EP0568902A2 - Micropump avoiding microcavitation - Google Patents

Micropump avoiding microcavitation Download PDF

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Publication number
EP0568902A2
EP0568902A2 EP93106828A EP93106828A EP0568902A2 EP 0568902 A2 EP0568902 A2 EP 0568902A2 EP 93106828 A EP93106828 A EP 93106828A EP 93106828 A EP93106828 A EP 93106828A EP 0568902 A2 EP0568902 A2 EP 0568902A2
Authority
EP
European Patent Office
Prior art keywords
pump
membrane
micropump
pump chamber
descending
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP93106828A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0568902A3 (enrdf_load_stackoverflow
Inventor
M. Ary Saaman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westonbridge International Ltd
Original Assignee
Westonbridge International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westonbridge International Ltd filed Critical Westonbridge International Ltd
Publication of EP0568902A2 publication Critical patent/EP0568902A2/en
Publication of EP0568902A3 publication Critical patent/EP0568902A3/xx
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Definitions

  • the descending ramp has a linear shape starting from the end of the holding phase during which the voltage is kept at maximum level, until the beginning of the next following ascending ramp.
  • the descending ramp is linear and shorter than the time period between the end of the holding phase and the beginning of the next following ascending ramp.
  • the descending ramp follows an exponential or otherwise non-linearly decaying curve.
  • the present invention relates to a method of operating a micropump having a pump chamber which is closed by a pump membrane, which membrane is driven by a piezoelectric microactuator, whereby this method is characterized by the following steps:
  • reference number 1 designates a micropump comprising a glass support body 4, a glass membrane 2 and sandwiched therebetween a silicon wafer 3, which has been machined by any appropriate technique such as photo lithography and etching in order to obtain a structure such as indicated in Fig. 1 in very simplified fashion.
  • micropump of Fig. 1 The structure of the micropump of Fig. 1 is of course only an example, it being understood that the activation mode for a micropump according to the present invention is applicable to any other specifically structured micropump.
  • micropump 1 comprises an inlet 6 and an outlet 5 for a liquid to be transported by the operation of the micropump, inlet 6 being provided with an inlet valve 7 and outlet 5 being provided with an outlet valve 8.
  • Inlet and outlet valves 7 and 8 comprise membranes 11 and 12, which carry on their lower surface ring-shaped projections 13, 14 and 15, 16, which are located such as to surround the opening holes of inlet and outlet 6, 5 at the interface level between glass plate 4 and silicon wafer 3.
  • a pump chamber 10 is provided whereas the thickness of land 17 of the silicon wafer determines the volume of pump chamber 10.
  • Glass membrane 2 comprises a central portion 18 which carries a piezoelectric microactuator 9, which may be excited by an appropriate electric wave form in order to produce a periodically alternating contraction and expansion movement in a direction parallel to the plane of the membrane.
  • the microactuator Since the microactuator is intimately attached to the membrane, the two elements together execute a bending movement according to the principle of a bimetallic strip, whereby the bending direction depends on the polarity of the applied voltage.
  • microactuator 9 executes a contraction movement and, together with glass plate 2, bends in a direction such as to assume an upwards directed concave shape, and due to the maintenance of the side portions of glass plate 2 on the silicon wafer, membrane 18 of the glass plate bulges downwards such as to decrease the volume of the pump chamber 10.
  • membrane 12 of outlet valve 8 bulges upwards in response to the pressure build-up within pump chamber 10 and annular projections 15, 16 are lifted from their seat on the upper surface of glass plate 4 in order to permit escape of the liquid contained within pump chamber 10 through outlet 5.
  • microactuator 9 not only executes a bending movement but also a downwards movement due to the downwards bulging of center portion 18 of the glass membrane 2, whereas the degree of this downwards movement of microactuator 9 is a measure for the decrease of the volume within pump chamber 10.
  • Fig. 3 illustrates an operation phase of micropump 1 corresponding to the end of a suction stroke whereby microactuator 9 has been excited previously in order to assume, together with the glass plate 2, a configuration in which both elements together form an upwards convex shape such that center portion 18 bulges upwards, due to the fact that glass membrane 2 is withheld at the side edges on silicon wafer 3.
  • Pressure in chamber 21 which is located between the membrane of outlet valve 8 and glass membrane 2 is maintained at a level between minimum and maximum pressure of the liquid within pump chamber 10, in order to secure that outlet valve will securely open if pressure in pump chamber 10 essentially exceeds the pressure in chamber 21, and that the outlet valve is closed when the pressure in pump chamber 10 is essentially inferior to the pressure in chamber 21. Since a certain amount of pressure difference is required in order to overcome the pretension of the valve, this pressure difference has to be taken into account when regulating the pressure in chamber 21.
  • the pressure in chamber 21 may be atmospheric pressure for applications where the liquid which enters into the micropump is maintained under atmospheric pressure and where, accordingly, the suction pressure of the micropump is slightly below and the thrust pressure of the micropump is slightly above atmospheric pressure, however, the pressure in chamber 21 can be adapted to any desired value corresponding to the needs and the application of the micropump.
  • Fig. 4a illustrates a typical wave form for the excitation voltage of a prior art piezoelectric actuator for a micropump, whereby an ascending ramp 19 lasts approximately 1 ms, which is followed by a holding phase 22 at the end 24 of which begins the descending ramp 20 which lasts also approximately 1 ms. For the rest of the duration of a pump cycle which lasts between 100 and 1000 ms typically, the excitation voltage is kept at the lower level.
  • the descending ramp according to Fig. 4b may last 10 to 100 ms depending on the entire duration of a pump cycle and on the duration of the holding phase 22.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP93106828A 1992-05-02 1993-04-27 Micropump avoiding microcavitation Withdrawn EP0568902A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9209593A GB2266751A (en) 1992-05-02 1992-05-02 Piezoelectric micropump excitation voltage control.
GB9209593 1992-05-02

Publications (2)

Publication Number Publication Date
EP0568902A2 true EP0568902A2 (en) 1993-11-10
EP0568902A3 EP0568902A3 (enrdf_load_stackoverflow) 1994-03-02

Family

ID=10714963

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93106828A Withdrawn EP0568902A2 (en) 1992-05-02 1993-04-27 Micropump avoiding microcavitation

Country Status (2)

Country Link
EP (1) EP0568902A2 (enrdf_load_stackoverflow)
GB (1) GB2266751A (enrdf_load_stackoverflow)

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4405026A1 (de) * 1994-02-17 1995-08-24 Rossendorf Forschzent Mikro-Fluidmanipulator
DE19534378C1 (de) * 1995-09-15 1997-01-02 Inst Mikro Und Informationstec Fluidpumpe
EP0789146A4 (en) * 1995-07-27 1998-10-28 Seiko Epson Corp MICROVALVE AND METHOD FOR THEIR PRODUCTION, MICROPUMP USING THIS MICROVALVE AND METHOD FOR THEIR PRODUCTION, AND DEVICE USING THIS MICROPUMP
US5942443A (en) * 1996-06-28 1999-08-24 Caliper Technologies Corporation High throughput screening assay systems in microscale fluidic devices
US6074725A (en) * 1997-12-10 2000-06-13 Caliper Technologies Corp. Fabrication of microfluidic circuits by printing techniques
US6132685A (en) * 1998-08-10 2000-10-17 Caliper Technologies Corporation High throughput microfluidic systems and methods
US6267858B1 (en) 1996-06-28 2001-07-31 Caliper Technologies Corp. High throughput screening assay systems in microscale fluidic devices
WO2001090577A1 (fr) * 2000-05-25 2001-11-29 Westonbridge International Limited Dispositif fluidique micro-usine et son procede de fabrication
US6382254B1 (en) 2000-12-12 2002-05-07 Eastman Kodak Company Microfluidic valve and method for controlling the flow of a liquid
US6622746B2 (en) 2001-12-12 2003-09-23 Eastman Kodak Company Microfluidic system for controlled fluid mixing and delivery
DE10238564A1 (de) * 2002-08-22 2004-03-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pipetiereinrichtung und Verfahren zum Betreiben einer Pipetiereinrichtung
EP1403518A3 (en) * 2002-09-19 2004-04-28 The Foundation for the Promotion of Industrial Science Microfluidic device made at least partially of an elastic material
EP1313949A4 (en) * 2000-08-31 2004-11-24 Advanced Sensor Technologies I MICROFLUIDIC PUMP
EP1489306A3 (en) * 2003-06-17 2005-11-16 Seiko Epson Corporation Pump
EP1959255A2 (en) 1997-04-04 2008-08-20 Caliper Life Sciences, Inc. Closed-loop biochemical analyzers
US7749444B2 (en) 2004-05-13 2010-07-06 Konica Minolta Sensing, Inc. Microfluidic device, method for testing reagent and system for testing reagent
WO2011058140A3 (en) * 2009-11-13 2011-12-01 Commissariat à l'énergie atomique et aux énergies alternatives Method for producing at least one deformable membrane micropump and deformable membrane micropump
JP2017196614A (ja) * 2010-05-21 2017-11-02 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． 流体ネットワークにおける流体流れの生成
US10272691B2 (en) 2010-05-21 2019-04-30 Hewlett-Packard Development Company, L.P. Microfluidic systems and networks
CN109882380A (zh) * 2019-03-01 2019-06-14 浙江师范大学 一种双振子自激泵
US10415086B2 (en) 2010-05-21 2019-09-17 Hewlett-Packard Development Company, L.P. Polymerase chain reaction systems

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4344743A (en) * 1979-12-04 1982-08-17 Bessman Samuel P Piezoelectric driven diaphragm micro-pump
US4449893A (en) * 1982-05-04 1984-05-22 The Abet Group Apparatus and method for piezoelectric pumping
US4519751A (en) * 1982-12-16 1985-05-28 The Abet Group Piezoelectric pump with internal load sensor
EP0393602B1 (en) * 1989-04-17 1995-03-22 Seiko Epson Corporation Ink-jet printer driver
US5155498A (en) * 1990-07-16 1992-10-13 Tektronix, Inc. Method of operating an ink jet to reduce print quality degradation resulting from rectified diffusion
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump

Cited By (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4405026A1 (de) * 1994-02-17 1995-08-24 Rossendorf Forschzent Mikro-Fluidmanipulator
EP0789146A4 (en) * 1995-07-27 1998-10-28 Seiko Epson Corp MICROVALVE AND METHOD FOR THEIR PRODUCTION, MICROPUMP USING THIS MICROVALVE AND METHOD FOR THEIR PRODUCTION, AND DEVICE USING THIS MICROPUMP
DE19534378C1 (de) * 1995-09-15 1997-01-02 Inst Mikro Und Informationstec Fluidpumpe
US6558960B1 (en) 1996-06-28 2003-05-06 Caliper Technologies Corp. High throughput screening assay systems in microscale fluidic devices
US7285411B1 (en) 1996-06-28 2007-10-23 Caliper Life Sciences, Inc. High throughput screening assay systems in microscale fluidic devices
US7091048B2 (en) 1996-06-28 2006-08-15 Parce J Wallace High throughput screening assay systems in microscale fluidic devices
US7041509B2 (en) 1996-06-28 2006-05-09 Caliper Life Sciences, Inc. High throughput screening assay systems in microscale fluidic devices
US6150180A (en) * 1996-06-28 2000-11-21 Caliper Technologies Corp. High throughput screening assay systems in microscale fluidic devices
US6267858B1 (en) 1996-06-28 2001-07-31 Caliper Technologies Corp. High throughput screening assay systems in microscale fluidic devices
US6274337B1 (en) 1996-06-28 2001-08-14 Caliper Technologies Corp. High throughput screening assay systems in microscale fluidic devices
US6306659B1 (en) 1996-06-28 2001-10-23 Caliper Technologies Corp. High throughput screening assay systems in microscale fluidic devices
US6046056A (en) * 1996-06-28 2000-04-04 Caliper Technologies Corporation High throughput screening assay systems in microscale fluidic devices
US5942443A (en) * 1996-06-28 1999-08-24 Caliper Technologies Corporation High throughput screening assay systems in microscale fluidic devices
US6399389B1 (en) 1996-06-28 2002-06-04 Caliper Technologies Corp. High throughput screening assay systems in microscale fluidic devices
US6413782B1 (en) 1996-06-28 2002-07-02 Caliper Technologies Corp. Methods of manufacturing high-throughput screening systems
US6429025B1 (en) 1996-06-28 2002-08-06 Caliper Technologies Corp. High-throughput screening assay systems in microscale fluidic devices
US6479299B1 (en) 1996-06-28 2002-11-12 Caliper Technologies Corp. Pre-disposed assay components in microfluidic devices and methods
US6630353B1 (en) 1996-06-28 2003-10-07 Caliper Technologies Corp. High throughput screening assay systems in microscale fluidic devices
US6558944B1 (en) 1996-06-28 2003-05-06 Caliper Technologies Corp. High throughput screening assay systems in microscale fluidic devices
EP1959255A2 (en) 1997-04-04 2008-08-20 Caliper Life Sciences, Inc. Closed-loop biochemical analyzers
US6074725A (en) * 1997-12-10 2000-06-13 Caliper Technologies Corp. Fabrication of microfluidic circuits by printing techniques
US6509085B1 (en) * 1997-12-10 2003-01-21 Caliper Technologies Corp. Fabrication of microfluidic circuits by printing techniques
US6132685A (en) * 1998-08-10 2000-10-17 Caliper Technologies Corporation High throughput microfluidic systems and methods
US6495369B1 (en) 1998-08-10 2002-12-17 Caliper Technologies Corp. High throughput microfluidic systems and methods
WO2001090577A1 (fr) * 2000-05-25 2001-11-29 Westonbridge International Limited Dispositif fluidique micro-usine et son procede de fabrication
US7005078B2 (en) 2000-05-25 2006-02-28 Debiotech Sa Micromachined fluidic device and method for making same
US7311503B2 (en) 2000-05-25 2007-12-25 Debiotech S.A. Micromachined fluidic device and method for making same
EP1313949A4 (en) * 2000-08-31 2004-11-24 Advanced Sensor Technologies I MICROFLUIDIC PUMP
US6382254B1 (en) 2000-12-12 2002-05-07 Eastman Kodak Company Microfluidic valve and method for controlling the flow of a liquid
US6622746B2 (en) 2001-12-12 2003-09-23 Eastman Kodak Company Microfluidic system for controlled fluid mixing and delivery
DE10238564A1 (de) * 2002-08-22 2004-03-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pipetiereinrichtung und Verfahren zum Betreiben einer Pipetiereinrichtung
DE10238564B4 (de) * 2002-08-22 2005-05-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pipettiereinrichtung
EP1403518A3 (en) * 2002-09-19 2004-04-28 The Foundation for the Promotion of Industrial Science Microfluidic device made at least partially of an elastic material
EP1489306A3 (en) * 2003-06-17 2005-11-16 Seiko Epson Corporation Pump
US7749444B2 (en) 2004-05-13 2010-07-06 Konica Minolta Sensing, Inc. Microfluidic device, method for testing reagent and system for testing reagent
US10082135B2 (en) 2009-11-13 2018-09-25 Commissariat à l'énergie atomique et aux énergies alternatives Method for producing at least one deformable membrane micropump and deformable membrane micropump
WO2011058140A3 (en) * 2009-11-13 2011-12-01 Commissariat à l'énergie atomique et aux énergies alternatives Method for producing at least one deformable membrane micropump and deformable membrane micropump
JP2017196614A (ja) * 2010-05-21 2017-11-02 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． 流体ネットワークにおける流体流れの生成
US10272691B2 (en) 2010-05-21 2019-04-30 Hewlett-Packard Development Company, L.P. Microfluidic systems and networks
US10415086B2 (en) 2010-05-21 2019-09-17 Hewlett-Packard Development Company, L.P. Polymerase chain reaction systems
US11260668B2 (en) 2010-05-21 2022-03-01 Hewlett-Packard Development Company, L.P. Fluid ejection device including recirculation system
CN109882380A (zh) * 2019-03-01 2019-06-14 浙江师范大学 一种双振子自激泵
CN109882380B (zh) * 2019-03-01 2020-04-21 浙江师范大学 一种双振子自激泵

Also Published As

Publication number Publication date
EP0568902A3 (enrdf_load_stackoverflow) 1994-03-02
GB2266751A (en) 1993-11-10
GB9209593D0 (en) 1992-06-17

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