GB2301937A - IC package with a ball grid array on a single layer ceramic substrate - Google Patents
IC package with a ball grid array on a single layer ceramic substrate Download PDFInfo
- Publication number
- GB2301937A GB2301937A GB9611726A GB9611726A GB2301937A GB 2301937 A GB2301937 A GB 2301937A GB 9611726 A GB9611726 A GB 9611726A GB 9611726 A GB9611726 A GB 9611726A GB 2301937 A GB2301937 A GB 2301937A
- Authority
- GB
- United Kingdom
- Prior art keywords
- integrated circuit
- digital integrated
- circuit package
- package
- vias
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 44
- 239000000919 ceramic Substances 0.000 title claims abstract description 18
- 239000002356 single layer Substances 0.000 title claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 18
- 239000010949 copper Substances 0.000 claims abstract description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052802 copper Inorganic materials 0.000 claims abstract description 16
- 239000004593 Epoxy Substances 0.000 claims abstract description 7
- 239000011241 protective layer Substances 0.000 claims abstract description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 16
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 11
- 229910052737 gold Inorganic materials 0.000 claims description 11
- 239000010931 gold Substances 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000001465 metallisation Methods 0.000 claims description 10
- 239000002318 adhesion promoter Substances 0.000 claims description 8
- 229910010293 ceramic material Inorganic materials 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 239000011651 chromium Substances 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052593 corundum Inorganic materials 0.000 claims description 3
- -1 current carrier Substances 0.000 claims description 3
- 229910000833 kovar Inorganic materials 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 239000011253 protective coating Substances 0.000 claims 10
- 229910001069 Ti alloy Inorganic materials 0.000 claims 4
- 239000000203 mixture Substances 0.000 claims 4
- 229910001182 Mo alloy Inorganic materials 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 2
- 229910001080 W alloy Inorganic materials 0.000 claims 1
- BRDCEPWSRLDLST-UHFFFAOYSA-N [W].[Cu].[Ag] Chemical compound [W].[Cu].[Ag] BRDCEPWSRLDLST-UHFFFAOYSA-N 0.000 claims 1
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 claims 1
- 230000007613 environmental effect Effects 0.000 claims 1
- 229910000679 solder Inorganic materials 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 10
- 238000010276 construction Methods 0.000 description 8
- 239000010409 thin film Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 239000006112 glass ceramic composition Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000000135 prohibitive effect Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
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- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
- H01L23/053—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
- H01L23/055—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body the leads having a passage through the base
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- H01L23/15—Ceramic or glass substrates
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- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
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Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Wire Bonding (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US47109595A | 1995-06-06 | 1995-06-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
GB9611726D0 GB9611726D0 (en) | 1996-08-07 |
GB2301937A true GB2301937A (en) | 1996-12-18 |
Family
ID=23870234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9611726A Withdrawn GB2301937A (en) | 1995-06-06 | 1996-06-05 | IC package with a ball grid array on a single layer ceramic substrate |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPH09213829A (enrdf_load_stackoverflow) |
KR (1) | KR970003879A (enrdf_load_stackoverflow) |
DE (1) | DE19622650A1 (enrdf_load_stackoverflow) |
GB (1) | GB2301937A (enrdf_load_stackoverflow) |
MX (1) | MXPA96002171A (enrdf_load_stackoverflow) |
TW (1) | TW299487B (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0915505A1 (en) * | 1997-11-06 | 1999-05-12 | Sharp Kabushiki Kaisha | Semiconductor device package, manufacturing method thereof and circuit board therefor |
GB2377080A (en) * | 2001-09-11 | 2002-12-31 | Sendo Int Ltd | Integrated circuit package and printed circuit board arrangement |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6140708A (en) * | 1996-05-17 | 2000-10-31 | National Semiconductor Corporation | Chip scale package and method for manufacture thereof |
US5783866A (en) * | 1996-05-17 | 1998-07-21 | National Semiconductor Corporation | Low cost ball grid array device and method of manufacture thereof |
US6284566B1 (en) | 1996-05-17 | 2001-09-04 | National Semiconductor Corporation | Chip scale package and method for manufacture thereof |
GB9818474D0 (en) * | 1998-08-26 | 1998-10-21 | Hughes John E | Multi-layer interconnect package for optical devices & standard semiconductor chips |
US6198166B1 (en) * | 1999-07-01 | 2001-03-06 | Intersil Corporation | Power semiconductor mounting package containing ball grid array |
DE10010461A1 (de) * | 2000-03-03 | 2001-09-13 | Infineon Technologies Ag | Vorrichtung zum Verpacken elektronischer Bauteile mittels Spritzgußtechnik |
JP6397806B2 (ja) | 2015-09-11 | 2018-09-26 | 東芝メモリ株式会社 | 半導体装置の製造方法および半導体装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5355283A (en) * | 1993-04-14 | 1994-10-11 | Amkor Electronics, Inc. | Ball grid array with via interconnection |
EP0664562A1 (en) * | 1994-01-12 | 1995-07-26 | AT&T Corp. | Ball grid array plastic package |
US5490324A (en) * | 1993-09-15 | 1996-02-13 | Lsi Logic Corporation | Method of making integrated circuit package having multiple bonding tiers |
-
1996
- 1996-06-05 JP JP8143210A patent/JPH09213829A/ja active Pending
- 1996-06-05 MX MXPA96002171A patent/MXPA96002171A/es unknown
- 1996-06-05 DE DE19622650A patent/DE19622650A1/de not_active Withdrawn
- 1996-06-05 GB GB9611726A patent/GB2301937A/en not_active Withdrawn
- 1996-06-07 KR KR1019960020252A patent/KR970003879A/ko not_active Withdrawn
- 1996-06-17 TW TW085107304A patent/TW299487B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5355283A (en) * | 1993-04-14 | 1994-10-11 | Amkor Electronics, Inc. | Ball grid array with via interconnection |
US5490324A (en) * | 1993-09-15 | 1996-02-13 | Lsi Logic Corporation | Method of making integrated circuit package having multiple bonding tiers |
EP0664562A1 (en) * | 1994-01-12 | 1995-07-26 | AT&T Corp. | Ball grid array plastic package |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0915505A1 (en) * | 1997-11-06 | 1999-05-12 | Sharp Kabushiki Kaisha | Semiconductor device package, manufacturing method thereof and circuit board therefor |
US6157080A (en) * | 1997-11-06 | 2000-12-05 | Sharp Kabushiki Kaisha | Semiconductor device using a chip scale package |
GB2377080A (en) * | 2001-09-11 | 2002-12-31 | Sendo Int Ltd | Integrated circuit package and printed circuit board arrangement |
GB2377080B (en) * | 2001-09-11 | 2003-05-07 | Sendo Int Ltd | Integrated circuit package and printed circuit board arrangement |
US6734555B2 (en) | 2001-09-11 | 2004-05-11 | Sendo International Limited | Integrated circuit package and printed circuit board arrangement |
US6900544B2 (en) * | 2001-09-11 | 2005-05-31 | Sendo International, Limited | Integrated circuit package and printed circuit board arrangement |
Also Published As
Publication number | Publication date |
---|---|
TW299487B (enrdf_load_stackoverflow) | 1997-03-01 |
DE19622650A1 (de) | 1996-12-12 |
JPH09213829A (ja) | 1997-08-15 |
KR970003879A (ko) | 1997-01-29 |
MXPA96002171A (es) | 2002-04-19 |
GB9611726D0 (en) | 1996-08-07 |
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WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |