AU4401479A - Deposition method - Google Patents

Deposition method

Info

Publication number
AU4401479A
AU4401479A AU44014/79A AU4401479A AU4401479A AU 4401479 A AU4401479 A AU 4401479A AU 44014/79 A AU44014/79 A AU 44014/79A AU 4401479 A AU4401479 A AU 4401479A AU 4401479 A AU4401479 A AU 4401479A
Authority
AU
Australia
Prior art keywords
deposition method
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU44014/79A
Other versions
AU526605B2 (en
Inventor
Roy Gerald Gordon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GORDON RG
Original Assignee
GORDON RG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/884,432 external-priority patent/US4206252A/en
Application filed by GORDON RG filed Critical GORDON RG
Publication of AU4401479A publication Critical patent/AU4401479A/en
Application granted granted Critical
Publication of AU526605B2 publication Critical patent/AU526605B2/en
Anticipated expiration legal-status Critical
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/211—SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/229—Non-specific enumeration
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/36—Underside coating of a glass sheet

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
AU44014/79A 1978-03-08 1979-02-07 Deposition method Expired AU526605B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/884,432 US4206252A (en) 1977-04-04 1978-03-08 Deposition method for coating glass and the like
US884432 1978-03-17

Publications (2)

Publication Number Publication Date
AU4401479A true AU4401479A (en) 1979-09-20
AU526605B2 AU526605B2 (en) 1983-01-20

Family

ID=25384616

Family Applications (1)

Application Number Title Priority Date Filing Date
AU44014/79A Expired AU526605B2 (en) 1978-03-08 1979-02-07 Deposition method

Country Status (19)

Country Link
JP (2) JPS54127424A (en)
AR (1) AR216975A1 (en)
AU (1) AU526605B2 (en)
BE (1) BE874614A (en)
BR (1) BR7901379A (en)
CA (1) CA1134214A (en)
CH (1) CH638762A5 (en)
DE (1) DE2908412C2 (en)
DK (1) DK94879A (en)
ES (2) ES478393A1 (en)
FI (1) FI790781A (en)
FR (1) FR2419335A1 (en)
GB (1) GB2015983B (en)
IE (1) IE48228B1 (en)
IT (1) IT1119685B (en)
MX (1) MX151883A (en)
NL (1) NL7901875A (en)
NO (1) NO145947C (en)
SE (1) SE445449B (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4291167A (en) 1980-07-28 1981-09-22 Nalco Chemical Company Preparation of tetramethyldisilane from 1,2-tetramethyldichlorodisilane
JPS57100942A (en) * 1980-12-10 1982-06-23 Asahi Glass Co Ltd Substrate coated with silicon oxide
US4386117A (en) * 1981-11-20 1983-05-31 Gordon Roy G Coating process using alkoxy substituted silicon-bearing reactant
JPS58112374A (en) * 1981-12-25 1983-07-04 Fuji Electric Corp Res & Dev Ltd Manufacture of photovoltaic device
JPS58112375A (en) * 1981-12-25 1983-07-04 Fuji Electric Corp Res & Dev Ltd Manufacture of photovoltaic device
US4595634A (en) * 1983-08-01 1986-06-17 Gordon Roy G Coating process for making non-iridescent glass
GB8624825D0 (en) * 1986-10-16 1986-11-19 Glaverbel Vehicle windows
US5221352A (en) * 1989-06-19 1993-06-22 Glaverbel Apparatus for pyrolytically forming an oxide coating on a hot glass substrate
US5122391A (en) * 1991-03-13 1992-06-16 Watkins-Johnson Company Method for producing highly conductive and transparent films of tin and fluorine doped indium oxide by APCVD
CH690511A5 (en) * 1994-09-01 2000-09-29 Balzers Hochvakuum An optical component and method for manufacturing such.
DE4433206A1 (en) * 1994-09-17 1996-03-21 Goldschmidt Ag Th Process for the pyrolytic coating of glass, glass ceramic and enamel products
FR2736632B1 (en) 1995-07-12 1997-10-24 Saint Gobain Vitrage GLAZING PROVIDED WITH A CONDUCTIVE AND / OR LOW-EMISSIVE LAYER
TW328971B (en) * 1995-10-30 1998-04-01 Dow Corning Method for depositing Si-O containing coatings
US5698262A (en) 1996-05-06 1997-12-16 Libbey-Owens-Ford Co. Method for forming tin oxide coating on glass
DE19624838A1 (en) * 1996-06-21 1998-01-08 Schueller Glasbeschichtung Gmb Insulating anti-reflective coating and process for its production
US6303523B2 (en) 1998-02-11 2001-10-16 Applied Materials, Inc. Plasma processes for depositing low dielectric constant films
US6287990B1 (en) 1998-02-11 2001-09-11 Applied Materials, Inc. CVD plasma assisted low dielectric constant films
US6054379A (en) 1998-02-11 2000-04-25 Applied Materials, Inc. Method of depositing a low k dielectric with organo silane
US6667553B2 (en) 1998-05-29 2003-12-23 Dow Corning Corporation H:SiOC coated substrates
US6159871A (en) * 1998-05-29 2000-12-12 Dow Corning Corporation Method for producing hydrogenated silicon oxycarbide films having low dielectric constant
FR2787440B1 (en) * 1998-12-21 2001-12-07 Saint Gobain Vitrage TRANSPARENT SUBSTRATE HAVING AN ANTI-REFLECTIVE COATING
US6797388B1 (en) * 1999-03-18 2004-09-28 Ppg Industries Ohio, Inc. Methods of making low haze coatings and the coatings and coated articles made thereby
US6709721B2 (en) 2001-03-28 2004-03-23 Applied Materials Inc. Purge heater design and process development for the improvement of low k film properties
JP4924070B2 (en) * 2007-02-06 2012-04-25 ブラザー工業株式会社 Printing device
US8728634B2 (en) * 2007-06-13 2014-05-20 Ppg Industries Ohio, Inc. Appliance transparency
FR2956659B1 (en) 2010-02-22 2014-10-10 Saint Gobain LAYER COATED VERTICAL SUBSTRATE WITH IMPROVED MECHANICAL STRENGTH
FR2962852A1 (en) 2010-07-19 2012-01-20 Saint Gobain TRANSPARENT ELECTRODE FOR HIGH-PERFORMANCE PHOTOVOLTAIC CELL
US20140227512A1 (en) * 2011-09-30 2014-08-14 Arkema Inc. Deposition of silicon oxide by atmospheric pressure chemical vapor deposition
FR2983350A1 (en) * 2011-11-30 2013-05-31 Saint Gobain Transparent electrode for use in front face substrate of photovoltaic cell, has tin and silicon mixed oxide layer with specific thickness, and positioned between electroconducting layer and photovoltaic material

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE841625C (en) * 1942-02-01 1952-06-16 Leitz Ernst Gmbh Process for the production of reflection-reducing layers, e.g. B. on glass
DE742463C (en) * 1942-07-15 1944-01-18 Jenaer Glaswerk Schott & Gen Layer for changing the reflectivity from a plurality of alternately superimposed partial layers made of two substances with different refractive indices
US2602032A (en) * 1946-08-19 1952-07-01 Libbey Owens Ford Glass Co Electrically conducting surface and method for producing same
US2617745A (en) * 1951-12-19 1952-11-11 Pittsburgh Plate Glass Co Method of producing an electroconductive article
US2962388A (en) * 1954-03-12 1960-11-29 Metallgesellschaft Ag Process for the production of titanium carbide coatings
GB1115884A (en) * 1966-03-25 1968-05-29 Standard Telephones Cables Ltd Method for depositing on a substrate coherent solid layers
FR1524729A (en) * 1966-05-27 1968-05-10 Dow Corning Method and apparatus for the continuous production of semiconductor materials
US3808035A (en) * 1970-12-09 1974-04-30 M Stelter Deposition of single or multiple layers on substrates from dilute gas sweep to produce optical components, electro-optical components, and the like
FR2210675B1 (en) * 1972-12-15 1978-05-12 Ppg Industries Inc
GB1507465A (en) * 1974-06-14 1978-04-12 Pilkington Brothers Ltd Coating glass
GB1507996A (en) * 1975-06-11 1978-04-19 Pilkington Brothers Ltd Coating glass
GB1524326A (en) * 1976-04-13 1978-09-13 Bfg Glassgroup Coating of glass

Also Published As

Publication number Publication date
FR2419335B1 (en) 1985-03-22
NO790762L (en) 1979-09-11
GB2015983B (en) 1983-02-02
IT1119685B (en) 1986-03-10
ES482440A1 (en) 1980-02-16
SE7902052L (en) 1979-09-09
IE790235L (en) 1979-09-08
JPH0157061B2 (en) 1989-12-04
IT7967488A0 (en) 1979-03-07
NO145947C (en) 1982-06-30
BR7901379A (en) 1979-10-02
CH638762A5 (en) 1983-10-14
FR2419335A1 (en) 1979-10-05
DK94879A (en) 1979-09-09
JPS635343B2 (en) 1988-02-03
MX151883A (en) 1985-04-23
JPS62191448A (en) 1987-08-21
IE48228B1 (en) 1984-11-14
CA1134214A (en) 1982-10-26
NO145947B (en) 1982-03-22
SE445449B (en) 1986-06-23
BE874614A (en) 1979-09-05
GB2015983A (en) 1979-09-19
DE2908412C2 (en) 1994-01-27
NL7901875A (en) 1979-09-11
DE2908412A1 (en) 1979-09-20
ES478393A1 (en) 1980-01-16
AR216975A1 (en) 1980-02-15
AU526605B2 (en) 1983-01-20
FI790781A (en) 1979-09-09
JPS54127424A (en) 1979-10-03

Similar Documents

Publication Publication Date Title
AU526605B2 (en) Deposition method
AU536340B2 (en) Coating process
AU540034B2 (en) Coating process
AU4782679A (en) Oxygenerator
AU4569779A (en) 4-aza-17-substituted-5a-androstan-3-ones
AU1328683A (en) O-alkoxycarbonyl benzenesulfonylisocyanates
AU4529679A (en) N-heterocyclyl-4-piperidinamines
AU4620679A (en) An improved process
AU4398379A (en) 9-amino-dibenzopyrans
AU4406379A (en) 1-aryloxy-3-hitratoalkylamino-2-propanols
AU523471B2 (en) Defrosting method
AU4530579A (en) Plansifters
AU4506179A (en) Nitrodiarylamines
AU4524379A (en) N-oxacyclic-alkylpiperidyl-diazacompounds
DE2966835D1 (en) Deposition process
AU4507279A (en) Phenoxyalkylamines
AU4398479A (en) N-azolylalkyl-halogenoacetanilides
AU522422B2 (en) Rafozanide - polyvinylpyrrolidone complex
AU4954979A (en) In-the-mould coating
AU4519079A (en) Dilignols
AU523176B2 (en) Oxyhydrochlorination process
AU4450379A (en) Androstadienes
AU532933B2 (en) Multipackaging method
AU4506279A (en) Nitrodiarylamines
AU4495679A (en) Decahydro-isoquinolines