GB2322709B - Method and circuit to sense the Tj of MOS-gated power semiconductor devices - Google Patents

Method and circuit to sense the Tj of MOS-gated power semiconductor devices

Info

Publication number
GB2322709B
GB2322709B GB9801403A GB9801403A GB2322709B GB 2322709 B GB2322709 B GB 2322709B GB 9801403 A GB9801403 A GB 9801403A GB 9801403 A GB9801403 A GB 9801403A GB 2322709 B GB2322709 B GB 2322709B
Authority
GB
United Kingdom
Prior art keywords
mos
sense
circuit
semiconductor devices
power semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9801403A
Other versions
GB9801403D0 (en
GB2322709A (en
Inventor
Bruno C Nadd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies Americas Corp
Original Assignee
International Rectifier Corp USA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Rectifier Corp USA filed Critical International Rectifier Corp USA
Publication of GB9801403D0 publication Critical patent/GB9801403D0/en
Publication of GB2322709A publication Critical patent/GB2322709A/en
Application granted granted Critical
Publication of GB2322709B publication Critical patent/GB2322709B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/01—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using semiconducting elements having PN junctions
    • G01K7/015—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using semiconducting elements having PN junctions using microstructures, e.g. made of silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/20—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit
    • G01K7/21—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit for modifying the output characteristic, e.g. linearising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
    • H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
    • H01L29/7804—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a pn-junction diode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/08—Modifications for protecting switching circuit against overcurrent or overvoltage
    • H03K17/082—Modifications for protecting switching circuit against overcurrent or overvoltage by feedback from the output to the control circuit
    • H03K17/0822—Modifications for protecting switching circuit against overcurrent or overvoltage by feedback from the output to the control circuit in field-effect transistor switches
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K2217/00—Temperature measurement using electric or magnetic components already present in the system to be measured
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • H01L2224/0601—Structure
    • H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/4901—Structure
    • H01L2224/4903—Connectors having different sizes, e.g. different diameters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495—Lead-frames or other flat leads
    • H01L23/49541—Geometry of the lead-frame
    • H01L23/49562—Geometry of the lead-frame for devices being provided for in H01L29/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1305—Bipolar Junction Transistor [BJT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1305—Bipolar Junction Transistor [BJT]
    • H01L2924/13055—Insulated gate bipolar transistor [IGBT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1306—Field-effect transistor [FET]
    • H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ceramic Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
GB9801403A 1997-02-12 1998-01-22 Method and circuit to sense the Tj of MOS-gated power semiconductor devices Expired - Fee Related GB2322709B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79883597A 1997-02-12 1997-02-12

Publications (3)

Publication Number Publication Date
GB9801403D0 GB9801403D0 (en) 1998-03-18
GB2322709A GB2322709A (en) 1998-09-02
GB2322709B true GB2322709B (en) 2000-11-01

Family

ID=25174399

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9801403A Expired - Fee Related GB2322709B (en) 1997-02-12 1998-01-22 Method and circuit to sense the Tj of MOS-gated power semiconductor devices

Country Status (8)

Country Link
JP (1) JP2846309B2 (en)
KR (1) KR19980070752A (en)
DE (1) DE19805734A1 (en)
FR (1) FR2759456B1 (en)
GB (1) GB2322709B (en)
IT (1) IT1298182B1 (en)
SG (1) SG55452A1 (en)
TW (1) TW385548B (en)

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DE10023950A1 (en) * 2000-05-16 2001-11-22 Bosch Gmbh Robert Semiconductor component with power switch connectable to load
JP3721119B2 (en) * 2001-11-08 2005-11-30 株式会社東芝 Temperature sensor
DE10220587B4 (en) 2002-05-08 2007-07-19 Infineon Technologies Ag Temperature sensor for MOS circuitry
JP4681911B2 (en) * 2005-02-25 2011-05-11 三菱電機株式会社 Power semiconductor device
CN100374872C (en) * 2005-10-14 2008-03-12 北京工业大学 Semiconductor PN node diode device temperature rise measuring method and apparatus
JP2009240024A (en) * 2008-03-26 2009-10-15 Denso Corp Temperature detector
WO2009141347A1 (en) * 2008-05-19 2009-11-26 X-Fab Semiconductor Foundries Ag Operating temperature measurement for an mos power component, and mos component for carrying out the method
DE102008023217A1 (en) 2008-05-19 2009-11-26 Friedrich-Alexander-Universität Erlangen-Nürnberg An electrical method for location-related operating temperature adjustment of a MOS-controlled semiconductor power device and device for carrying out the method
DE102008023215A1 (en) * 2008-05-19 2009-12-03 Friedrich-Alexander-Universität Erlangen-Nürnberg Method for operating temperature control of a MOS-controlled semiconductor power device and device for carrying out the method
AU2010206053B2 (en) 2009-07-31 2014-08-07 ResMed Pty Ltd Wire Heated Tube with Temperature Control System, Tube Type Detection, and Active Over Temperature Protection for Humidifier for Respiratory Apparatus
DE102012006009B4 (en) 2012-03-24 2024-06-13 Volkswagen Aktiengesellschaft Method and device for determining a junction temperature of a semiconductor device
CN102928109A (en) * 2012-10-25 2013-02-13 重庆长安汽车股份有限公司 Signal collecting circuit
DE102012222481A1 (en) * 2012-12-06 2014-06-12 Robert Bosch Gmbh Method for determining junction temperature of power semiconductor in motor car, involves measuring power dissipation of power semiconductor, and determining recorded warming curve of impedance based on operation of power semiconductor
NZ710078A (en) 2013-02-01 2017-01-27 Resmed Ltd Wire heated tube with temperature control system for humidifier for respiratory apparatus
CN103323135B (en) * 2013-06-09 2014-12-03 广东明阳龙源电力电子有限公司 IGBT temperature detection circuit
DE102015104990B4 (en) * 2015-03-31 2020-06-04 Infineon Technologies Austria Ag Compound semiconductor device with a scanning lead
CN105929316A (en) * 2016-07-10 2016-09-07 北京工业大学 Multi-path IGBT junction temperature and thermal fatigue real-time monitoring system
CN106501699B (en) * 2016-10-20 2019-02-19 北京工业大学 The method for real-time measurement of bipolar transistor junction temperature under a kind of saturation state
EP3598505B1 (en) * 2018-07-19 2023-02-15 Mitsubishi Electric R&D Centre Europe B.V. Temperature estimation of a power semiconductor device
EP3690412B1 (en) * 2019-02-04 2022-06-15 EM Microelectronic-Marin SA Flicker noise reduction in a temperature sensor arrangement

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EP0224274A2 (en) * 1985-11-29 1987-06-03 Nippondenso Co., Ltd. Semiconductor device with protective means against overheating
GB2281815A (en) * 1993-09-14 1995-03-15 Int Rectifier Corp Power mosfet with overcurrent and over-temperature protection
GB2291742A (en) * 1993-09-14 1996-01-31 Int Rectifier Corp Power mosfet with overcurrent and over-temperature protection

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JPS5728228A (en) * 1980-07-28 1982-02-15 Seiko Epson Corp Semiconductor integrated circuit
DE3150013A1 (en) * 1981-12-17 1983-06-23 Datron-Electronic Pichl & Schulte KG, 6109 Mühltal Method and device for the automated adjustment (calibration) of measuring instruments and transducers of physical input variables
JPS59225324A (en) * 1983-06-06 1984-12-18 Terumo Corp Electronic thermometer
JPS60127433A (en) * 1983-12-13 1985-07-08 Toshiba Corp Calibrating method of temperature detecting apparatus
GB2191292B (en) * 1986-06-07 1990-02-21 Thomas James Allen Measuring equipment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0224274A2 (en) * 1985-11-29 1987-06-03 Nippondenso Co., Ltd. Semiconductor device with protective means against overheating
GB2281815A (en) * 1993-09-14 1995-03-15 Int Rectifier Corp Power mosfet with overcurrent and over-temperature protection
GB2291742A (en) * 1993-09-14 1996-01-31 Int Rectifier Corp Power mosfet with overcurrent and over-temperature protection

Also Published As

Publication number Publication date
GB9801403D0 (en) 1998-03-18
GB2322709A (en) 1998-09-02
JPH10246676A (en) 1998-09-14
FR2759456A1 (en) 1998-08-14
JP2846309B2 (en) 1999-01-13
IT1298182B1 (en) 1999-12-20
KR19980070752A (en) 1998-10-26
FR2759456B1 (en) 1999-07-02
TW385548B (en) 2000-03-21
DE19805734A1 (en) 1998-08-20
SG55452A1 (en) 1998-12-21
ITMI980111A1 (en) 1999-07-23

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PCNP Patent ceased through non-payment of renewal fee

Effective date: 20020122