GB2266751A - Piezoelectric micropump excitation voltage control. - Google Patents

Piezoelectric micropump excitation voltage control. Download PDF

Info

Publication number
GB2266751A
GB2266751A GB9209593A GB9209593A GB2266751A GB 2266751 A GB2266751 A GB 2266751A GB 9209593 A GB9209593 A GB 9209593A GB 9209593 A GB9209593 A GB 9209593A GB 2266751 A GB2266751 A GB 2266751A
Authority
GB
United Kingdom
Prior art keywords
pump
membrane
descending
ramp
micropump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9209593A
Other languages
English (en)
Other versions
GB9209593D0 (en
Inventor
Ary Saaman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westonbridge International Ltd
Original Assignee
Westonbridge International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westonbridge International Ltd filed Critical Westonbridge International Ltd
Priority to GB9209593A priority Critical patent/GB2266751A/en
Publication of GB9209593D0 publication Critical patent/GB9209593D0/en
Priority to EP93106828A priority patent/EP0568902A2/en
Publication of GB2266751A publication Critical patent/GB2266751A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
GB9209593A 1992-05-02 1992-05-02 Piezoelectric micropump excitation voltage control. Withdrawn GB2266751A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9209593A GB2266751A (en) 1992-05-02 1992-05-02 Piezoelectric micropump excitation voltage control.
EP93106828A EP0568902A2 (en) 1992-05-02 1993-04-27 Micropump avoiding microcavitation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9209593A GB2266751A (en) 1992-05-02 1992-05-02 Piezoelectric micropump excitation voltage control.

Publications (2)

Publication Number Publication Date
GB9209593D0 GB9209593D0 (en) 1992-06-17
GB2266751A true GB2266751A (en) 1993-11-10

Family

ID=10714963

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9209593A Withdrawn GB2266751A (en) 1992-05-02 1992-05-02 Piezoelectric micropump excitation voltage control.

Country Status (2)

Country Link
EP (1) EP0568902A2 (OSRAM)
GB (1) GB2266751A (OSRAM)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4405026A1 (de) * 1994-02-17 1995-08-24 Rossendorf Forschzent Mikro-Fluidmanipulator
WO1997005385A1 (en) * 1995-07-27 1997-02-13 Seiko Epson Corporation Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump
DE19534378C1 (de) * 1995-09-15 1997-01-02 Inst Mikro Und Informationstec Fluidpumpe
US5942443A (en) * 1996-06-28 1999-08-24 Caliper Technologies Corporation High throughput screening assay systems in microscale fluidic devices
NZ333346A (en) 1996-06-28 2000-03-27 Caliper Techn Corp High-throughput screening assay systems in microscale fluidic devices
JP2001521622A (ja) 1997-04-04 2001-11-06 カリパー テクノロジーズ コーポレイション 閉ループ生化学分析器
US6074725A (en) * 1997-12-10 2000-06-13 Caliper Technologies Corp. Fabrication of microfluidic circuits by printing techniques
US6132685A (en) * 1998-08-10 2000-10-17 Caliper Technologies Corporation High throughput microfluidic systems and methods
ATE307976T1 (de) * 2000-05-25 2005-11-15 Debiotech Sa Microbearbeitete fluidische vorrichtung und herstellungsverfahren
EP1313949A4 (en) * 2000-08-31 2004-11-24 Advanced Sensor Technologies I MICROFLUIDIC PUMP
US6382254B1 (en) 2000-12-12 2002-05-07 Eastman Kodak Company Microfluidic valve and method for controlling the flow of a liquid
US6622746B2 (en) 2001-12-12 2003-09-23 Eastman Kodak Company Microfluidic system for controlled fluid mixing and delivery
DE10238564B4 (de) * 2002-08-22 2005-05-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pipettiereinrichtung
JP3725109B2 (ja) * 2002-09-19 2005-12-07 財団法人生産技術研究奨励会 マイクロ流体デバイス
JP4678135B2 (ja) * 2003-06-17 2011-04-27 セイコーエプソン株式会社 ポンプ
JP3952036B2 (ja) 2004-05-13 2007-08-01 コニカミノルタセンシング株式会社 マイクロ流体デバイス並びに試液の試験方法および試験システム
FR2952628A1 (fr) * 2009-11-13 2011-05-20 Commissariat Energie Atomique Procede de fabrication d'au moins une micropompe a membrane deformable et micropompe a membrane deformable
CN102985261B (zh) * 2010-05-21 2016-02-03 惠普发展公司，有限责任合伙企业 具有循环泵的流体喷射设备
US9090084B2 (en) 2010-05-21 2015-07-28 Hewlett-Packard Development Company, L.P. Fluid ejection device including recirculation system
US9963739B2 (en) 2010-05-21 2018-05-08 Hewlett-Packard Development Company, L.P. Polymerase chain reaction systems
CN109882380B (zh) * 2019-03-01 2020-04-21 浙江师范大学 一种双振子自激泵

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4449893A (en) * 1982-05-04 1984-05-22 The Abet Group Apparatus and method for piezoelectric pumping
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4344743A (en) * 1979-12-04 1982-08-17 Bessman Samuel P Piezoelectric driven diaphragm micro-pump
US4519751A (en) * 1982-12-16 1985-05-28 The Abet Group Piezoelectric pump with internal load sensor
EP0393602B1 (en) * 1989-04-17 1995-03-22 Seiko Epson Corporation Ink-jet printer driver
US5155498A (en) * 1990-07-16 1992-10-13 Tektronix, Inc. Method of operating an ink jet to reduce print quality degradation resulting from rectified diffusion

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4449893A (en) * 1982-05-04 1984-05-22 The Abet Group Apparatus and method for piezoelectric pumping
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump

Also Published As

Publication number Publication date
EP0568902A3 (OSRAM) 1994-03-02
GB9209593D0 (en) 1992-06-17
EP0568902A2 (en) 1993-11-10

Similar Documents

Publication Publication Date Title
EP0568902A2 (en) Micropump avoiding microcavitation
US4938742A (en) Piezoelectric micropump with microvalves
Esashi et al. Normally closed microvalve and mircopump fabricated on a silicon wafer
US5702618A (en) Methods for manufacturing a flow switch
EP0491026B1 (en) Valve, method for producing said valve and micropump incorporating said valve
JP4629231B2 (ja) 圧電マイクロポンプ
US4983876A (en) Piezoelectric pump assembly
US7008193B2 (en) Micropump assembly for a microgas chromatograph and the like
US5400824A (en) Microvalve
JP4383053B2 (ja) 超小型流体用バルブ、および、超小型バルブ用マイクロアクチュエータ
US20020009374A1 (en) Micro pump
EP2071189B1 (en) Microfluidic device
HK103397A (en) Micropump
Sato et al. Electrostatic film actuator with a large vertical displacement
JP2000148254A (ja) 真空圧力制御装置
US20110043937A1 (en) Microvalve system
JP2007509286A (ja) 高流量マイクロバルブ
JPH09287571A (ja) マイクロポンプ
AU5955798A (en) Micropump with a built-in intermediate part
Shikida et al. Fabrication of an S-shaped microactuator
US20060186085A1 (en) Method for the production of a micromechanical part preferably used for fluidic applications, and micropump comprising a pump membrane made of a polysilicon layer
US4225111A (en) Solenoid valve
JP2982984B2 (ja) 微少流量用制御バルブ
JPS6231784A (ja) 圧電駆動式弁
JPS62177383A (ja) 圧電駆動式弁

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)