GB2015983A - Improved Deposition Method - Google Patents
Improved Deposition MethodInfo
- Publication number
- GB2015983A GB2015983A GB7908105A GB7908105A GB2015983A GB 2015983 A GB2015983 A GB 2015983A GB 7908105 A GB7908105 A GB 7908105A GB 7908105 A GB7908105 A GB 7908105A GB 2015983 A GB2015983 A GB 2015983A
- Authority
- GB
- United Kingdom
- Prior art keywords
- coating
- coatings
- glass
- refractive index
- iridescence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/211—SnO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/229—Non-specific enumeration
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/36—Underside coating of a glass sheet
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Abstract
This invention relates to transparent glass window structures of the type bearing a first coating 6 of infra-red reflective material, which is advantageously less than about 0.85 microns in thickness, wherein the observance of iridescence resulting from such a first coating is markedly reduced by the provision of a layer 4 of continuously varying refractive index between the glass 2 and the coating 6, such that the refractive index increases continuously from the glass to the first coating, thereby preventing the observation of iridescence. The coatings are applied by passing the substrate through a reaction zone in parallel with a reactive gas mixture which contains components for forming the two coatings, wherein the reaction to form the first coating proceeds more rapidly. A particular advantage of the invention is its efficacy with clear and lightly tinted glasses wherein the problem of iridescent color has had its greatest commercial impact. <IMAGE>
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/884,432 US4206252A (en) | 1977-04-04 | 1978-03-08 | Deposition method for coating glass and the like |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2015983A true GB2015983A (en) | 1979-09-19 |
GB2015983B GB2015983B (en) | 1983-02-02 |
Family
ID=25384616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB7908105A Expired GB2015983B (en) | 1978-03-08 | 1979-03-07 | Deposition method |
Country Status (19)
Country | Link |
---|---|
JP (2) | JPS54127424A (en) |
AR (1) | AR216975A1 (en) |
AU (1) | AU526605B2 (en) |
BE (1) | BE874614A (en) |
BR (1) | BR7901379A (en) |
CA (1) | CA1134214A (en) |
CH (1) | CH638762A5 (en) |
DE (1) | DE2908412C2 (en) |
DK (1) | DK94879A (en) |
ES (2) | ES478393A1 (en) |
FI (1) | FI790781A (en) |
FR (1) | FR2419335A1 (en) |
GB (1) | GB2015983B (en) |
IE (1) | IE48228B1 (en) |
IT (1) | IT1119685B (en) |
MX (1) | MX151883A (en) |
NL (1) | NL7901875A (en) |
NO (1) | NO145947C (en) |
SE (1) | SE445449B (en) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4291167A (en) | 1980-07-28 | 1981-09-22 | Nalco Chemical Company | Preparation of tetramethyldisilane from 1,2-tetramethyldichlorodisilane |
FR2516815A1 (en) * | 1981-11-20 | 1983-05-27 | Gordon Roy Gerald | IMPROVED CHEMICAL COATING DEPOSITION PROCESS |
GB2196349A (en) * | 1986-10-16 | 1988-04-27 | Glaverbel | Vehicle windows and method of manufacturing same |
EP0503382A1 (en) * | 1991-03-13 | 1992-09-16 | Watkins-Johnson Company | Method and apparatus for producing highly conductive and transparent films of tin and fluorine doped indium oxide by APCVD |
US5221352A (en) * | 1989-06-19 | 1993-06-22 | Glaverbel | Apparatus for pyrolytically forming an oxide coating on a hot glass substrate |
GB2292751A (en) * | 1994-09-01 | 1996-03-06 | Balzers Hochvakuum | Optical device with a coating having a continuously varying refractive index |
WO1997003029A1 (en) * | 1995-07-12 | 1997-01-30 | Saint-Gobain Vitrage | Glazing including a conductive and/or low-emissive layer |
EP0774533A1 (en) * | 1995-10-30 | 1997-05-21 | Dow Corning Corporation | Method for depositing Si-O containing coatings |
US6159871A (en) * | 1998-05-29 | 2000-12-12 | Dow Corning Corporation | Method for producing hydrogenated silicon oxycarbide films having low dielectric constant |
US6287990B1 (en) | 1998-02-11 | 2001-09-11 | Applied Materials, Inc. | CVD plasma assisted low dielectric constant films |
US6303523B2 (en) | 1998-02-11 | 2001-10-16 | Applied Materials, Inc. | Plasma processes for depositing low dielectric constant films |
US6667553B2 (en) | 1998-05-29 | 2003-12-23 | Dow Corning Corporation | H:SiOC coated substrates |
US6709721B2 (en) | 2001-03-28 | 2004-03-23 | Applied Materials Inc. | Purge heater design and process development for the improvement of low k film properties |
US6730593B2 (en) | 1998-02-11 | 2004-05-04 | Applied Materials Inc. | Method of depositing a low K dielectric with organo silane |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57100942A (en) * | 1980-12-10 | 1982-06-23 | Asahi Glass Co Ltd | Substrate coated with silicon oxide |
JPS58112374A (en) * | 1981-12-25 | 1983-07-04 | Fuji Electric Corp Res & Dev Ltd | Manufacture of photovoltaic device |
JPS58112375A (en) * | 1981-12-25 | 1983-07-04 | Fuji Electric Corp Res & Dev Ltd | Manufacture of photovoltaic device |
US4595634A (en) * | 1983-08-01 | 1986-06-17 | Gordon Roy G | Coating process for making non-iridescent glass |
DE4433206A1 (en) * | 1994-09-17 | 1996-03-21 | Goldschmidt Ag Th | Process for the pyrolytic coating of glass, glass ceramic and enamel products |
US5698262A (en) | 1996-05-06 | 1997-12-16 | Libbey-Owens-Ford Co. | Method for forming tin oxide coating on glass |
DE19624838A1 (en) * | 1996-06-21 | 1998-01-08 | Schueller Glasbeschichtung Gmb | Insulating anti-reflective coating and process for its production |
FR2787440B1 (en) * | 1998-12-21 | 2001-12-07 | Saint Gobain Vitrage | TRANSPARENT SUBSTRATE HAVING AN ANTI-REFLECTIVE COATING |
US6797388B1 (en) * | 1999-03-18 | 2004-09-28 | Ppg Industries Ohio, Inc. | Methods of making low haze coatings and the coatings and coated articles made thereby |
JP4924070B2 (en) * | 2007-02-06 | 2012-04-25 | ブラザー工業株式会社 | Printing device |
US8728634B2 (en) * | 2007-06-13 | 2014-05-20 | Ppg Industries Ohio, Inc. | Appliance transparency |
FR2956659B1 (en) | 2010-02-22 | 2014-10-10 | Saint Gobain | LAYER COATED VERTICAL SUBSTRATE WITH IMPROVED MECHANICAL STRENGTH |
FR2962852A1 (en) | 2010-07-19 | 2012-01-20 | Saint Gobain | TRANSPARENT ELECTRODE FOR HIGH-PERFORMANCE PHOTOVOLTAIC CELL |
EP2761054B1 (en) * | 2011-09-30 | 2019-08-14 | Arkema, Inc. | Deposition of silicon oxide by atmospheric pressure chemical vapor deposition |
FR2983350A1 (en) * | 2011-11-30 | 2013-05-31 | Saint Gobain | Transparent electrode for use in front face substrate of photovoltaic cell, has tin and silicon mixed oxide layer with specific thickness, and positioned between electroconducting layer and photovoltaic material |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE841625C (en) * | 1942-02-01 | 1952-06-16 | Leitz Ernst Gmbh | Process for the production of reflection-reducing layers, e.g. B. on glass |
DE742463C (en) * | 1942-07-15 | 1944-01-18 | Jenaer Glaswerk Schott & Gen | Layer for changing the reflectivity from a plurality of alternately superimposed partial layers made of two substances with different refractive indices |
US2602032A (en) * | 1946-08-19 | 1952-07-01 | Libbey Owens Ford Glass Co | Electrically conducting surface and method for producing same |
US2617745A (en) * | 1951-12-19 | 1952-11-11 | Pittsburgh Plate Glass Co | Method of producing an electroconductive article |
US2962388A (en) * | 1954-03-12 | 1960-11-29 | Metallgesellschaft Ag | Process for the production of titanium carbide coatings |
GB1115884A (en) * | 1966-03-25 | 1968-05-29 | Standard Telephones Cables Ltd | Method for depositing on a substrate coherent solid layers |
FR1524729A (en) * | 1966-05-27 | 1968-05-10 | Dow Corning | Method and apparatus for the continuous production of semiconductor materials |
US3808035A (en) * | 1970-12-09 | 1974-04-30 | M Stelter | Deposition of single or multiple layers on substrates from dilute gas sweep to produce optical components, electro-optical components, and the like |
FR2210675B1 (en) * | 1972-12-15 | 1978-05-12 | Ppg Industries Inc | |
GB1507465A (en) * | 1974-06-14 | 1978-04-12 | Pilkington Brothers Ltd | Coating glass |
GB1507996A (en) * | 1975-06-11 | 1978-04-19 | Pilkington Brothers Ltd | Coating glass |
GB1524326A (en) * | 1976-04-13 | 1978-09-13 | Bfg Glassgroup | Coating of glass |
-
1979
- 1979-02-06 CA CA320,878A patent/CA1134214A/en not_active Expired
- 1979-02-07 IE IE235/79A patent/IE48228B1/en unknown
- 1979-02-07 AU AU44014/79A patent/AU526605B2/en not_active Expired
- 1979-02-19 MX MX176653A patent/MX151883A/en unknown
- 1979-02-28 AR AR275647A patent/AR216975A1/en active
- 1979-03-02 FR FR7905492A patent/FR2419335A1/en active Granted
- 1979-03-03 DE DE2908412A patent/DE2908412C2/en not_active Expired - Fee Related
- 1979-03-05 BE BE0/193835A patent/BE874614A/en not_active IP Right Cessation
- 1979-03-05 CH CH213079A patent/CH638762A5/en not_active IP Right Cessation
- 1979-03-07 FI FI790781A patent/FI790781A/en not_active Application Discontinuation
- 1979-03-07 GB GB7908105A patent/GB2015983B/en not_active Expired
- 1979-03-07 BR BR7901379A patent/BR7901379A/en unknown
- 1979-03-07 NO NO790762A patent/NO145947C/en unknown
- 1979-03-07 DK DK94879A patent/DK94879A/en not_active Application Discontinuation
- 1979-03-07 ES ES478393A patent/ES478393A1/en not_active Expired
- 1979-03-07 IT IT67488/79A patent/IT1119685B/en active
- 1979-03-07 SE SE7902052A patent/SE445449B/en not_active IP Right Cessation
- 1979-03-08 NL NL7901875A patent/NL7901875A/en not_active Application Discontinuation
- 1979-03-08 JP JP2723879A patent/JPS54127424A/en active Granted
- 1979-07-12 ES ES482440A patent/ES482440A1/en not_active Expired
-
1986
- 1986-12-09 JP JP61293328A patent/JPS62191448A/en active Granted
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4291167A (en) | 1980-07-28 | 1981-09-22 | Nalco Chemical Company | Preparation of tetramethyldisilane from 1,2-tetramethyldichlorodisilane |
FR2516815A1 (en) * | 1981-11-20 | 1983-05-27 | Gordon Roy Gerald | IMPROVED CHEMICAL COATING DEPOSITION PROCESS |
GB2196349A (en) * | 1986-10-16 | 1988-04-27 | Glaverbel | Vehicle windows and method of manufacturing same |
US4910088A (en) * | 1986-10-16 | 1990-03-20 | Glaverbel | Vehicle windows |
GB2196349B (en) * | 1986-10-16 | 1991-06-19 | Glaverbel | Vehicle windows and method of manufacturing same |
US5221352A (en) * | 1989-06-19 | 1993-06-22 | Glaverbel | Apparatus for pyrolytically forming an oxide coating on a hot glass substrate |
EP0503382A1 (en) * | 1991-03-13 | 1992-09-16 | Watkins-Johnson Company | Method and apparatus for producing highly conductive and transparent films of tin and fluorine doped indium oxide by APCVD |
GB2292751A (en) * | 1994-09-01 | 1996-03-06 | Balzers Hochvakuum | Optical device with a coating having a continuously varying refractive index |
US5648147A (en) * | 1994-09-01 | 1997-07-15 | Balzers Aktiengesellschaft | optical device and method for coating an optical substrate |
GB2292751B (en) * | 1994-09-01 | 1998-03-11 | Balzers Hochvakuum | Optical device and method for coating an optical substrate |
US6354109B1 (en) | 1995-07-12 | 2002-03-12 | Saint-Gobain Glass France | Process and apparatus for providing a film with a gradient |
WO1997003029A1 (en) * | 1995-07-12 | 1997-01-30 | Saint-Gobain Vitrage | Glazing including a conductive and/or low-emissive layer |
US6174599B1 (en) | 1995-07-12 | 2001-01-16 | Saint-Gobain Vitrage | Glazing panel provided with a conductive and/or low emissivity film |
EP0774533A1 (en) * | 1995-10-30 | 1997-05-21 | Dow Corning Corporation | Method for depositing Si-O containing coatings |
US6537929B1 (en) | 1998-02-11 | 2003-03-25 | Applied Materials, Inc. | CVD plasma assisted low dielectric constant films |
US6303523B2 (en) | 1998-02-11 | 2001-10-16 | Applied Materials, Inc. | Plasma processes for depositing low dielectric constant films |
US6348725B2 (en) | 1998-02-11 | 2002-02-19 | Applied Materials, Inc. | Plasma processes for depositing low dielectric constant films |
US6287990B1 (en) | 1998-02-11 | 2001-09-11 | Applied Materials, Inc. | CVD plasma assisted low dielectric constant films |
US6541282B1 (en) | 1998-02-11 | 2003-04-01 | Applied Materials, Inc. | Plasma processes for depositing low dielectric constant films |
US6562690B1 (en) | 1998-02-11 | 2003-05-13 | Applied Materials, Inc. | Plasma processes for depositing low dielectric constant films |
US6730593B2 (en) | 1998-02-11 | 2004-05-04 | Applied Materials Inc. | Method of depositing a low K dielectric with organo silane |
US6159871A (en) * | 1998-05-29 | 2000-12-12 | Dow Corning Corporation | Method for producing hydrogenated silicon oxycarbide films having low dielectric constant |
US6593655B1 (en) | 1998-05-29 | 2003-07-15 | Dow Corning Corporation | Method for producing hydrogenated silicon oxycarbide films having low dielectric constant |
US6667553B2 (en) | 1998-05-29 | 2003-12-23 | Dow Corning Corporation | H:SiOC coated substrates |
US6709721B2 (en) | 2001-03-28 | 2004-03-23 | Applied Materials Inc. | Purge heater design and process development for the improvement of low k film properties |
Also Published As
Publication number | Publication date |
---|---|
IE790235L (en) | 1979-09-08 |
NL7901875A (en) | 1979-09-11 |
NO145947B (en) | 1982-03-22 |
DE2908412C2 (en) | 1994-01-27 |
NO790762L (en) | 1979-09-11 |
SE7902052L (en) | 1979-09-09 |
JPS635343B2 (en) | 1988-02-03 |
BR7901379A (en) | 1979-10-02 |
NO145947C (en) | 1982-06-30 |
FR2419335A1 (en) | 1979-10-05 |
JPS54127424A (en) | 1979-10-03 |
GB2015983B (en) | 1983-02-02 |
DK94879A (en) | 1979-09-09 |
AU526605B2 (en) | 1983-01-20 |
SE445449B (en) | 1986-06-23 |
FR2419335B1 (en) | 1985-03-22 |
ES482440A1 (en) | 1980-02-16 |
JPS62191448A (en) | 1987-08-21 |
CH638762A5 (en) | 1983-10-14 |
IE48228B1 (en) | 1984-11-14 |
DE2908412A1 (en) | 1979-09-20 |
MX151883A (en) | 1985-04-23 |
AU4401479A (en) | 1979-09-20 |
FI790781A (en) | 1979-09-09 |
JPH0157061B2 (en) | 1989-12-04 |
BE874614A (en) | 1979-09-05 |
CA1134214A (en) | 1982-10-26 |
IT1119685B (en) | 1986-03-10 |
AR216975A1 (en) | 1980-02-15 |
ES478393A1 (en) | 1980-01-16 |
IT7967488A0 (en) | 1979-03-07 |
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