GB773238A - Improvements relating to apparatus for indicating small movements - Google Patents

Improvements relating to apparatus for indicating small movements

Info

Publication number
GB773238A
GB773238A GB98755A GB98755A GB773238A GB 773238 A GB773238 A GB 773238A GB 98755 A GB98755 A GB 98755A GB 98755 A GB98755 A GB 98755A GB 773238 A GB773238 A GB 773238A
Authority
GB
United Kingdom
Prior art keywords
beam splitter
stylus
optical
mirrors
variations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB98755A
Inventor
James Dyson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to GB98755A priority Critical patent/GB773238A/en
Publication of GB773238A publication Critical patent/GB773238A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

773,238. Optical gauging devices. ASSOCIATED ELECTRICAL INDUSTRIES, Ltd. Jan. 4, 1956 [Jan. 12, 1955], No. 987/55. Class 106 (2). [Also in Group XX] Apparatus for indicating small movements of a stylus 11 employed in gauging surface roughness comprises an optical beam splitter 5 for dividing and refracting an incident plane beam of light from a source 1 and polarizer 2 into two divergent beams, an optical system, e.g. the mirrors 6, 4 for successively reflecting the component beams to converge on the incident side of the beam splitter 5 to recombine to provide an interference fringe pattern, e.g. at analyser 8 forming an image in the focal plane of a telescope 10, the beam splitter 5 being mounted for vertical movement with the stylus 11 so that variations in the roughness of a surface contacted by the stylus cause variations in the position of the interference fringe pattern. The beam splitter is movable along the optical axis of the system to measure variations in the surface of the object at different positions along that axis. In another embodiment greater travel is allowed for the prism by utilizing concave mirrors 4, 6 of shorter radius and placing between them two convex lenses placed just further from the mirrors than their centres of curvature so that each lens images the surface of the adjacent mirror into the centre of curvature of the other as seen through the other lens.
GB98755A 1955-01-12 1955-01-12 Improvements relating to apparatus for indicating small movements Expired GB773238A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB98755A GB773238A (en) 1955-01-12 1955-01-12 Improvements relating to apparatus for indicating small movements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB98755A GB773238A (en) 1955-01-12 1955-01-12 Improvements relating to apparatus for indicating small movements

Publications (1)

Publication Number Publication Date
GB773238A true GB773238A (en) 1957-04-24

Family

ID=9714025

Family Applications (1)

Application Number Title Priority Date Filing Date
GB98755A Expired GB773238A (en) 1955-01-12 1955-01-12 Improvements relating to apparatus for indicating small movements

Country Status (1)

Country Link
GB (1) GB773238A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3194109A (en) * 1961-09-11 1965-07-13 Kent E Erickson Interferometric device for determining deviations from planar motion
DE1255931B (en) * 1963-11-18 1967-12-07 Nat Res Dev Optical-interferometric dividing device
US3382761A (en) * 1963-11-18 1968-05-14 Nat Res Dev Ruling engines for the production of fine pitch scales
GB2220748A (en) * 1988-07-05 1990-01-17 Nat Res Dev Probe

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3194109A (en) * 1961-09-11 1965-07-13 Kent E Erickson Interferometric device for determining deviations from planar motion
DE1255931B (en) * 1963-11-18 1967-12-07 Nat Res Dev Optical-interferometric dividing device
US3382761A (en) * 1963-11-18 1968-05-14 Nat Res Dev Ruling engines for the production of fine pitch scales
GB2220748A (en) * 1988-07-05 1990-01-17 Nat Res Dev Probe
GB2220748B (en) * 1988-07-05 1992-07-29 Nat Res Dev Probes

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