GB2165827A - Cleaning waste gases - Google Patents

Cleaning waste gases Download PDF

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Publication number
GB2165827A
GB2165827A GB08505127A GB8505127A GB2165827A GB 2165827 A GB2165827 A GB 2165827A GB 08505127 A GB08505127 A GB 08505127A GB 8505127 A GB8505127 A GB 8505127A GB 2165827 A GB2165827 A GB 2165827A
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United Kingdom
Prior art keywords
gas
cracking chamber
waste gases
chamber
gases
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB08505127A
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GB2165827B (en
GB8505127D0 (en
Inventor
Lars Bentell
Jarl Martensson
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SKF Steel Engineering AB
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SKF Steel Engineering AB
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Publication date
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Publication of GB8505127D0 publication Critical patent/GB8505127D0/en
Publication of GB2165827A publication Critical patent/GB2165827A/en
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Publication of GB2165827B publication Critical patent/GB2165827B/en
Expired legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122Incoherent waves
    • B01J19/123Ultraviolet light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/68Halogens or halogen compounds
    • B01D53/70Organic halogen compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/72Organic compounds not provided for in groups B01D53/48 - B01D53/70, e.g. hydrocarbons
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23JREMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00Arrangements of devices for treating smoke or fumes
    • F23J15/02Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Electromagnetism (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Organic Chemistry (AREA)
  • Toxicology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Treating Waste Gases (AREA)
  • Processing Of Solid Wastes (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Fire-Extinguishing Compositions (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The present invention relates to a method and a means for cleaning waste gases from destruction plants for dealing with industrial and household waste from toxic chlorine compounds and/or heavier hydrocarbons. Chlorine compounds occurring in the waste gases are decomposed by means of UV irradiation in a cracking chamber while the heavier hydrocarbons occurring in waste gases are cracked by the simultaneous supply of external thermal energy, independent of combustion.

Description

SPECIFICATION Cleaning waste gases The present invention relates to a method of cleaning waste gases from destruction plants for dealing with industrial and household waste from toxic chlorine compounds and/or heavier hydrocarbons, and to a plant for performing the method according to the invention.
Conventional incinerators for household and industrial waste have been found to give off not inconsiderable quantities of substances injurious to health in the form of chlorine compounds, for instance, dioxines. These compounds are produced in the combustion chamber due to low combustion temperatures occurring locally. They may also be produced when the exhaust gases are cooled if the gases contain chlorine and/or hydrogen chloride.
As yet there is no suitable method of ensuring that such chlorine compounds are not formed, nor is there any method of removing them from the exhaust gases coming from these types of destruction plants.
One object of the invention is to effect a method of cleaning waste gases from destruction plants for industrial and household waste, which ensures that the gases do not contain toxic chlorine compounds.
Another object of the invention is to achieve a cleaning process which also eliminates the content of heavier hydrocarbons such as tar and the like.
Yet another object of the invention is to produce a plant for performing the method according to the invention.
The method according to the invention is characterised in that chlorine compounds occurring in the waste gases are decomposed by means of irradiation with UV light in a cracking chamber and in that heavier hydrocarbons occurring in the waste gases are simultaneously cracked by supplying external thermal energy, independent of the combustion.
According to one embodiment of the invention, the UV irradiation is effected by conducting a part of the gases through an electric arc generated in the cracking chamber to heat parts of the gas flow to ionization temperature while at the same time increasing the physical heat content of the gases.
According to another embodiment of the invention the UV irradiation is effected by conducting the waste gases througha chamber into which a gas heated to ionization temperature in a plasma generator is introduced.
Treatment with plasma gas, either generated by transferred arc, i.e. by an arc generated in the chamber, or by the use of a plasma generator, causes heating of the gases in the chamber, the physical thermal content in the gases being utilized to crack any heavier hydrocarbons, such as tar, present in the waste gases from the furnace.
The waste gases are suitably introduced tangentially into the cracking chamber and are caused to rotate so that uniform irradiation of the entire quantity of gas flowing through is obtained.
To prevent dioxines being re-formed, for instance, or the formation of other toxic chlorine compounds, a second process step may be performed according to the invention in which the cleaning gases after cooling, e.g. by heat-e#chang- ing to 350-700 C, are introduced into a reactor filled with a suitable acceptor for removing chlorine and/or hydrogen chloride from the gas, as well as for condensing any metal vapour in the gas.
Quicklime or slaked lime and/or dolomite is/are preferably used as acceptor.
In destruction plants operating with a deficiency of oxygen, according to the present invention the waste gases may be subjected to a carburizing step after irradiation, whereupon the gas is caused to pass a reactor filled with solid carbonaceous material in lump form, e.g. coke, possibly with an additive such as an alkali compound to increase the reactivity. The physical heat of the gas is then utilized to heat the coke to the temperature of the gas, the carbon in the coke reacting with oxygen, carbon dioxide and water vapour in the gas, to form carbon monoxide and hydrogen gas, thus increasing the thermal value of the gas.
The plant for performing the method according to the invention includes a furnace for the destruction of industrial and household waste and conventional means for heat exchanging, cleaning and cooling, and comprises a cracking chamber, preferably heat-insulated, containing a source for UV irradiation as well as a source for the supply of thermal energy.
The cracking chamber is preferably designed as a heat-insulated reactor into which the waste gases are conducted tangentially and pass through the chamber in a rotary movement along the wall to the outlet at the opposite end of the chamber.
According to one embodiment of the invention the source of UV irradiation and the supply of thermal energy consist of two electrodes inserted in the chamber, between which an electric arc is generated inside the chamber, through which a part of waste gases is caused to flow.
According to an alternative embodiment of the plant according to the invention, the source of UV irradiation and supply of thermal energy consists of at least one plasma generator arranged in the immediate vicinity of the cracking chamber, in which plasma generator a gas flow is heated to ionization temperature in an electric arc generated between two electrodes in the plasma generator, said ionized gas being subsequently introduced into the chamber.
According to another embodiment of the invention, the plant includes a carburizing shaft filled with coke, arranged immediately after the cracking chamber.
According to yet another embodiment of the invention, the plant includes a reactor filled with a suitable acceptor for chlorine and and/or hydrogen chloride in the gas. The acceptor preferably consists of quicklime or slaked lime and/or dolomite.
The reactor preferably consists of a vertical shaft with supply means for the acceptor at its top and tapping means for removal of the products ab sorbed.
Further advantages and features of the invention will be revealed in the following detailed description with reference to the accompanying drawing, in which Figure 1 shows schematically an waste-destruction plant according to the invention, Figure 2 shows schematically an alternative embodiment of a waste-destruction plant according to the invention, Figure 3 shows schematically a cracking chamber operating in accordance with one embodiment of the invention, in combination with a carburizing shaft, and Figure 4 shows schematically a cracking chamber operating in accordance with an alternative embodiment of the invention, in combination with a carburizing shaft.
The plant shown schematically in Figure 1 comprises an incinerator 1 operating with an excess of oxygen, i.e. pure combustion. The waste gases are conducted to a cracking chamber 2, to be described in more detail below, in which the chlorine compounds injurious to health which occur in the gas are cracked by means of UV irradiation. Heavier hydrocarbons are disintegrated by the thermal energy supplied simultaneously.
The scrubbed gases are then suitably conducted from the cracking chamber, possibly after chlorine scrubbing which is described in more detail with reference to Figure 2, to a heat-exchanger 3, a scrubbing and cooling means 4 and are then discharged from a chimney 5. These steps represent conventional technology and will not be dealt with further here.
The plant shown schematically in Figure 2 comprises a destruction plant 10 which utilizes oxygen deficiency and can thus be used for the production of combustible gases. The waste gases are conducted from the furnace to a cracking chamber 11 of the same type as indicated above, which will be described more fully below. The gas from the cracking chamber 11 is conducted into a carburizing shaft 12 arranged immediately thereafter, in which the thermal value of the gas is increased by making use of its physical thermal content.
The gas is carried from the carburizing shaft via a cooler or heat-exchanger 13, in which the temperature is reduced to a temperature of ca. 350 700 C, to a chloride scrubbing unit 14 in which chlorine and/or hydrogen chloride in the gases are removed by means of an acceptor in the form of quicklime or slaked lime andlor dolomite.
The gas thus cleaned and improved in quality can then be caused to pass conventional treating units or may be withdrawn for combustion or some other application.
Figure 3 shows a cracking chamber 30 arranged in conjunction with a carburizing shaft 31. It should be noted that the cracking chamber in the plant shown in Figure 1 operates separately and that a carburizing shaft is not obligatory. The same of course applies to the embodiment of the cracking chamber shown in Figure 4.
In the embodiment shown in Figure 3 the cracking chamber according to the invention is designed as a reactor with a tangential inlet 32 for the waste gases from the combustion furnace. The chamber contains a bottom electrode 33 and an annular electrode 34, between which an electrode arc 35 is generated. Upon passage through the arc a small part of the waste gases will achieve ionization temperature and will therefore emit UV radiation.
Since the waste gases flow with a rotary movement, they will be uniformly and completely irradiated.
The physical thermal content of the gas is further increased in the cracking chamber by the electric energy supplied, enabling the thermal content to be utilized in the subsequent carburizing step. The carburizing shaft 31 comprises a coke inlet 36 at the top and an outlet 37 for remaining products at the bottom. The waste gases are introduced at the bottom of the reactor and discharged through an upper gas outlet 38.
The coke filler in the shaft is heated to the temperature of the gas by the physical thermal content of the gas and oxygen, carbon dioxide and water vapour are converted with the carbon in the coke to carbon monoxide and hydrogen gas. After this the gas may be cleaned from sulphur in conventional manner if required.
After said sulphur purification, if any, the gas is cooled or heat-exchanged to approximately 350 700 C and passed through a suitable acceptor for chlorine and hydrogen chloride, suitably quicklime or slaked lime and/or dolomite. A vertical reactor filled with the acceptor is advantageously used.
Figure 4, like Figure 3, shows a cracking chamber 40 arranged in immediate conjunction with a carburizing shaft 41. A gas, suitably a single-atom gas, is supplied to a plasma generator 42 and heated to ionization temperature in an electric arc generated therein. The gas thus heated is introduced into the cracking chamber 40 at 43 while the waste gas is introduced tangentially through inlet 44 and is thus irradiated by the UV radiation emitted by the plasma gas. At the same time, the waste gases are heated at least slightly by the hot plasma gas and this heat can then be used as before in the carburizing shaft. The quantity of heat added in this way can per se also be controlled.

Claims (20)

1. A method of cleaning waste gases, from destruction plants for dealing with industrial and household waste, of toxic chlorine compounds and/or heavier hydrocarbons, wherein chlorine compounds occurring in the waste gases are decomposed by means of irradiation with UV light in a cracking chamber and wherein the heavier hydrocarbons occurring in the waste gases are cracked by the simultaneous supply of external thermal energy, independent of combustion.
2. A method according to claim 1, wherein the UV irradiation is effected by conducting the gases through an electric arc generated in the cracking chamber to heat parts of the gas flow to ionization temperature while at the same time increasing the physical heat content of the gases.
3. A method according to claim 1, wherein the irradiation is effected by conducting the waste gases through a chamber into which a gas heated to ionization temperature in a plasma generator is introduced.
4. A method according to any one of claims 1 to 3, wherein the waste gases are introduced tangentially into the cracking chamber and are caused to rotate.
5. A method according to any one of claims 1 to 4, in which the destruction plant operates with a deficiency of oxygen to produce a combustible gas, wherein the waste gases are introduced, after having passed the cracking chamber, into a shaft filled with carbonaceous material in lump form to generate a gas containing carbon monoxide and hydrogen, while at the same time utilizing the heat content of the gas to reduce its oxygen potential.
6. A method according to claim 5, wherein a substance to increase reactivity is mixed in the shaft with the carbonaceous material in lump form.
7. A method according to claim 6 wherein the substance to increase reactivity is an alkali compound.
8. A method according to any one of claim 1 to 7, wherein the cleaning gases after cooling or heatexchanging to 350-700 C, are introduced into a reactor filled with a suitable acceptor for removing chlorine and/or HCI from the gas, as well as for condensing any metal vapour in the gas.
9. A method according to claim 8, wherein quicklime or slaked lime and/or dolomite is used as acceptor.
10. A plant for performing the method accord ing to claim 1 for cleaning waste gases, from destruction plants for dealing with industrial and household waste, of toxic chlorine compounds and/or heavier hydrocarbons including a furnace for gasification and at least partial disintegration of industrial and household waste and conventional means for heat exchanging, cleaning and cooling, comprising a cracking chamber containing a source for UV irradiation as well as a source for the supply of thermal energy.
11. A plant according to claim 10 wherein the cracking chamber is heat-insulated.
12. A plant according to claim 10 or 11, wherein the cracking chamber consists of a reactor with tangential inlet for the waste gases.
13. A plant according to any one of claims 10 to 12, wherein the source of UV irradiation and the supply of thermal energy consists of two elec trodes inserted in the chamber, between which an electric arc is generated inside the chamber, through which arc the waste gases are caused to flow.
14. A plant according to any one of claims 10 to 12, wherein the source of UV irradiation and sup ply of thermal energy consists of a plasma genera tor arranged in the immediate vicinity of the cracking chamber, in which plasma generator a gas flow is heated to ionization temperature, said ionized gas being subsequently introduced into the chamber.
15. A plant according to any one of claims 10 to 14, comprising a carburizing shaft filled with carbonaceous material in lump form, arranged immediately after the cracking chamber.
16. A plant according to any one of claims 10 to 15, comprising a reactor filled with a suitable acceptor for chlorine and HCI, arranged after the cracking chamber.
17. A plant according to any one of claims 10 to 15, comprising a carburization shaft arranged after the cracking chamber, and a cooler or heat-exchanger for cooling the gas to a temperature of 350 700 C.
18. A plant according to claim 17 having a reactor filled with a suitable acceptor for chlorine and HCI, arranged after the cracking chamber.
19. A plant according to claim 10 and substantially as hereinbefore described with reference to any one of the Figures of the drawings.
20. A method according to claim 1 and substantially as hereinbefore described with reference to any one of the Figures of the drawings.
GB08505127A 1984-10-23 1985-02-28 Cleaning waste gases Expired GB2165827B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8405302A SE452255B (en) 1984-10-23 1984-10-23 SET FOR PURIFICATION OF EXHAUST GAS FROM TOXIC CHLORINE COMPOUNDS AND / OR WEIGHTER THE FLASK, AND DEVICE FOR IMPLEMENTATION OF THE SET

Publications (3)

Publication Number Publication Date
GB8505127D0 GB8505127D0 (en) 1985-04-03
GB2165827A true GB2165827A (en) 1986-04-23
GB2165827B GB2165827B (en) 1988-04-20

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GB08505127A Expired GB2165827B (en) 1984-10-23 1985-02-28 Cleaning waste gases

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JP (1) JPS61101232A (en)
KR (1) KR860003050A (en)
AT (1) ATA117885A (en)
AU (1) AU578673B2 (en)
BE (1) BE902290A (en)
BR (1) BR8501685A (en)
CH (1) CH668199A5 (en)
DE (1) DE3512922A1 (en)
DK (1) DK169385A (en)
ES (1) ES8607749A1 (en)
FI (1) FI80832C (en)
FR (1) FR2571978B1 (en)
GB (1) GB2165827B (en)
IL (1) IL74794A (en)
IT (1) IT1184451B (en)
NL (1) NL8501035A (en)
NO (1) NO851335L (en)
PH (1) PH23203A (en)
SE (1) SE452255B (en)
ZA (1) ZA852471B (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4927621A (en) * 1989-01-27 1990-05-22 The Dow Chemical Company Purification of anhydrous hydrogen chloride
EP0414979A1 (en) * 1989-08-28 1991-03-06 Henry, Eugène Refuse-collecting and incinerating trailer
WO1991010499A1 (en) * 1990-01-18 1991-07-25 Krc Umwelttechnik Gmbh Process for removing organic trace substances from flue gases
US5108565A (en) * 1989-09-06 1992-04-28 Japan Atomic Energy Research Institute Method for removing harmful gas from refuse combustion exhaust gas
WO1993000982A1 (en) * 1991-07-12 1993-01-21 Maschinen- Und Anlagenbau Grimma Gmbh Process and device for detoxifying the exhaust gas from rubbish incineration plants
WO1993016761A1 (en) * 1992-02-27 1993-09-02 Process Technologies, Incorporated Method and apparatus for use in photochemically oxidizing gaseous halogenated organic compounds
US5397552A (en) * 1992-02-27 1995-03-14 Process Technologies, Inc. Method and apparatus for use in photochemically oxidizing gaseous organic compounds
US5601184A (en) * 1995-09-29 1997-02-11 Process Technologies, Inc. Method and apparatus for use in photochemically oxidizing gaseous volatile or semi-volatile organic compounds
GB2554406A (en) * 2016-09-26 2018-04-04 Edwards Korea Ltd Plasma abatement

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DE8704276U1 (en) * 1987-03-21 1987-08-06 Harress, Heinz Michael, Dr., 8856 Harburg Device for removing halogenated hydrocarbons from contaminated natural water sources, soil and/or the atmosphere
DE3718595A1 (en) * 1987-06-03 1988-12-15 Nicolaus Dr Grubhofer Method for disposal of liquid and/or gaseous wastes
US4793931A (en) * 1987-09-10 1988-12-27 Solarchem Research, A Division Of Brolor Investments Limited Process for treatment of organic contaminants in solid or liquid phase wastes
DE3903549A1 (en) * 1989-02-07 1990-08-09 Int Biotech Lab UV light for the degradation of pollutants, in particular of halogenated hydrocarbons
WO1991011658A1 (en) * 1990-01-29 1991-08-08 Noel Henry Wilson Destroying waste using plasma
DE4016514C3 (en) * 1990-05-22 1996-03-21 Ultra Systems Gmbh Uv Oxidatio Process for the decomposition of organic substances
DE19545563A1 (en) * 1995-12-07 1997-06-12 Hak Anlagenbau Gmbh Waste disposal process for treating e.g. vapours, powders, etc.
DE19621339C1 (en) * 1996-05-28 1998-02-12 Karlsruhe Forschzent Process for the destruction of chlorinated, aromatic compounds
KR20010016158A (en) * 2000-11-15 2001-03-05 김성근 Photolysis and pyrolysis complex air purification apparatus and a purification method thereof
KR100482701B1 (en) * 2002-07-12 2005-04-13 주식회사 세실플라즈마 Apparatus and method for cleaning of exahust gas with low temperature plasma
DK1980296T3 (en) * 2005-12-28 2014-03-24 Esri Co Ltd Process for the preparation of substances contaminated with organic chemicals

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GB1482600A (en) * 1973-08-16 1977-08-10 Spiess C F & Sohn Process for the oxidative degradation of unwanted carbon-containing substances
GB1483970A (en) * 1974-11-15 1977-08-24 Kureha Chemical Ind Co Ltd Method for removing hydrogen chloride from an exhaust gas

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DE2453098A1 (en) * 1974-11-08 1976-05-20 Eisenmann Kg Maschinenbaugesel Thermal cleaning system for waste gases - oxidises toxic waste in a combustion chamber supplied with electromagnetic emission
US4045316A (en) * 1975-05-27 1977-08-30 Shintech Incorporated Photochemical process for decontaminating gaseous or vaporous streams
US4210503A (en) * 1975-12-31 1980-07-01 Exxon Research & Engineering Co. Emission control method and system
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US4195596A (en) * 1976-08-02 1980-04-01 The Dow Chemical Company Combustion of halogenated hydrocarbons
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US4124681A (en) * 1977-08-15 1978-11-07 John Zink Company Particulate carbon disposal by combustion
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Publication number Priority date Publication date Assignee Title
GB1482600A (en) * 1973-08-16 1977-08-10 Spiess C F & Sohn Process for the oxidative degradation of unwanted carbon-containing substances
GB1483970A (en) * 1974-11-15 1977-08-24 Kureha Chemical Ind Co Ltd Method for removing hydrogen chloride from an exhaust gas

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4927621A (en) * 1989-01-27 1990-05-22 The Dow Chemical Company Purification of anhydrous hydrogen chloride
EP0414979A1 (en) * 1989-08-28 1991-03-06 Henry, Eugène Refuse-collecting and incinerating trailer
US5108565A (en) * 1989-09-06 1992-04-28 Japan Atomic Energy Research Institute Method for removing harmful gas from refuse combustion exhaust gas
WO1991010499A1 (en) * 1990-01-18 1991-07-25 Krc Umwelttechnik Gmbh Process for removing organic trace substances from flue gases
WO1993000982A1 (en) * 1991-07-12 1993-01-21 Maschinen- Und Anlagenbau Grimma Gmbh Process and device for detoxifying the exhaust gas from rubbish incineration plants
US5505909A (en) * 1991-07-12 1996-04-09 Maschinen-Und Anlagenbau Grimma Gmbh Process and a device for detoxifying the waste gases from waste incinerating plants
US5374404A (en) * 1992-02-27 1994-12-20 Process Technologies, Incorporated Method and apparatus for use in photochemically oxidizing gaseous halogenated organic compounds
US5397552A (en) * 1992-02-27 1995-03-14 Process Technologies, Inc. Method and apparatus for use in photochemically oxidizing gaseous organic compounds
WO1993016761A1 (en) * 1992-02-27 1993-09-02 Process Technologies, Incorporated Method and apparatus for use in photochemically oxidizing gaseous halogenated organic compounds
US5601184A (en) * 1995-09-29 1997-02-11 Process Technologies, Inc. Method and apparatus for use in photochemically oxidizing gaseous volatile or semi-volatile organic compounds
US5707595A (en) * 1995-09-29 1998-01-13 Process Technologies, Inc. Method and apparatus for use in photochemically oxidizing gaseous volatile or semi-volatile organic compounds
US5979054A (en) * 1995-09-29 1999-11-09 Process Technologies, Inc. Method of forming a sidewall for a reactor for oxidizing volatile or semi-volatile organic compounds
GB2554406A (en) * 2016-09-26 2018-04-04 Edwards Korea Ltd Plasma abatement

Also Published As

Publication number Publication date
SE8405302L (en) 1986-04-24
AU578673B2 (en) 1988-11-03
SE452255B (en) 1987-11-23
PH23203A (en) 1989-06-06
BR8501685A (en) 1986-11-11
IT8520350A0 (en) 1985-04-16
ES542359A0 (en) 1986-06-01
FI80832B (en) 1990-04-30
FR2571978B1 (en) 1989-12-08
FI80832C (en) 1990-08-10
IL74794A0 (en) 1985-07-31
AU4106585A (en) 1986-05-01
IT1184451B (en) 1987-10-28
ATA117885A (en) 1992-01-15
FR2571978A1 (en) 1986-04-25
CH668199A5 (en) 1988-12-15
DE3512922C2 (en) 1989-04-06
NL8501035A (en) 1986-05-16
GB2165827B (en) 1988-04-20
ES8607749A1 (en) 1986-06-01
SE8405302D0 (en) 1984-10-23
FI851310A0 (en) 1985-04-01
GB8505127D0 (en) 1985-04-03
DE3512922A1 (en) 1986-05-07
JPS61101232A (en) 1986-05-20
DK169385D0 (en) 1985-04-15
ZA852471B (en) 1986-11-26
IL74794A (en) 1988-03-31
KR860003050A (en) 1986-05-19
BE902290A (en) 1985-08-16
DK169385A (en) 1986-04-24
FI851310L (en) 1986-04-24
NO851335L (en) 1986-04-24

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