GB773240A - Improvements in or relating to arrangements for compensating for axial astigmatism in electron lenses - Google Patents

Improvements in or relating to arrangements for compensating for axial astigmatism in electron lenses

Info

Publication number
GB773240A
GB773240A GB1965/55A GB196555A GB773240A GB 773240 A GB773240 A GB 773240A GB 1965/55 A GB1965/55 A GB 1965/55A GB 196555 A GB196555 A GB 196555A GB 773240 A GB773240 A GB 773240A
Authority
GB
United Kingdom
Prior art keywords
compensating
lens
jan
knob
pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1965/55A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens and Halske AG
Siemens Corp
Original Assignee
Siemens and Halske AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens and Halske AG, Siemens Corp filed Critical Siemens and Halske AG
Publication of GB773240A publication Critical patent/GB773240A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Lens Barrels (AREA)
GB1965/55A 1954-01-22 1955-01-21 Improvements in or relating to arrangements for compensating for axial astigmatism in electron lenses Expired GB773240A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE773240X 1954-01-22

Publications (1)

Publication Number Publication Date
GB773240A true GB773240A (en) 1957-04-24

Family

ID=6683750

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1965/55A Expired GB773240A (en) 1954-01-22 1955-01-21 Improvements in or relating to arrangements for compensating for axial astigmatism in electron lenses

Country Status (3)

Country Link
US (1) US2754443A (enrdf_load_stackoverflow)
GB (1) GB773240A (enrdf_load_stackoverflow)
NL (1) NL194113A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL100357C (enrdf_load_stackoverflow) * 1955-10-04
NL242894A (enrdf_load_stackoverflow) * 1958-09-06
US3253144A (en) * 1963-05-27 1966-05-24 Tektronix Inc Electron lens having means for correcting astigmatism
CN102479651B (zh) * 2010-11-30 2014-05-28 中国科学院大连化学物理研究所 一种用于深紫外激光器与光发射电子显微镜连接的连接杆
CN105047510B (zh) * 2015-06-30 2017-03-22 北京中科科仪股份有限公司 深紫外激光器与光发射电子显微镜的对接系统
EP3872837A1 (en) 2020-02-25 2021-09-01 The Provost, Fellows, Scholars and other Members of Board of Trinity College Dublin Pole piece for an electron microscope

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB494839A (en) * 1937-05-01 1938-11-01 British Thomson Houston Co Ltd Improvements in and relating to cathode ray apparatus
US2416687A (en) * 1944-03-30 1947-03-04 Bell Telephone Labor Inc Magnetic focussing device
US2587942A (en) * 1949-12-27 1952-03-04 Leitz Ernst Gmbh Electronic optical correction mechanism for magnetic lenses
US2679018A (en) * 1950-06-30 1954-05-18 Rca Corp Magnetic electron lens pole piece
US2714678A (en) * 1950-09-03 1955-08-02 Siemens Ag Electron microscopes
US2637000A (en) * 1951-02-15 1953-04-28 Magnetic electron -lens

Also Published As

Publication number Publication date
NL194113A (enrdf_load_stackoverflow)
US2754443A (en) 1956-07-10

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