GB2184599B - Integrated schottky diode - Google Patents

Integrated schottky diode

Info

Publication number
GB2184599B
GB2184599B GB8628416A GB8628416A GB2184599B GB 2184599 B GB2184599 B GB 2184599B GB 8628416 A GB8628416 A GB 8628416A GB 8628416 A GB8628416 A GB 8628416A GB 2184599 B GB2184599 B GB 2184599B
Authority
GB
United Kingdom
Prior art keywords
schottky diode
integrated schottky
integrated
diode
schottky
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8628416A
Other versions
GB8628416D0 (en
GB2184599A (en
Inventor
Franco Bertotti
Paolo Ferrari
Flavio Villa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SRL
Original Assignee
SGS Microelettronica SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGS Microelettronica SpA filed Critical SGS Microelettronica SpA
Publication of GB8628416D0 publication Critical patent/GB8628416D0/en
Publication of GB2184599A publication Critical patent/GB2184599A/en
Application granted granted Critical
Publication of GB2184599B publication Critical patent/GB2184599B/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/2205Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
    • H01L29/167Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System further characterised by the doping material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/861Diodes
    • H01L29/872Schottky diodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
GB8628416A 1985-12-23 1986-11-27 Integrated schottky diode Expired GB2184599B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT23364/85A IT1186490B (en) 1985-12-23 1985-12-23 INTEGRATED SCHOTTKY DIODE

Publications (3)

Publication Number Publication Date
GB8628416D0 GB8628416D0 (en) 1986-12-31
GB2184599A GB2184599A (en) 1987-06-24
GB2184599B true GB2184599B (en) 1989-12-06

Family

ID=11206434

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8628416A Expired GB2184599B (en) 1985-12-23 1986-11-27 Integrated schottky diode

Country Status (4)

Country Link
DE (1) DE3644253A1 (en)
FR (1) FR2592226A1 (en)
GB (1) GB2184599B (en)
IT (1) IT1186490B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0310351B1 (en) * 1987-09-30 1993-07-14 Texas Instruments Incorporated Static memory using schottky technology
FR2689317B1 (en) * 1992-03-26 1994-06-17 Sgs Thomson Microelectronics INTEGRATED CIRCUIT CONSTITUTING A NETWORK OF PROTECTION DIODES.
DE19616605C2 (en) * 1996-04-25 1998-03-26 Siemens Ag Schottky diode arrangement and method of manufacture
US7528459B2 (en) * 2003-05-27 2009-05-05 Nxp B.V. Punch-through diode and method of processing the same
CN101999163B (en) * 2008-09-04 2014-05-21 美国芯源系统股份有限公司 Low leakage and/or low turn-on voltage schottky diode
CN101656272B (en) * 2009-07-22 2011-08-03 上海宏力半导体制造有限公司 Schottky diode and fabricating method thereof
CN113013259A (en) * 2021-02-26 2021-06-22 西安微电子技术研究所 Low-conduction-voltage-drop Schottky diode structure and preparation method thereof
CN114709254B (en) * 2022-04-01 2023-03-21 无锡友达电子有限公司 High-voltage parallel diode structure with composite buried layer and preparation method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE758683A (en) * 1969-11-10 1971-05-10 Ibm MANUFACTURING PROCESS OF A SELF-INSULATING MONOLITHIC DEVICE AND BASE TRANSISTOR STRUCTURE
JPS55141763A (en) * 1979-04-23 1980-11-05 Hitachi Ltd Schottky barrier diode and fabricating method of the same

Also Published As

Publication number Publication date
FR2592226A1 (en) 1987-06-26
IT1186490B (en) 1987-11-26
DE3644253A1 (en) 1987-06-25
GB8628416D0 (en) 1986-12-31
GB2184599A (en) 1987-06-24
IT8523364A0 (en) 1985-12-23

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee