GB2578236A - Broadband achromatic flat optical components by dispersion-engineered dielectric metasurfaces - Google Patents

Broadband achromatic flat optical components by dispersion-engineered dielectric metasurfaces Download PDF

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Publication number
GB2578236A
GB2578236A GB1918652.7A GB201918652A GB2578236A GB 2578236 A GB2578236 A GB 2578236A GB 201918652 A GB201918652 A GB 201918652A GB 2578236 A GB2578236 A GB 2578236A
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GB
United Kingdom
Prior art keywords
meta
units
phase
optical
metasurface
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Granted
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GB1918652.7A
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GB2578236B (en
GB201918652D0 (en
Inventor
Yu Nanfang
Overvig Adam
Shrestha Sajan
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Columbia University in the City of New York
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Columbia University in the City of New York
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Publication of GB201918652D0 publication Critical patent/GB201918652D0/en
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0037—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration with diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
    • G02B27/4211—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant correcting chromatic aberrations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1842—Gratings for image generation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871—Transmissive phase gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101—Nanooptics

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lenses (AREA)
  • Aerials With Secondary Devices (AREA)

Abstract

Techniques for creating a replacement for optical elements with diffractive planar components based on metasurfaces are provided. In one example, a substantially flat optical component for lensing incoming electromagnetic radiation having at least one wavelength and a first phase into outgoing electromagnetic radiation having a second phase is provided.

Claims (20)

1. A substantially flat optical component for lensing incoming electromagnetic radiation having at least one wavelength and a first phase into outgoing electromagnetic radiation having a second phase, comprising: a substrate; and at least one metasurface, coupled to the substrate, comprising a plurality of optical meta-units to change at least the first phase to the second phase; wherein each optical meta-unit of the plurality of optical meta-units is positioned at a distance that is less than the wavelength from at least a different optical meta- unit.
2. The system of claim 1, wherein each of the plurality of meta-units comprises a meta-unit having a shape to diffractively scatter the electromagnetic radiation.
3. The system of claim 2, wherein the shape comprises an archetype shape having one or more varying geometrical parameters.
4. The system of claim 2, wherein each of the plurality of meta-units is configured to provide a range of optical phase offset and phase dispersion for a broadband achromatic metasurface lens.
5. The system of claim 2, wherein each of the plurality of meta-units is configured to provide a range of scattering amplitude for a broadband achromatic metasurface lens.
6. The system of claim 1, wherein each of the plurality of meta-units comprises a dielectric material.
7. The system of claim 6, wherein the dielectric material is selected from the group consisting of silicon, silicon nitride, gallium nitride, and titanium dioxide.
8. The system of claim 1, wherein the at least one metasurface comprises two or more metasurfaces.
9. The system of claim 8, wherein the two or more metasurfaces are adapted to correct for monochromatic aberrations.
10. The system of claim 1, wherein the at least one metasurface comprises a first and a second layer.
11. The system of claim 10, wherein the first layer comprises a first geometry and a first material, and the second layer comprises a second geometry and/or a second material.
12. The system of claim 1, wherein the at least one metasurface is characterized by a varying thickness.
13. A method of making a substantially flat optical component for lensing incoming electromagnetic radiation having at least one wavelength and a first phase into outgoing electromagnetic radiation having a second phase, comprising: positioning a substrate; and forming at least one metasurface on the substrate comprising a plurality of optical meta-units to change at least the first phase to the second phase; wherein each optical meta-unit of the plurality of optical meta-units is positioned at a distance that is less than the wavelength from at least a different optical meta- unit.
14. The method of claim 13, wherein the forming comprises forming a substrate layer and a patterned film layer thereon having a thickness between 100 and 100,000 nm.
15. The method of claim 14, wherein the patterning is selected from the group consisting of using electron-beam lithography, photolithography, deep ultra-violet lithography, and imprint lithography.
16. The method of claim 13, wherein the forming comprises stacking two or more patterned film layers.
17. The method of claim 13, wherein the meta-units is selected from the group consisting of silicon, silicon nitride, gallium nitride, or titanium dioxide.
18. The method of claim 13, wherein the forming further comprises partially embedding the meta-units in the substrate.
19. The method of claim 13, wherein the meta-units comprise meta-units having varying shapes along at least a height direction.
20. The method of claim 13, wherein the meta-units vary in height.
GB1918652.7A 2017-05-24 2018-05-24 Broadband achromatic flat optical components by dispersion-engineered dielectric metasurfaces Active GB2578236B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762510670P 2017-05-24 2017-05-24
PCT/US2018/034460 WO2018218063A1 (en) 2017-05-24 2018-05-24 Broadband achromatic flat optical components by dispersion-engineered dielectric metasurfaces

Publications (3)

Publication Number Publication Date
GB201918652D0 GB201918652D0 (en) 2020-01-29
GB2578236A true GB2578236A (en) 2020-04-22
GB2578236B GB2578236B (en) 2022-11-09

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Country Status (9)

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US (1) US11906698B2 (en)
EP (1) EP3631533A4 (en)
JP (1) JP2020522009A (en)
KR (1) KR20200008630A (en)
CN (2) CN111316138B (en)
CA (1) CA3064764A1 (en)
DE (1) DE112018002670T5 (en)
GB (1) GB2578236B (en)
WO (1) WO2018218063A1 (en)

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US11906698B2 (en) 2017-05-24 2024-02-20 The Trustees Of Columbia University In The City Of New York Broadband achromatic flat optical components by dispersion-engineered dielectric metasurfaces
US11927769B2 (en) 2022-03-31 2024-03-12 Metalenz, Inc. Polarization sorting metasurface microlens array device
US11978752B2 (en) 2019-07-26 2024-05-07 Metalenz, Inc. Aperture-metasurface and hybrid refractive-metasurface imaging systems

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CN111158070B (en) * 2020-02-25 2021-09-28 南京大学 Double-layer achromatic lens based on all-dielectric super-surface
CN111624688B (en) * 2020-05-07 2021-09-28 中山大学 Optical fiber micro endoscopic probe based on cascade super surface
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US11933939B2 (en) * 2020-06-24 2024-03-19 The Regents Of The University Of Michigan Metalens with artificial focus pattern
CN111856622B (en) * 2020-07-15 2022-03-04 华南师范大学 Method for realizing wide-band achromatic superlens based on cross-type structure
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CN115166876B (en) * 2021-04-02 2024-04-26 深圳迈塔兰斯科技有限公司 Near infrared superlens and light guide optical system for intracranial tumor thermotherapy
CN113851573B (en) * 2021-09-23 2023-09-01 深圳迈塔兰斯科技有限公司 Super surface for improving light-taking efficiency of LED
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