GB816682A - Improvements in adjusting devices for diaphragms situated in the ray path of corpuscular radiation apparatus especially electron microscopes - Google Patents

Improvements in adjusting devices for diaphragms situated in the ray path of corpuscular radiation apparatus especially electron microscopes

Info

Publication number
GB816682A
GB816682A GB207456A GB207456A GB816682A GB 816682 A GB816682 A GB 816682A GB 207456 A GB207456 A GB 207456A GB 207456 A GB207456 A GB 207456A GB 816682 A GB816682 A GB 816682A
Authority
GB
United Kingdom
Prior art keywords
diaphragm
diaphragms
fine adjustment
electron microscopes
situated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB207456A
Inventor
Eberhard Hahn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Filing date
Publication date
Priority to DEV8901A priority Critical patent/DE1033817B/en
Priority to CH334121D priority patent/CH334121A/en
Priority to NL201716A priority patent/NL110086C/xx
Priority to FR1192909D priority patent/FR1192909A/en
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of GB816682A publication Critical patent/GB816682A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

816,682. Electron microscopes. VEB C. ZEISS JENA. Jan. 20, 1956, No. 2074/56. Class 39(1). An electron microscope with an adjustable diaphragm having at least two apertures of different sizes is provided with a mechanism for effecting a fine adjustment of the diaphragm and a further arrangement which is operable, without affecting the fine adjustment, for resiliently withdrawing the diaphragm sufficiently to insert another aperture into the beam path and which, when released, returns the diaphragm to its original adjusted position so that two images may be readily superimposed on the viewing screen. The fine adjustment mechanism includes a rotatable knob 5 which is screw threaded on a spindle 1 connected to the diaphragm by means of a part 2, and the diaphragm can be withdrawn by pulling out the knob 5 to an extent limited by sets crews 8. The spindle 1 is held in the extended position by means of a stop lever 9 and is returned to its original position, when released, by means of the external atmospheric pressure acting on the rubber diaphragm 6. The microscope may be used as a diffraction instrument. Contrast and diffraction diaphragms may be withdrawn from the beam path while adjusting the object.
GB207456A 1955-05-14 1956-01-20 Improvements in adjusting devices for diaphragms situated in the ray path of corpuscular radiation apparatus especially electron microscopes Expired GB816682A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DEV8901A DE1033817B (en) 1955-05-14 1955-05-14 Adjustment device for diaphragms located in the beam path of corpuscular beam apparatus, in particular electron microscopes
CH334121D CH334121A (en) 1956-01-20 1955-10-31 Adjustment device for diaphragms located in the beam path of corpuscular beam apparatus, in particular electron microscopes
NL201716A NL110086C (en) 1956-01-20 1955-11-03
FR1192909D FR1192909A (en) 1956-01-20 1955-11-29 Device for adjusting diaphragms in the beam path of particle radiation devices, in particular electron microscopes

Publications (1)

Publication Number Publication Date
GB816682A true GB816682A (en) 1959-07-15

Family

ID=1627125

Family Applications (1)

Application Number Title Priority Date Filing Date
GB207456A Expired GB816682A (en) 1955-05-14 1956-01-20 Improvements in adjusting devices for diaphragms situated in the ray path of corpuscular radiation apparatus especially electron microscopes

Country Status (1)

Country Link
GB (1) GB816682A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115513020A (en) * 2022-11-24 2022-12-23 北京中科科仪股份有限公司 Centering adjustment tool, electron beam spot detection device and centering adjustment method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115513020A (en) * 2022-11-24 2022-12-23 北京中科科仪股份有限公司 Centering adjustment tool, electron beam spot detection device and centering adjustment method

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