GB2278853B - Method for manufacturing thin-film electroluminescence device - Google Patents
Method for manufacturing thin-film electroluminescence deviceInfo
- Publication number
- GB2278853B GB2278853B GB9409752A GB9409752A GB2278853B GB 2278853 B GB2278853 B GB 2278853B GB 9409752 A GB9409752 A GB 9409752A GB 9409752 A GB9409752 A GB 9409752A GB 2278853 B GB2278853 B GB 2278853B
- Authority
- GB
- United Kingdom
- Prior art keywords
- electroluminescence device
- manufacturing thin
- film electroluminescence
- film
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
- C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
- C09K11/57—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing manganese or rhenium
- C09K11/572—Chalcogenides
- C09K11/574—Chalcogenides with zinc or cadmium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
- C23C14/0629—Sulfides, selenides or tellurides of zinc, cadmium or mercury
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13629993 | 1993-06-08 |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9409752D0 GB9409752D0 (en) | 1994-07-06 |
GB2278853A GB2278853A (en) | 1994-12-14 |
GB2278853B true GB2278853B (en) | 1997-02-12 |
Family
ID=15171940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9409752A Expired - Fee Related GB2278853B (en) | 1993-06-08 | 1994-05-16 | Method for manufacturing thin-film electroluminescence device |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE4419242A1 (en) |
GB (1) | GB2278853B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9506328D0 (en) * | 1994-08-18 | 1995-05-17 | Ultra Silicon Techn Uk Ltd | Improvements in and relating to TFEL technology |
GB2306251B (en) * | 1994-08-18 | 1998-02-04 | Ultra Silicon Techn Uk Ltd | Improved luminous efficiency in a thin film EL device |
US5910706A (en) * | 1996-12-18 | 1999-06-08 | Ultra Silicon Technology (Uk) Limited | Laterally transmitting thin film electroluminescent device |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2026221A (en) * | 1978-07-18 | 1980-01-30 | Western Electric Co | Electroluminescent devices |
US4394601A (en) * | 1973-07-05 | 1983-07-19 | Sharp Kabushiki Kaisha | ZnS:Mn Thin-film electroluminescent element with memory function |
US4672266A (en) * | 1983-10-25 | 1987-06-09 | Sharp Kabushiki Kaisha | Thin film light emitting element |
EP0239120A2 (en) * | 1986-03-27 | 1987-09-30 | GTE Laboratories Incorporated | Method of producing thin film electroluminescent structures |
US4777099A (en) * | 1986-10-03 | 1988-10-11 | Olympus Optical Co., Ltd. | Thin-film EL device |
GB2271022A (en) * | 1992-09-24 | 1994-03-30 | Fuji Electric Co Ltd | A method for manufacturing a thin-film el device |
GB2273815A (en) * | 1992-12-07 | 1994-06-29 | Fuji Electric Co Ltd | Method for preparing thin-film electro-luminescence element |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05315075A (en) * | 1992-05-07 | 1993-11-26 | Fuji Electric Co Ltd | Forming method for electroluminescence light emitting film |
-
1994
- 1994-05-16 GB GB9409752A patent/GB2278853B/en not_active Expired - Fee Related
- 1994-06-01 DE DE19944419242 patent/DE4419242A1/en not_active Withdrawn
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4394601A (en) * | 1973-07-05 | 1983-07-19 | Sharp Kabushiki Kaisha | ZnS:Mn Thin-film electroluminescent element with memory function |
GB2026221A (en) * | 1978-07-18 | 1980-01-30 | Western Electric Co | Electroluminescent devices |
US4672266A (en) * | 1983-10-25 | 1987-06-09 | Sharp Kabushiki Kaisha | Thin film light emitting element |
EP0239120A2 (en) * | 1986-03-27 | 1987-09-30 | GTE Laboratories Incorporated | Method of producing thin film electroluminescent structures |
US4777099A (en) * | 1986-10-03 | 1988-10-11 | Olympus Optical Co., Ltd. | Thin-film EL device |
GB2271022A (en) * | 1992-09-24 | 1994-03-30 | Fuji Electric Co Ltd | A method for manufacturing a thin-film el device |
GB2273815A (en) * | 1992-12-07 | 1994-06-29 | Fuji Electric Co Ltd | Method for preparing thin-film electro-luminescence element |
Also Published As
Publication number | Publication date |
---|---|
GB9409752D0 (en) | 1994-07-06 |
DE4419242A1 (en) | 1994-12-22 |
GB2278853A (en) | 1994-12-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20020516 |