ES213308A1 - UN APARATO PARA DEPOSITAR MATERIAL POR EVAPORACIoN EN VACIO - Google Patents

UN APARATO PARA DEPOSITAR MATERIAL POR EVAPORACIoN EN VACIO

Info

Publication number
ES213308A1
ES213308A1 ES0213308A ES213308A ES213308A1 ES 213308 A1 ES213308 A1 ES 213308A1 ES 0213308 A ES0213308 A ES 0213308A ES 213308 A ES213308 A ES 213308A ES 213308 A1 ES213308 A1 ES 213308A1
Authority
ES
Spain
Prior art keywords
coating
vapour deposition
improved means
container
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES0213308A
Other languages
English (en)
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BRITISH DIELECTRIC RES Ltd
Original Assignee
BRITISH DIELECTRIC RES Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BRITISH DIELECTRIC RES Ltd filed Critical BRITISH DIELECTRIC RES Ltd
Publication of ES213308A1 publication Critical patent/ES213308A1/es
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
ES0213308A 1953-01-26 1954-01-25 UN APARATO PARA DEPOSITAR MATERIAL POR EVAPORACIoN EN VACIO Expired ES213308A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB222453A GB766119A (en) 1953-01-26 1953-01-26 Improved means for coating of surfaces by vapour deposition

Publications (1)

Publication Number Publication Date
ES213308A1 true ES213308A1 (es) 1954-03-16

Family

ID=9735777

Family Applications (1)

Application Number Title Priority Date Filing Date
ES0213308A Expired ES213308A1 (es) 1953-01-26 1954-01-25 UN APARATO PARA DEPOSITAR MATERIAL POR EVAPORACIoN EN VACIO

Country Status (4)

Country Link
ES (1) ES213308A1 (cs)
FR (1) FR1091369A (cs)
GB (1) GB766119A (cs)
NL (2) NL184420B (cs)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3001892A (en) * 1958-03-26 1961-09-26 Gen Electric Evaporation method and apparatus
US3245674A (en) * 1960-04-25 1966-04-12 Nat Res Corp Crucible coated with reaction product of aluminum and boron nitride coating
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3244857A (en) * 1963-12-23 1966-04-05 Ibm Vapor deposition source
US3603285A (en) * 1968-11-05 1971-09-07 Massachusetts Inst Technology Vapor deposition apparatus
US3690638A (en) * 1970-05-15 1972-09-12 Republic Steel Corp Apparatus and method for vaporizing molten metal
US4094269A (en) 1974-06-14 1978-06-13 Zlafop Pri Ban Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances
KR920003591B1 (ko) * 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 연속진공증착장치
JPH04308076A (ja) * 1991-04-03 1992-10-30 Mitsubishi Heavy Ind Ltd 昇華性物質真空蒸着装置
WO1996035822A1 (fr) * 1995-05-10 1996-11-14 Centre De Recherches Metallurgiques - Centrum Voor Research In De Metallurgie Dispositif et installation pour revetir une bande d'acier
US6237529B1 (en) * 2000-03-03 2001-05-29 Eastman Kodak Company Source for thermal physical vapor deposition of organic electroluminescent layers
CN107254663A (zh) * 2017-07-13 2017-10-17 安徽省宁国市海伟电子有限公司 一种抗氧化型真空镀膜装置
KR102367988B1 (ko) * 2017-07-31 2022-02-28 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
GB2574400B (en) 2018-06-04 2022-11-23 Dyson Technology Ltd A Device
GB2574401B (en) * 2018-06-04 2022-11-23 Dyson Technology Ltd A Device

Also Published As

Publication number Publication date
NL184420B (nl)
NL85130C (cs)
FR1091369A (fr) 1955-04-12
GB766119A (en) 1957-01-16

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