JPS54163669A - Scanning electron microscope and its analogous device - Google Patents

Scanning electron microscope and its analogous device

Info

Publication number
JPS54163669A
JPS54163669A JP7257178A JP7257178A JPS54163669A JP S54163669 A JPS54163669 A JP S54163669A JP 7257178 A JP7257178 A JP 7257178A JP 7257178 A JP7257178 A JP 7257178A JP S54163669 A JPS54163669 A JP S54163669A
Authority
JP
Japan
Prior art keywords
electron microscope
scanning electron
analogous device
analogous
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7257178A
Other languages
Japanese (ja)
Inventor
Yoshihiro Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP7257178A priority Critical patent/JPS54163669A/en
Publication of JPS54163669A publication Critical patent/JPS54163669A/en
Pending legal-status Critical Current

Links

JP7257178A 1978-06-15 1978-06-15 Scanning electron microscope and its analogous device Pending JPS54163669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7257178A JPS54163669A (en) 1978-06-15 1978-06-15 Scanning electron microscope and its analogous device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7257178A JPS54163669A (en) 1978-06-15 1978-06-15 Scanning electron microscope and its analogous device

Publications (1)

Publication Number Publication Date
JPS54163669A true JPS54163669A (en) 1979-12-26

Family

ID=13493183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7257178A Pending JPS54163669A (en) 1978-06-15 1978-06-15 Scanning electron microscope and its analogous device

Country Status (1)

Country Link
JP (1) JPS54163669A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011113776A (en) * 2009-11-26 2011-06-09 Hitachi High-Technologies Corp Charged-particle microscope, and control method for charged-particle microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011113776A (en) * 2009-11-26 2011-06-09 Hitachi High-Technologies Corp Charged-particle microscope, and control method for charged-particle microscope
US8934006B2 (en) 2009-11-26 2015-01-13 Hitachi High-Technologies Corporation Charged-particle microscope and method for controlling same

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