GB2014014B - Voltage contrast in scanning electron microscopy - Google Patents

Voltage contrast in scanning electron microscopy

Info

Publication number
GB2014014B
GB2014014B GB7902301A GB7902301A GB2014014B GB 2014014 B GB2014014 B GB 2014014B GB 7902301 A GB7902301 A GB 7902301A GB 7902301 A GB7902301 A GB 7902301A GB 2014014 B GB2014014 B GB 2014014B
Authority
GB
United Kingdom
Prior art keywords
scanning electron
electron microscopy
voltage contrast
contrast
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7902301A
Other versions
GB2014014A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bull HN Information Systems Italia SpA
Original Assignee
Honeywell Information Systems Italia SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Information Systems Italia SpA filed Critical Honeywell Information Systems Italia SpA
Publication of GB2014014A publication Critical patent/GB2014014A/en
Application granted granted Critical
Publication of GB2014014B publication Critical patent/GB2014014B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
GB7902301A 1978-01-23 1979-01-22 Voltage contrast in scanning electron microscopy Expired GB2014014B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT19508/78A IT1092854B (en) 1978-01-23 1978-01-23 SCANNING MICROSCOPY DEVICE FOR SELECTIVE VOLTAGE CONTRAST WITH DELAY LINE AND RELATED METHOD

Publications (2)

Publication Number Publication Date
GB2014014A GB2014014A (en) 1979-08-15
GB2014014B true GB2014014B (en) 1982-06-23

Family

ID=11158613

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7902301A Expired GB2014014B (en) 1978-01-23 1979-01-22 Voltage contrast in scanning electron microscopy

Country Status (5)

Country Link
JP (1) JPS54120579A (en)
DE (1) DE2901939A1 (en)
GB (1) GB2014014B (en)
IT (1) IT1092854B (en)
NL (1) NL7900456A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3235700A1 (en) * 1982-09-27 1984-03-29 Siemens AG, 1000 Berlin und 8000 München METHOD AND DEVICE FOR RECORDING SIGNAL PROCESSES ON A CYCLICALLY OPERATED SAMPLE, DEPENDING ON A SPORADICALLY EVENT

Also Published As

Publication number Publication date
GB2014014A (en) 1979-08-15
JPS54120579A (en) 1979-09-19
IT7819508A0 (en) 1978-01-23
IT1092854B (en) 1985-07-12
NL7900456A (en) 1979-07-25
DE2901939A1 (en) 1979-07-26

Similar Documents

Publication Publication Date Title
JPS5638756A (en) Atmospheric scanning electron microscope
GB8304432D0 (en) Scanning electron microscope
GB2020895B (en) Scanning electron microscope
JPS55161344A (en) Scan electron microscope
JPS5537769A (en) High voltage dc breaker
GB2002900B (en) Scanning type electron microscope
GB8408516D0 (en) Scanning type electron microscope
GB2021150B (en) Low voltage hard anodizing process
JPS54116889A (en) High voltage optoocoupler
DE3265695D1 (en) Scanning electron microscope for use in situ
GB2035740B (en) Switching high voltages
GB2052843B (en) Scanning electron microscope
GB2040116B (en) Voltage generator curucitry
GB2019691B (en) Scanning electron microscope with non-differentiated phaseimage formation
JPS51123056A (en) Scanning stereoscopic electron microscope
GB2014014B (en) Voltage contrast in scanning electron microscopy
GB8301096D0 (en) Electron scanning microscopes
GB2038546B (en) Combined electron and optical microscope arrangement
GB2100540B (en) Reference voltage generators
JPS5368562A (en) Electron microscope
GB2013450B (en) Electron microscope
GB2126778B (en) Improvements relating to scanning electron and scanning optical microscopes
JPS54163669A (en) Scanning electron microscope and its analogous device
JPS55155456A (en) Heater for scan electron microscope
JPS553198A (en) High voltage breaker

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee