GB2271022B - A method for manufacturing a thin-film EL device - Google Patents

A method for manufacturing a thin-film EL device

Info

Publication number
GB2271022B
GB2271022B GB9319432A GB9319432A GB2271022B GB 2271022 B GB2271022 B GB 2271022B GB 9319432 A GB9319432 A GB 9319432A GB 9319432 A GB9319432 A GB 9319432A GB 2271022 B GB2271022 B GB 2271022B
Authority
GB
United Kingdom
Prior art keywords
thin
film
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9319432A
Other versions
GB9319432D0 (en
GB2271022A (en
Inventor
Hisato Katou
Tomoyuki Kawashima
Kazuyoshi Shibata
Harutaka Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Publication of GB9319432D0 publication Critical patent/GB9319432D0/en
Publication of GB2271022A publication Critical patent/GB2271022A/en
Application granted granted Critical
Publication of GB2271022B publication Critical patent/GB2271022B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/57—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing manganese or rhenium
    • C09K11/572—Chalcogenides
    • C09K11/574—Chalcogenides with zinc or cadmium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C23C14/0629—Sulfides, selenides or tellurides of zinc, cadmium or mercury
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/18—Light sources with substantially two-dimensional radiating surfaces characterised by the nature or concentration of the activator

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
GB9319432A 1992-09-24 1993-09-21 A method for manufacturing a thin-film EL device Expired - Fee Related GB2271022B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25334592 1992-09-24
JP4312497A JPH06163157A (en) 1992-09-24 1992-11-24 Manufacture of thin film el element

Publications (3)

Publication Number Publication Date
GB9319432D0 GB9319432D0 (en) 1993-11-03
GB2271022A GB2271022A (en) 1994-03-30
GB2271022B true GB2271022B (en) 1995-09-13

Family

ID=26541152

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9319432A Expired - Fee Related GB2271022B (en) 1992-09-24 1993-09-21 A method for manufacturing a thin-film EL device

Country Status (3)

Country Link
JP (1) JPH06163157A (en)
DE (1) DE4332209A1 (en)
GB (1) GB2271022B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4896208A (en) * 1986-12-02 1990-01-23 Minolta Camera Kabushiki Kaisha Apparatus and method for reading and digitally editing multiple images
GB2278853B (en) * 1993-06-08 1997-02-12 Fuji Electric Co Ltd Method for manufacturing thin-film electroluminescence device
GB2306251B (en) * 1994-08-18 1998-02-04 Ultra Silicon Techn Uk Ltd Improved luminous efficiency in a thin film EL device
GB9506328D0 (en) * 1994-08-18 1995-05-17 Ultra Silicon Techn Uk Ltd Improvements in and relating to TFEL technology
US5910706A (en) * 1996-12-18 1999-06-08 Ultra Silicon Technology (Uk) Limited Laterally transmitting thin film electroluminescent device
ATE340277T1 (en) * 2002-12-16 2006-10-15 Ifire Technology Corp COMPOSITE SPUTTING TARGET AND PHOSPHORUS DEPOSITION METHOD
DE502004006848D1 (en) * 2003-05-23 2008-05-29 Volkswagen Ag HEADLIGHTS OR LIGHTING FOR A MOTOR VEHICLE
DE10338205A1 (en) * 2003-08-20 2005-03-10 Volkswagen Ag Illuminated component for use in automobile, e.g. operating knob, provided by base body with electroluminescent layer supplied via electrical circuit embedded in base body
DE10338897A1 (en) * 2003-08-23 2005-03-17 Volkswagen Ag Functional element for starting or ending a motor vehicle's functions lights up a functional element with a fluorescent or phosphorescent layer
DE10359123B4 (en) 2003-12-17 2022-01-20 Volkswagen Ag Motor vehicle with an interior lining arranged on visible surfaces
DE102004013819A1 (en) * 2004-03-20 2005-10-06 Volkswagen Ag A switch including a pressure measurement layer with an operating surface, a pressure dependent resistor and an intermediate layer useful for automobile interiors
DE102004013820A1 (en) * 2004-03-20 2005-10-06 Volkswagen Ag Illuminated plastic component for a motor vehicle comprises electroluminescing layer and thermoformed transparent layer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3803438A (en) * 1973-04-19 1974-04-09 Rca Corp Electroluminescent film and method for preparing same
US4279726A (en) * 1980-06-23 1981-07-21 Gte Laboratories Incorporated Process for making electroluminescent films and devices
EP0132991A1 (en) * 1983-07-29 1985-02-13 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Electroluminescent device; method and product
EP0239120A2 (en) * 1986-03-27 1987-09-30 GTE Laboratories Incorporated Method of producing thin film electroluminescent structures

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05315075A (en) * 1992-05-07 1993-11-26 Fuji Electric Co Ltd Forming method for electroluminescence light emitting film

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3803438A (en) * 1973-04-19 1974-04-09 Rca Corp Electroluminescent film and method for preparing same
US4279726A (en) * 1980-06-23 1981-07-21 Gte Laboratories Incorporated Process for making electroluminescent films and devices
EP0132991A1 (en) * 1983-07-29 1985-02-13 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Electroluminescent device; method and product
EP0239120A2 (en) * 1986-03-27 1987-09-30 GTE Laboratories Incorporated Method of producing thin film electroluminescent structures

Also Published As

Publication number Publication date
GB9319432D0 (en) 1993-11-03
JPH06163157A (en) 1994-06-10
DE4332209A1 (en) 1994-03-31
GB2271022A (en) 1994-03-30

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19980921