GB766119A - Improved means for coating of surfaces by vapour deposition - Google Patents
Improved means for coating of surfaces by vapour depositionInfo
- Publication number
- GB766119A GB766119A GB222453A GB222453A GB766119A GB 766119 A GB766119 A GB 766119A GB 222453 A GB222453 A GB 222453A GB 222453 A GB222453 A GB 222453A GB 766119 A GB766119 A GB 766119A
- Authority
- GB
- United Kingdom
- Prior art keywords
- baffle
- vapour
- outlet passage
- passage
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008021 deposition Effects 0.000 title abstract 3
- 239000011248 coating agent Substances 0.000 title abstract 2
- 238000000576 coating method Methods 0.000 title abstract 2
- 239000000463 material Substances 0.000 abstract 3
- 238000001704 evaporation Methods 0.000 abstract 2
- 238000007738 vacuum evaporation Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NLAANVRAGE8102730,B NL184420B (nl) | 1953-01-26 | N-trifluoracetyladriamycinederivaten en werkwijze voor het bereiden van een farmaceutisch preparaat die ze bevatten. | |
| NL85130D NL85130C (cs) | 1953-01-26 | ||
| GB222453A GB766119A (en) | 1953-01-26 | 1953-01-26 | Improved means for coating of surfaces by vapour deposition |
| FR1091369D FR1091369A (fr) | 1953-01-26 | 1954-01-13 | Dispositif perfectionné pour le dépôt de matières par évapocation dans le vide |
| ES0213308A ES213308A1 (es) | 1953-01-26 | 1954-01-25 | UN APARATO PARA DEPOSITAR MATERIAL POR EVAPORACIoN EN VACIO |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB222453A GB766119A (en) | 1953-01-26 | 1953-01-26 | Improved means for coating of surfaces by vapour deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB766119A true GB766119A (en) | 1957-01-16 |
Family
ID=9735777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB222453A Expired GB766119A (en) | 1953-01-26 | 1953-01-26 | Improved means for coating of surfaces by vapour deposition |
Country Status (4)
| Country | Link |
|---|---|
| ES (1) | ES213308A1 (cs) |
| FR (1) | FR1091369A (cs) |
| GB (1) | GB766119A (cs) |
| NL (2) | NL184420B (cs) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3001892A (en) * | 1958-03-26 | 1961-09-26 | Gen Electric | Evaporation method and apparatus |
| US3244857A (en) * | 1963-12-23 | 1966-04-05 | Ibm | Vapor deposition source |
| US3245674A (en) * | 1960-04-25 | 1966-04-12 | Nat Res Corp | Crucible coated with reaction product of aluminum and boron nitride coating |
| US3277865A (en) * | 1963-04-01 | 1966-10-11 | United States Steel Corp | Metal-vapor source with heated reflecting shield |
| US3603285A (en) * | 1968-11-05 | 1971-09-07 | Massachusetts Inst Technology | Vapor deposition apparatus |
| US3690638A (en) * | 1970-05-15 | 1972-09-12 | Republic Steel Corp | Apparatus and method for vaporizing molten metal |
| US4094269A (en) | 1974-06-14 | 1978-06-13 | Zlafop Pri Ban | Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances |
| EP0510259A1 (en) * | 1991-04-03 | 1992-10-28 | Mitsubishi Jukogyo Kabushiki Kaisha | Apparatus for vacuum deposition of a sublimable substance |
| EP1130129A1 (en) | 2000-03-03 | 2001-09-05 | Eastman Kodak Company | Source for thermal physical vapor deposition of organic electroluminescent layers |
| CN107254663A (zh) * | 2017-07-13 | 2017-10-17 | 安徽省宁国市海伟电子有限公司 | 一种抗氧化型真空镀膜装置 |
| CN109321878A (zh) * | 2017-07-31 | 2019-02-12 | 三星显示有限公司 | 用于制造显示装置的设备 |
| GB2574401A (en) * | 2018-06-04 | 2019-12-11 | Dyson Technology Ltd | A device |
| GB2574400A (en) * | 2018-06-04 | 2019-12-11 | Dyson Technology Ltd | A device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR920003591B1 (ko) * | 1988-04-11 | 1992-05-04 | 미쯔비시주우고오교오 가부시기가이샤 | 연속진공증착장치 |
| WO1996035822A1 (fr) * | 1995-05-10 | 1996-11-14 | Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie | Dispositif et installation pour revetir une bande d'acier |
-
0
- NL NL85130D patent/NL85130C/xx active
- NL NLAANVRAGE8102730,B patent/NL184420B/xx unknown
-
1953
- 1953-01-26 GB GB222453A patent/GB766119A/en not_active Expired
-
1954
- 1954-01-13 FR FR1091369D patent/FR1091369A/fr not_active Expired
- 1954-01-25 ES ES0213308A patent/ES213308A1/es not_active Expired
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3001892A (en) * | 1958-03-26 | 1961-09-26 | Gen Electric | Evaporation method and apparatus |
| US3245674A (en) * | 1960-04-25 | 1966-04-12 | Nat Res Corp | Crucible coated with reaction product of aluminum and boron nitride coating |
| US3277865A (en) * | 1963-04-01 | 1966-10-11 | United States Steel Corp | Metal-vapor source with heated reflecting shield |
| US3244857A (en) * | 1963-12-23 | 1966-04-05 | Ibm | Vapor deposition source |
| US3603285A (en) * | 1968-11-05 | 1971-09-07 | Massachusetts Inst Technology | Vapor deposition apparatus |
| US3690638A (en) * | 1970-05-15 | 1972-09-12 | Republic Steel Corp | Apparatus and method for vaporizing molten metal |
| US4094269A (en) | 1974-06-14 | 1978-06-13 | Zlafop Pri Ban | Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances |
| US5272298A (en) * | 1991-04-03 | 1993-12-21 | Mitsubishi Jukogyo Kabushiki Kaisha | Apparatus for vacuum deposition of sublimative substance |
| EP0510259A1 (en) * | 1991-04-03 | 1992-10-28 | Mitsubishi Jukogyo Kabushiki Kaisha | Apparatus for vacuum deposition of a sublimable substance |
| EP1130129A1 (en) | 2000-03-03 | 2001-09-05 | Eastman Kodak Company | Source for thermal physical vapor deposition of organic electroluminescent layers |
| JP2001291589A (ja) * | 2000-03-03 | 2001-10-19 | Eastman Kodak Co | 熱物理蒸着源 |
| CN107254663A (zh) * | 2017-07-13 | 2017-10-17 | 安徽省宁国市海伟电子有限公司 | 一种抗氧化型真空镀膜装置 |
| CN109321878A (zh) * | 2017-07-31 | 2019-02-12 | 三星显示有限公司 | 用于制造显示装置的设备 |
| CN109321878B (zh) * | 2017-07-31 | 2022-11-15 | 三星显示有限公司 | 用于制造显示装置的设备 |
| GB2574401A (en) * | 2018-06-04 | 2019-12-11 | Dyson Technology Ltd | A device |
| GB2574400A (en) * | 2018-06-04 | 2019-12-11 | Dyson Technology Ltd | A device |
| GB2574401B (en) * | 2018-06-04 | 2022-11-23 | Dyson Technology Ltd | A Device |
| GB2574400B (en) * | 2018-06-04 | 2022-11-23 | Dyson Technology Ltd | A Device |
| US11613804B2 (en) | 2018-06-04 | 2023-03-28 | Dyson Technology Limited | Vapour deposition evaporator device |
Also Published As
| Publication number | Publication date |
|---|---|
| NL184420B (nl) | |
| NL85130C (cs) | |
| FR1091369A (fr) | 1955-04-12 |
| ES213308A1 (es) | 1954-03-16 |
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