GB2014014B - Voltage contrast in scanning electron microscopy - Google Patents
Voltage contrast in scanning electron microscopyInfo
- Publication number
- GB2014014B GB2014014B GB7902301A GB7902301A GB2014014B GB 2014014 B GB2014014 B GB 2014014B GB 7902301 A GB7902301 A GB 7902301A GB 7902301 A GB7902301 A GB 7902301A GB 2014014 B GB2014014 B GB 2014014B
- Authority
- GB
- United Kingdom
- Prior art keywords
- scanning electron
- electron microscopy
- voltage contrast
- contrast
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004626 scanning electron microscopy Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
- H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT19508/78A IT1092854B (en) | 1978-01-23 | 1978-01-23 | SCANNING MICROSCOPY DEVICE FOR SELECTIVE VOLTAGE CONTRAST WITH DELAY LINE AND RELATED METHOD |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2014014A GB2014014A (en) | 1979-08-15 |
GB2014014B true GB2014014B (en) | 1982-06-23 |
Family
ID=11158613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB7902301A Expired GB2014014B (en) | 1978-01-23 | 1979-01-22 | Voltage contrast in scanning electron microscopy |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS54120579A (en) |
DE (1) | DE2901939A1 (en) |
GB (1) | GB2014014B (en) |
IT (1) | IT1092854B (en) |
NL (1) | NL7900456A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3235700A1 (en) * | 1982-09-27 | 1984-03-29 | Siemens AG, 1000 Berlin und 8000 München | METHOD AND DEVICE FOR RECORDING SIGNAL PROCESSES ON A CYCLICALLY OPERATED SAMPLE, DEPENDING ON A SPORADICALLY EVENT |
-
1978
- 1978-01-23 IT IT19508/78A patent/IT1092854B/en active
-
1979
- 1979-01-19 NL NL7900456A patent/NL7900456A/en not_active Application Discontinuation
- 1979-01-19 JP JP547679A patent/JPS54120579A/en active Pending
- 1979-01-19 DE DE19792901939 patent/DE2901939A1/en not_active Withdrawn
- 1979-01-22 GB GB7902301A patent/GB2014014B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB2014014A (en) | 1979-08-15 |
JPS54120579A (en) | 1979-09-19 |
IT7819508A0 (en) | 1978-01-23 |
IT1092854B (en) | 1985-07-12 |
NL7900456A (en) | 1979-07-25 |
DE2901939A1 (en) | 1979-07-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |