GB2278853B - Method for manufacturing thin-film electroluminescence device - Google Patents

Method for manufacturing thin-film electroluminescence device

Info

Publication number
GB2278853B
GB2278853B GB9409752A GB9409752A GB2278853B GB 2278853 B GB2278853 B GB 2278853B GB 9409752 A GB9409752 A GB 9409752A GB 9409752 A GB9409752 A GB 9409752A GB 2278853 B GB2278853 B GB 2278853B
Authority
GB
United Kingdom
Prior art keywords
electroluminescence device
manufacturing thin
film electroluminescence
film
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9409752A
Other versions
GB9409752D0 (en
GB2278853A (en
Inventor
Hisato Katou
Tomoyuki Kawahima
Harutaka Taniguchi
Shinichi Nakamata
Kazuyoshi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Publication of GB9409752D0 publication Critical patent/GB9409752D0/en
Publication of GB2278853A publication Critical patent/GB2278853A/en
Application granted granted Critical
Publication of GB2278853B publication Critical patent/GB2278853B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/57—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing manganese or rhenium
    • C09K11/572—Chalcogenides
    • C09K11/574—Chalcogenides with zinc or cadmium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623—Sulfides, selenides or tellurides
    • C23C14/0629—Sulfides, selenides or tellurides of zinc, cadmium or mercury
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
GB9409752A 1993-06-08 1994-05-16 Method for manufacturing thin-film electroluminescence device Expired - Fee Related GB2278853B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13629993 1993-06-08

Publications (3)

Publication Number Publication Date
GB9409752D0 GB9409752D0 (en) 1994-07-06
GB2278853A GB2278853A (en) 1994-12-14
GB2278853B true GB2278853B (en) 1997-02-12

Family

ID=15171940

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9409752A Expired - Fee Related GB2278853B (en) 1993-06-08 1994-05-16 Method for manufacturing thin-film electroluminescence device

Country Status (2)

Country Link
DE (1) DE4419242A1 (en)
GB (1) GB2278853B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9506328D0 (en) * 1994-08-18 1995-05-17 Ultra Silicon Techn Uk Ltd Improvements in and relating to TFEL technology
GB2306251B (en) * 1994-08-18 1998-02-04 Ultra Silicon Techn Uk Ltd Improved luminous efficiency in a thin film EL device
US5910706A (en) * 1996-12-18 1999-06-08 Ultra Silicon Technology (Uk) Limited Laterally transmitting thin film electroluminescent device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2026221A (en) * 1978-07-18 1980-01-30 Western Electric Co Electroluminescent devices
US4394601A (en) * 1973-07-05 1983-07-19 Sharp Kabushiki Kaisha ZnS:Mn Thin-film electroluminescent element with memory function
US4672266A (en) * 1983-10-25 1987-06-09 Sharp Kabushiki Kaisha Thin film light emitting element
EP0239120A2 (en) * 1986-03-27 1987-09-30 GTE Laboratories Incorporated Method of producing thin film electroluminescent structures
US4777099A (en) * 1986-10-03 1988-10-11 Olympus Optical Co., Ltd. Thin-film EL device
GB2271022A (en) * 1992-09-24 1994-03-30 Fuji Electric Co Ltd A method for manufacturing a thin-film el device
GB2273815A (en) * 1992-12-07 1994-06-29 Fuji Electric Co Ltd Method for preparing thin-film electro-luminescence element

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05315075A (en) * 1992-05-07 1993-11-26 Fuji Electric Co Ltd Forming method for electroluminescence light emitting film

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4394601A (en) * 1973-07-05 1983-07-19 Sharp Kabushiki Kaisha ZnS:Mn Thin-film electroluminescent element with memory function
GB2026221A (en) * 1978-07-18 1980-01-30 Western Electric Co Electroluminescent devices
US4672266A (en) * 1983-10-25 1987-06-09 Sharp Kabushiki Kaisha Thin film light emitting element
EP0239120A2 (en) * 1986-03-27 1987-09-30 GTE Laboratories Incorporated Method of producing thin film electroluminescent structures
US4777099A (en) * 1986-10-03 1988-10-11 Olympus Optical Co., Ltd. Thin-film EL device
GB2271022A (en) * 1992-09-24 1994-03-30 Fuji Electric Co Ltd A method for manufacturing a thin-film el device
GB2273815A (en) * 1992-12-07 1994-06-29 Fuji Electric Co Ltd Method for preparing thin-film electro-luminescence element

Also Published As

Publication number Publication date
GB9409752D0 (en) 1994-07-06
DE4419242A1 (en) 1994-12-22
GB2278853A (en) 1994-12-14

Similar Documents

Publication Publication Date Title
SG72617A1 (en) Thin-film transistor and method for manufacturing it
GB2297647B (en) Organic electroluminescent display device and method for manufacturing same
GB9326286D0 (en) Semiconductor device manufacturing method
KR970008346B1 (en) Method for forming a semiconductor device
PL320750A1 (en) Multi-coloured organic electroluminescent device
EP0823831A4 (en) Organic electroluminescence apparatus
KR970004450B1 (en) Method for manufacturing semiconductor device
EP0740490A4 (en) Thin-film electroluminescent element
EP0728828A3 (en) Organic electroluminescent device
EP0743809A3 (en) Organic electroluminescent device
EP0781075A4 (en) Method for sealing organic el element and organic el element
SG63739A1 (en) Manufacturing method fo semiconductor devices
GB2328795B (en) Multi-color organic electroluminescence device and method for manufacturing same
GB9305142D0 (en) Method
GB2321781B (en) Organic electroluminescence device and method for manufacturing the same
GB2271022B (en) A method for manufacturing a thin-film EL device
EP0678907A3 (en) Method for fabricating reverse-staggered thin-film transistor.
EP0459836A3 (en) Method for fabricating thin-film transistors
GB2266621B (en) A method for manufacturing a thin-film electro-luminescence element
EP0709879A4 (en) Method for manufacturing semiconductor
GB2278853B (en) Method for manufacturing thin-film electroluminescence device
GB9306292D0 (en) Method
EP0704910A3 (en) A thin-film transistor and method for forming the same
GB2273815B (en) Method for preparing thin-film electro-luminescence element
GB2279288B (en) Method for manufacturing an article

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20020516