GB2266751A - Piezoelectric micropump excitation voltage control. - Google Patents
Piezoelectric micropump excitation voltage control. Download PDFInfo
- Publication number
- GB2266751A GB2266751A GB9209593A GB9209593A GB2266751A GB 2266751 A GB2266751 A GB 2266751A GB 9209593 A GB9209593 A GB 9209593A GB 9209593 A GB9209593 A GB 9209593A GB 2266751 A GB2266751 A GB 2266751A
- Authority
- GB
- United Kingdom
- Prior art keywords
- pump
- membrane
- descending
- ramp
- micropump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000005284 excitation Effects 0.000 title claims description 18
- 239000012528 membrane Substances 0.000 claims description 29
- 230000001174 ascending effect Effects 0.000 claims description 23
- 230000007423 decrease Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 15
- 239000007788 liquid Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000005452 bending Methods 0.000 description 5
- 230000008602 contraction Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9209593A GB2266751A (en) | 1992-05-02 | 1992-05-02 | Piezoelectric micropump excitation voltage control. |
EP93106828A EP0568902A2 (en) | 1992-05-02 | 1993-04-27 | Micropump avoiding microcavitation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9209593A GB2266751A (en) | 1992-05-02 | 1992-05-02 | Piezoelectric micropump excitation voltage control. |
Publications (2)
Publication Number | Publication Date |
---|---|
GB9209593D0 GB9209593D0 (en) | 1992-06-17 |
GB2266751A true GB2266751A (en) | 1993-11-10 |
Family
ID=10714963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9209593A Withdrawn GB2266751A (en) | 1992-05-02 | 1992-05-02 | Piezoelectric micropump excitation voltage control. |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0568902A2 (enrdf_load_stackoverflow) |
GB (1) | GB2266751A (enrdf_load_stackoverflow) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4405026A1 (de) * | 1994-02-17 | 1995-08-24 | Rossendorf Forschzent | Mikro-Fluidmanipulator |
JP3726285B2 (ja) * | 1995-07-27 | 2005-12-14 | セイコーエプソン株式会社 | マイクロバルブ及びその製造方法、並びにこれを用いたマイクロポンプ及びその製造方法、このマイクロポンプを用いた装置 |
DE19534378C1 (de) * | 1995-09-15 | 1997-01-02 | Inst Mikro Und Informationstec | Fluidpumpe |
US5942443A (en) | 1996-06-28 | 1999-08-24 | Caliper Technologies Corporation | High throughput screening assay systems in microscale fluidic devices |
NZ333346A (en) | 1996-06-28 | 2000-03-27 | Caliper Techn Corp | High-throughput screening assay systems in microscale fluidic devices |
WO1998045481A1 (en) | 1997-04-04 | 1998-10-15 | Caliper Technologies Corporation | Closed-loop biochemical analyzers |
US6074725A (en) * | 1997-12-10 | 2000-06-13 | Caliper Technologies Corp. | Fabrication of microfluidic circuits by printing techniques |
US6132685A (en) | 1998-08-10 | 2000-10-17 | Caliper Technologies Corporation | High throughput microfluidic systems and methods |
AU7250001A (en) | 2000-05-25 | 2001-12-03 | Westonbridge Internat Ltd | Micromachined fluidic device and method for making same |
EP1313949A4 (en) * | 2000-08-31 | 2004-11-24 | Advanced Sensor Technologies I | MICROFLUIDIC PUMP |
US6382254B1 (en) | 2000-12-12 | 2002-05-07 | Eastman Kodak Company | Microfluidic valve and method for controlling the flow of a liquid |
US6622746B2 (en) | 2001-12-12 | 2003-09-23 | Eastman Kodak Company | Microfluidic system for controlled fluid mixing and delivery |
DE10238564B4 (de) * | 2002-08-22 | 2005-05-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Pipettiereinrichtung |
JP3725109B2 (ja) * | 2002-09-19 | 2005-12-07 | 財団法人生産技術研究奨励会 | マイクロ流体デバイス |
JP4678135B2 (ja) * | 2003-06-17 | 2011-04-27 | セイコーエプソン株式会社 | ポンプ |
JP3952036B2 (ja) | 2004-05-13 | 2007-08-01 | コニカミノルタセンシング株式会社 | マイクロ流体デバイス並びに試液の試験方法および試験システム |
FR2952628A1 (fr) * | 2009-11-13 | 2011-05-20 | Commissariat Energie Atomique | Procede de fabrication d'au moins une micropompe a membrane deformable et micropompe a membrane deformable |
WO2011146149A1 (en) * | 2010-05-21 | 2011-11-24 | Hewlett-Packard Development Company, L.P. | Fluid ejection device with circulation pump |
WO2011146069A1 (en) | 2010-05-21 | 2011-11-24 | Hewlett-Packard Development Company, L.P. | Fluid ejection device including recirculation system |
US9963739B2 (en) | 2010-05-21 | 2018-05-08 | Hewlett-Packard Development Company, L.P. | Polymerase chain reaction systems |
CN109882380B (zh) * | 2019-03-01 | 2020-04-21 | 浙江师范大学 | 一种双振子自激泵 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4449893A (en) * | 1982-05-04 | 1984-05-22 | The Abet Group | Apparatus and method for piezoelectric pumping |
GB2248891A (en) * | 1990-10-18 | 1992-04-22 | Westonbridge Int Ltd | Membrane micropump |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4344743A (en) * | 1979-12-04 | 1982-08-17 | Bessman Samuel P | Piezoelectric driven diaphragm micro-pump |
US4519751A (en) * | 1982-12-16 | 1985-05-28 | The Abet Group | Piezoelectric pump with internal load sensor |
EP0393602B1 (en) * | 1989-04-17 | 1995-03-22 | Seiko Epson Corporation | Ink-jet printer driver |
US5155498A (en) * | 1990-07-16 | 1992-10-13 | Tektronix, Inc. | Method of operating an ink jet to reduce print quality degradation resulting from rectified diffusion |
-
1992
- 1992-05-02 GB GB9209593A patent/GB2266751A/en not_active Withdrawn
-
1993
- 1993-04-27 EP EP93106828A patent/EP0568902A2/en not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4449893A (en) * | 1982-05-04 | 1984-05-22 | The Abet Group | Apparatus and method for piezoelectric pumping |
GB2248891A (en) * | 1990-10-18 | 1992-04-22 | Westonbridge Int Ltd | Membrane micropump |
Also Published As
Publication number | Publication date |
---|---|
EP0568902A2 (en) | 1993-11-10 |
EP0568902A3 (enrdf_load_stackoverflow) | 1994-03-02 |
GB9209593D0 (en) | 1992-06-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |