalline silicon, Ga-doped multicrystalline silicon wafer and method for producing the same

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3084078A (en) * 1959-12-02 1963-04-02 Texas Instruments Inc High frequency germanium transistor
US3181097A (en) * 1960-09-19 1965-04-27 Sprague Electric Co Single crystal semiconductor resistors
US3183129A (en) * 1960-10-14 1965-05-11 Fairchild Camera Instr Co Method of forming a semiconductor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3154450A (en) * 1960-01-27 1964-10-27 Bendix Corp Method of making mesas for diodes by etching
US3210225A (en) * 1961-08-18 1965-10-05 Texas Instruments Inc Method of making transistor
US3533862A (en) * 1967-08-21 1970-10-13 Texas Instruments Inc Method of forming semiconductor regions in an epitaxial layer
EP1063706A2 (en) * 1999-06-24 2000-12-27 Shin-Etsu Chemical Co., Ltd. Ga-doped multicrystalline silicon, Ga-doped multicrystalline silicon wafer and method for producing the same
EP1063706A3 (en) * 1999-06-24 2005-07-13 Shin-Etsu Chemical Co., Ltd. Ga-doped multicrystalline silicon, Ga-doped multicrystalline silicon wafer and method for producing the same

Also Published As

Publication number Publication date
FR1172813A (en) 1959-02-16
BE555459A (en)
CH358866A (en) 1961-12-15

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