GB2378065B - High voltage switching apparatus - Google Patents

High voltage switching apparatus

Info

Publication number
GB2378065B
GB2378065B GB0114675A GB0114675A GB2378065B GB 2378065 B GB2378065 B GB 2378065B GB 0114675 A GB0114675 A GB 0114675A GB 0114675 A GB0114675 A GB 0114675A GB 2378065 B GB2378065 B GB 2378065B
Authority
GB
United Kingdom
Prior art keywords
high voltage
voltage switching
switching apparatus
voltage
switching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB0114675A
Other languages
English (en)
Other versions
GB2378065A (en
GB0114675D0 (en
Inventor
Stephen Mark Iskander
Robert Richardson
Paul Andrew Gooch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne UK Ltd
Original Assignee
Marconi Applied Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Applied Technologies Ltd filed Critical Marconi Applied Technologies Ltd
Priority to GB0114675A priority Critical patent/GB2378065B/en
Publication of GB0114675D0 publication Critical patent/GB0114675D0/en
Priority to JP2003506100A priority patent/JP4326940B2/ja
Priority to AU2002345159A priority patent/AU2002345159A1/en
Priority to US10/480,527 priority patent/US7256637B2/en
Priority to EP02743366.3A priority patent/EP1396082B1/en
Priority to PCT/GB2002/002732 priority patent/WO2002103904A2/en
Publication of GB2378065A publication Critical patent/GB2378065A/en
Application granted granted Critical
Publication of GB2378065B publication Critical patent/GB2378065B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K17/00Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/10Modifications for increasing the maximum permissible switched voltage
    • H03K17/102Modifications for increasing the maximum permissible switched voltage in field-effect transistor switches
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K3/00Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/53Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
    • H03K3/57Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a semiconductor device
GB0114675A 2001-06-15 2001-06-15 High voltage switching apparatus Expired - Lifetime GB2378065B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB0114675A GB2378065B (en) 2001-06-15 2001-06-15 High voltage switching apparatus
EP02743366.3A EP1396082B1 (en) 2001-06-15 2002-06-14 High voltage switching apparatus
AU2002345159A AU2002345159A1 (en) 2001-06-15 2002-06-14 High voltage switching apparatus
US10/480,527 US7256637B2 (en) 2001-06-15 2002-06-14 High voltage switching apparatus
JP2003506100A JP4326940B2 (ja) 2001-06-15 2002-06-14 高電圧スイッチング装置
PCT/GB2002/002732 WO2002103904A2 (en) 2001-06-15 2002-06-14 High voltage switching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0114675A GB2378065B (en) 2001-06-15 2001-06-15 High voltage switching apparatus

Publications (3)

Publication Number Publication Date
GB0114675D0 GB0114675D0 (en) 2001-08-08
GB2378065A GB2378065A (en) 2003-01-29
GB2378065B true GB2378065B (en) 2004-09-15

Family

ID=9916706

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0114675A Expired - Lifetime GB2378065B (en) 2001-06-15 2001-06-15 High voltage switching apparatus

Country Status (6)

Country Link
US (1) US7256637B2 (enExample)
EP (1) EP1396082B1 (enExample)
JP (1) JP4326940B2 (enExample)
AU (1) AU2002345159A1 (enExample)
GB (1) GB2378065B (enExample)
WO (1) WO2002103904A2 (enExample)

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GB0503439D0 (en) * 2005-02-18 2005-03-30 E2V Tech Uk Ltd High voltage switching apparatus
US20060250117A1 (en) * 2005-05-06 2006-11-09 Titon Energy Power Factor Correction Analysis System and Method
US9008275B2 (en) 2012-05-01 2015-04-14 Analogic Corporation Voltage switching in an imaging modality that utilizes radiation to image an object
US10020800B2 (en) 2013-11-14 2018-07-10 Eagle Harbor Technologies, Inc. High voltage nanosecond pulser with variable pulse width and pulse repetition frequency
US10892140B2 (en) 2018-07-27 2021-01-12 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
US11539352B2 (en) 2013-11-14 2022-12-27 Eagle Harbor Technologies, Inc. Transformer resonant converter
US10978955B2 (en) 2014-02-28 2021-04-13 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
CN116633324A (zh) 2013-11-14 2023-08-22 鹰港科技有限公司 高压纳秒脉冲发生器
US10483089B2 (en) 2014-02-28 2019-11-19 Eagle Harbor Technologies, Inc. High voltage resistive output stage circuit
US11430635B2 (en) 2018-07-27 2022-08-30 Eagle Harbor Technologies, Inc. Precise plasma control system
US11004660B2 (en) 2018-11-30 2021-05-11 Eagle Harbor Technologies, Inc. Variable output impedance RF generator
EP3580841A4 (en) 2017-02-07 2020-12-16 Eagle Harbor Technologies, Inc. TRANSFORMER-RESONANCE CONVERTER
JP6902167B2 (ja) 2017-08-25 2021-07-14 イーグル ハーバー テクノロジーズ, インク.Eagle Harbor Technologies, Inc. ナノ秒パルスを使用する任意波形の発生
US11302518B2 (en) 2018-07-27 2022-04-12 Eagle Harbor Technologies, Inc. Efficient energy recovery in a nanosecond pulser circuit
US11810761B2 (en) 2018-07-27 2023-11-07 Eagle Harbor Technologies, Inc. Nanosecond pulser ADC system
US11222767B2 (en) * 2018-07-27 2022-01-11 Eagle Harbor Technologies, Inc. Nanosecond pulser bias compensation
US11532457B2 (en) 2018-07-27 2022-12-20 Eagle Harbor Technologies, Inc. Precise plasma control system
KR102499709B1 (ko) 2018-08-10 2023-02-16 이글 하버 테크놀로지스, 인코포레이티드 RF 플라즈마 반응기용 플라즈마 시스(sheath) 제어
WO2021134000A1 (en) 2019-12-24 2021-07-01 Eagle Harbor Technologies, Inc. Nanosecond pulser rf isolation for plasma systems
US12456604B2 (en) 2019-12-24 2025-10-28 Eagle Harbor Technologies, Inc. Nanosecond pulser RF isolation for plasma systems
CN109713931B (zh) * 2018-12-06 2020-05-19 西安交通大学 基于真空密闭环境的纳秒上升时间强脉冲电流发生装置
US10796887B2 (en) 2019-01-08 2020-10-06 Eagle Harbor Technologies, Inc. Efficient nanosecond pulser with source and sink capability for plasma control applications
TWI778449B (zh) 2019-11-15 2022-09-21 美商鷹港科技股份有限公司 高電壓脈衝電路
US11967484B2 (en) 2020-07-09 2024-04-23 Eagle Harbor Technologies, Inc. Ion current droop compensation
US11824542B1 (en) 2022-06-29 2023-11-21 Eagle Harbor Technologies, Inc. Bipolar high voltage pulser
KR20250084155A (ko) 2022-09-29 2025-06-10 이글 하버 테크놀로지스, 인코포레이티드 고전압 플라즈마 제어

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5594287A (en) * 1993-06-17 1997-01-14 Hewlett-Packard Company High voltage solid state relay
US5723913A (en) * 1994-12-06 1998-03-03 Performance Controls, Inc. High-voltage electronic switching circuit
WO1998012817A1 (en) * 1996-09-23 1998-03-26 Eldec Corporation Solid-state high voltage switch and switching power supply
GB2356752A (en) * 1999-11-29 2001-05-30 Eev Ltd A low inductance power supply for a magnetron

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678362A (en) * 1970-09-17 1972-07-18 Us Army Solid state pulser using parallel storage capacitors
DE2967520D1 (en) * 1979-12-28 1985-10-31 Int Rectifier Corp Field effect transistor circuit configuration
US4720668A (en) * 1986-06-20 1988-01-19 Lee Fred C Zero-voltage switching quasi-resonant converters
KR0115015Y1 (ko) * 1991-09-19 1998-10-01 이헌조 스위칭소자 구동회로
US5568035A (en) * 1993-10-15 1996-10-22 Sony/Tektronix Corporation Variable-capacitance power supply apparatus
JPH0993908A (ja) * 1995-09-22 1997-04-04 Denshi Seigyo Group:Kk 半導体スイッチ駆動回路
US5930125A (en) * 1996-08-28 1999-07-27 Siemens Medical Systems, Inc. Compact solid state klystron power supply
US6327163B1 (en) * 1999-04-27 2001-12-04 Science Research Laboratory, Inc. Solid state pulsed power supply
JP2001238470A (ja) * 2000-02-21 2001-08-31 Ngk Insulators Ltd パルス電力発生用スイッチ回路
US6552598B2 (en) * 2001-07-20 2003-04-22 Vitaly Gelman Semiconductor high voltage electrical energy transmission switching system and method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5594287A (en) * 1993-06-17 1997-01-14 Hewlett-Packard Company High voltage solid state relay
US5723913A (en) * 1994-12-06 1998-03-03 Performance Controls, Inc. High-voltage electronic switching circuit
WO1998012817A1 (en) * 1996-09-23 1998-03-26 Eldec Corporation Solid-state high voltage switch and switching power supply
GB2356752A (en) * 1999-11-29 2001-05-30 Eev Ltd A low inductance power supply for a magnetron

Also Published As

Publication number Publication date
EP1396082A2 (en) 2004-03-10
EP1396082B1 (en) 2019-05-01
AU2002345159A1 (en) 2003-01-02
GB2378065A (en) 2003-01-29
JP2004534452A (ja) 2004-11-11
WO2002103904A3 (en) 2003-03-13
WO2002103904A2 (en) 2002-12-27
GB0114675D0 (en) 2001-08-08
US20040183506A1 (en) 2004-09-23
US7256637B2 (en) 2007-08-14
JP4326940B2 (ja) 2009-09-09

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Expiry date: 20210614