GB2234364B - Method of producing lambda/4-shifted diffraction grating - Google Patents

Method of producing lambda/4-shifted diffraction grating

Info

Publication number
GB2234364B
GB2234364B GB9006051A GB9006051A GB2234364B GB 2234364 B GB2234364 B GB 2234364B GB 9006051 A GB9006051 A GB 9006051A GB 9006051 A GB9006051 A GB 9006051A GB 2234364 B GB2234364 B GB 2234364B
Authority
GB
United Kingdom
Prior art keywords
diffraction grating
shifted diffraction
lambda
producing
producing lambda
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9006051A
Other languages
English (en)
Other versions
GB9006051D0 (en
GB2234364A (en
Inventor
Masatoshi Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of GB9006051D0 publication Critical patent/GB9006051D0/en
Publication of GB2234364A publication Critical patent/GB2234364A/en
Application granted granted Critical
Publication of GB2234364B publication Critical patent/GB2234364B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB9006051A 1989-07-28 1990-03-16 Method of producing lambda/4-shifted diffraction grating Expired - Fee Related GB2234364B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1197803A JPH0361901A (ja) 1989-07-28 1989-07-28 λ／４シフト回折格子の製造方法

Publications (3)

Publication Number Publication Date
GB9006051D0 GB9006051D0 (en) 1990-05-09
GB2234364A GB2234364A (en) 1991-01-30
GB2234364B true GB2234364B (en) 1993-03-31

Family

ID=16380610

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9006051A Expired - Fee Related GB2234364B (en) 1989-07-28 1990-03-16 Method of producing lambda/4-shifted diffraction grating

Country Status (3)

Country Link
JP (1) JPH0361901A (enrdf_load_stackoverflow)
DE (1) DE4020319A1 (enrdf_load_stackoverflow)
GB (1) GB2234364B (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4322163A1 (de) * 1993-07-03 1995-01-12 Ant Nachrichtentech Auf DFB- oder DBR-Gitter basierendes optoelektronisches Bauelement mit quasi-kontinuierlich axial verteilbarer Brechungsindex-Variation, mit axial beliebig verteilbarer und variierbarer Phasenverschiebung, sowie mit axial quasi-kontinuierlich variierbarem Gitter-Kopplungskoeffizienten
DE4322164A1 (de) * 1993-07-03 1995-01-12 Ant Nachrichtentech Optoelektronisches Bauelement mit Rückkopplungsgitter, mit axial quasi-kontinuierlich und nahezu beliebig variierbarem Gitterkopplungs-Koeffizienten, mit quasi-kontinuierlich axial verteilbarer Brechungsindex-Variation, sowie mit axial nahezu beliebig verteilbarer und variierbarer Phasenverschiebung
JP3366441B2 (ja) * 1994-06-21 2003-01-14 三菱電機株式会社 λ／４シフト回折格子の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2178192A (en) * 1985-07-16 1987-02-04 Kokusai Denshin Denwa Co Ltd Method for manufacturing diffraction gratings

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2855723C2 (de) * 1978-12-22 1985-11-28 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zum Herstellen eines Negativmusters einer Vorlage aus einem Positivlack
DE3842489A1 (de) * 1988-12-16 1990-06-21 Siemens Ag Verfahren zur herstellung von gitterstrukturen mit um eine halbe gitterperiode gegeneinander versetzten abschnitten

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2178192A (en) * 1985-07-16 1987-02-04 Kokusai Denshin Denwa Co Ltd Method for manufacturing diffraction gratings

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Electronics letters, Nov 1984, Vol 20, No 24, pp 1008-9, K Utake et al. *

Also Published As

Publication number Publication date
GB9006051D0 (en) 1990-05-09
DE4020319C2 (enrdf_load_stackoverflow) 1992-07-02
GB2234364A (en) 1991-01-30
DE4020319A1 (de) 1991-02-07
JPH0361901A (ja) 1991-03-18

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Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 19951107

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20050316